Hrsmu - High Resolution Smu - Agilent Technologies B1500A User Manual

Semiconductor device analyzer
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Figure 2-5

HRSMU - High Resolution SMU

This section describes typical specification of the high resolution source/monitor
unit (HRSMU) for Agilent B1500A.
Maximum voltage, current, output power: ± 100 V, ± 100 mA, 2 W
Minimum range: 0.5 V, 10 pA (1 pA when the E5288A ASU is used)
Output/measurement value and resolution: see Table 2-9 to Table 2-12.
HRSMU Output and Measurement Ranges
Agilent B1500A User's Guide, Edition 10
Introduction
Measurement Units
2- 25

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