Maintenabce And Inspection; Inspection Of Connection Cable; Cleaning; Maintenance - Edwards STP-XF1313 Series Instruction Manual

Turbomolecular pump
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5

MAINTENABCE AND INSPECTION

5.1

Inspection of connection cable

When carrying out the maintenance of the STP pump, perform the following inspection.
1. Check that there is no damage to each cable connected to STC-U, STP control unit, and STP
pump. If there is any damage, repair or replace with a new cable.
2. Ensure that the connector of the cable is correctly connected. If insufficient connection is found,
reconnect the connector.
5.2

Cleaning

The method of cleaning the STC-U is shown below.
• Clean the outside of the STC-U with a dry wipe as required.
• Clean off with a pure gas when dust has accumulated in the connector.
• When the label of the STC-U has been damaged, contact Service office.
5.3

Maintenance

Regular overhaul (the cost of overhaul will be at your own charge) is required for safety and proper
use of STC-U. This overhaul includes inspection and cleaning. Internal components of the STC-U will
deteriorate after long-term use. To prevent unexpected failure by deteriorated parts, replacement of
the main parts is recommended along with an overhaul. Refer to the following list as recommended
maintenance intervals for main parts.
Part name
PCBA in STC-U
*1:
Maintenance intervals of any parts may be shortened depending on the condition of use
The cost of replacing parts due to confirmed deterioration will be at the customers charge, even
though a period is not exceeding the recommended maintenance intervals.
When overhaul of the STC-U is needed, contact Service office.
STC-U eTMS unit
Recommended maintenance intervals
7 years
5
*1
MT-92E-B01-D
Page 33

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