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[5] Position correction
Based on the positional deviation data measurement 0 (positional deviation measurement), the
correction of the image coordinates is dealt with using measurements 1 to 3.
(1) Correction details
The types of position correction available are: XY correction, angular correction (standard) and
angular correction (high precision)
XY correction
Angular correction
(standard)
Angular correction
(high precision)
[Example of a comparison between standard and high precision angular correction]
9
Type
The position is adjusted according to the amount of deviation in X and
Y at the first point (model 0) detected in measurement 0.
There are three correction directions: X axis correction, Y axis
correction and X and Y axis correction.
· X axis correction--Adjusted misalignment in the X axis
· Y axis correction--Adjusted misalignment in the Y axis
· X and Y axes correction--Adjusted misalignment in both the X and Y
axes
The position is adjusted because of a detected angular deviation in
rotation [2-point search/2-point edge/1-point search + 1-point edge]
from measurement 0.
The position is adjusted because of a detected angular deviation in
rotation [2-point search/2-point edge/1-point search + 1-point edge]
from measurement 0.
The high precision angular correction settings allows the IV-S20 to
display a very precisely corrected image. But, this selection lowers
rotation processing speed.
Scanned image
Scanned image
Details
Image after correction
(Standard)
(High precision)
θ image after angular correction
9-20
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