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Positional deviation measurement
Continued from the previous page
Specify a 1P-SCH (1-point search), a 2P-SCH (2-point search), or a 1P-SCH+1P-EDGE (1-point search +
1-point edge)
[The setting sequence for the gray scale search conditions]
· This is the sequence of events when a 1-point search or a 1-point search + 1-point edge is selected.
1MEAS WINDOW (MDL0)
(measurement window)
4DTECT COORD (MDL0)
(detection coordinates)
· This is the sequence of events when a 2-point search is selected.
1MEAS WINDOW (MDL0)
(measurement window)
4DTECT COORD (MDL0)
(detection coordinates)
7REF IMAGE (MODEL1)
(reference images)
[Information about the recording of a reference image]
In order to record a reference image it is necessary to use the freeze frame.
The specifications for the windows are as follows.
· In the case of a rectangular window
Reference image
Search area
9
· In the case of a horizontal line
Reference image
Search area
· In the case of a vertical line
Reference image
Search area
When using either a horizontal or vertical line, please bear the following in mind.
The length of the reference image must be less than that of the search area.
[An example of recording]
· This example is of a 2-point search in a rectangular measurement window.
Reference image
· For an example of a horizontal or vertical line measurement window, see page 9·50.
Returns you to the [MEASURING COND]
If you specified a 1P-SCH + 1P-EDGE (1-point search + 1-point edge),
select item 4 EDGE DETECT COND (edge detection conditions).
0CONTR. PIXEL(MDL1)
(pixel contraction)
Line type
Movement
Solid line
Units of 4 pixels
Dotted line
Units of 4 pixels
Line type
Solid line
In a horizontal direction: units of 4 pixels
In a vertical direction: units of 1 pixel
Dotted line
Line type
Solid line
In a horizontal direction: units of 1 pixel
In a vertical direction: units of 4 pixels
Dotted line
Model 1
(Model 1)
Search area
(Model 1)
If you specified a 1P-SCH (1-point search) or a 2P-SCH (2-point
search), select item 5 UPPER MENU.
2REF IMAGE (MODEL0)
(reference images)
5CONTR. PIXEL (MDL0)
(pixel contraction)
2REF IMAGE (MODEL1)
(reference images)
5CONTR. PIXEL (MDL0)
(pixel contraction)
8SEARCH AREA
9DTECT COORD (MDL1)
(detection coordinates)
(MDL1)
Size
Units of 4 pixels
Units of 4 pixels
Movement
Movement
9-38
3SEARCH AREA (MDL0)
qDETECT ACCURANCY
wUPPER MENU
(accuracy of detection)
3SEARCH AREA (MDL0)
6MEAS WINDOW (MDL1)
(measurement window)
qDETECT ACCURANCY
wUPPER MENU
(accuracy of detection)
Minimum
Maximum
32 x 32 (pixels)
X Y (X
Y=65536 pixels)
32 x 32 (pixels)
512
480 pixels
Length
Minimum length
Units of 4
8 pixels
pixels
Length
Minimum length
Units of 4
8 pixels
pixels
Model 2
Reference image (model 2)
Search area (model 2)
Go to page 9·41
Continued on the
following page
Maximum length
512 pixels
Maximum length
480 pixels
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