Agilent Technologies B1500A Training Manual
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Agilent Technologies B1500A Training Manual

Semiconductor device analyzer
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Agilent B1500A
Semiconductor Device
Analyzer
Self-paced Training Manual, 5
Agilent Technologies

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  • Page 1 Agilent B1500A Semiconductor Device Analyzer Self-paced Training Manual, 5 Agilent Technologies...
  • Page 2 Notices © Agilent Technologies 2005 - 2008 Manual Part Number ware” as defined in DFAR 252.227-7014 (June 1995), or as a “commercial item” as No part of this manual may be reproduced B1500-90044 defined in FAR 2.101(a) or as “Restricted in any form or by any means (including computer software”...
  • Page 4 EasyEXPERT. You will learn about what is the B1500A. • Module 2. Getting Started This module explains the basic operations of the B1500A. You will learn about how to launch B1500A/EasyEXPERT and how to perform application test and quick test. •...
  • Page 5 This module explains the SPGU Control classic test. You will learn how to create the classic test setup and the applications using SPGU in the course exercises. EasyEXPERT is a trademark of Agilent Technologies. All other trademarks are the property of their respective owners.
  • Page 6 Class Exercises Class exercises use the test setup listed below. The test setup data are only examples and included in the Demo.xpg file stored in the Manual CD-ROM. Module Exercise Device Test setup/definition/data Page Module 1 no exercise Module 2 Id-Vd measurement MOSFET CMOS: Id-Vd...
  • Page 7 Demo.xpg file Demo.xpg file is required to create the Demo preset group which contains the test setup data used by the class exercises. And it is stored in the \data folder on the Agilent B1500A Manual CD-ROM, Edition 4 or later.
  • Page 8 Test Setup for Class Exercises The Demo preset group contains the following test setup. The setup data are only examples for the class exercises. The following table lists the test setup name in alphabetical order. Test Setup Name Description ALWG monitor 511 kohm sampling measurement with SPGU ALWG output Charge Pumping 4T MOSFET Icp-Vbase measurement...
  • Page 9 Test Setup Name Description Trng List MOSFET Vth-gmmax measurement using I/V List Sweep Trng Multi Multi Channel I/V Sweep (Bipolar transistor and LED) 0.1 μF sampling measurement Trng Sampling Trng Switch B2200/E5250 switch setup, Input 1-3-5-7 to Output 1-3-5-7 Zero-check SMU open measurement Zero-check-ASU SMU open measurement with ASU...
  • Page 10 Required Devices for Class Exercises To perform the class exercises, you need the device set (Agilent part number 04156-87001) which contains the following devices. Description Quantity N-channel MOSFET 2 ea. NPN Bipolar Transistor 1 ea. Red Miniature LED 1 ea. 0.1 μF Capacitor 50 V 1 ea.
  • Page 11 Required Accessories for Class Exercises To perform the class exercises, you need the following accessories. Prepare the accessories shown below. Designation Description Model No. Qty. Test Fixture 1 ea. 16442A/B 28 pin socket module 1 ea. Connection wire 6 ea. Triaxial Cable 16494A 4 ea.
  • Page 12 To perform the flash memory class exercise in Module 13 and if you use the ASU, you need the following accessories. Description Model No. Qty. ASU (Atto Sense/Switch Unit) with control cable E5288A Total 3sets Triaxial Cable 16494A or Total equivalent 7ea.
  • Page 13 • • SMU/Pulse Generator Selector • B2200/E5250 Switch Control • Desktop EasyEXPERT Module 2. Getting Started • To Turn on/off B1500A • To Launch EasyEXPERT • To Specify/Create Workspace • To Perform Application Test • To Save/Recall Your Test Setup •...
  • Page 14 Contents Module 3. Data Display and Management • Data Display window • Graph Analysis Tools • Data Status • To Change Graph/List/Display Setup • To See Print Preview • To Print Display Data • To Copy Graph Plot/List Data • To Save Analysis Result •...
  • Page 15 Contents Module 5. Basic Measurement • SMU Fundamentals • Classic Test Environment • SMUs Connected in Series or Parallel • Cabling and Fixture Issues • Kelvin and Driven Guard • Probes and Prober Connections • Triax and Coax Adapters • Safety Interlock Issues Module 6.
  • Page 16 Contents Module 7. Measurement Functions • SMU Pulsed Sweep Measurement • I/V-t Sampling Measurement • Negative Hold Time for High Speed Sampling • Auto Analysis • SMU Filter • SMU Series Resistor • Standby Function • Bias Hold Function Module 8. Capacitance Measurement •...

  • Page 17: Table Of Contents

    Contents Module 9. Modifying Application Test Definitions • To Open Application Test Definition • To Modify Test Definition • To Use Debug Tools • To Use Built-in Functions • To Add Data Display • To Use Auto Analysis • To Use Test Setup Internal Variables Module 10.
  • Page 18 Contents Module 11. Advanced Definitions and Operations • To Control External GPIB Devices • To Call Execution Files • To Perform Repeat Measurements • Prober Control Script Module 12. Miscellaneous Operations • Function Status Indicator • Run Option • Automatic Data Export and Data Record •...
  • Page 19 Contents Module 13. SPGU Control and Applications • High Voltage SPGU • SPGU Control • Pulse Generator Mode • Charge Pumping • Flash Memory Test • ALWG Mode Contents-7...
  • Page 21 Creating Your Test Definitions...

  • Page 22: Contents

    Module 10 Creating Your Test Definitions In This Module • What is Test Definition • What is Test Contents • To Open Test Definition Editor • To Define Test Specification • To Define Test Contents • Available Elements • Available Variables •...

  • Page 23: What Is Test Definition

    Module 10 Creating Your Test Definitions What is Test Definition Test Specification Test Output •Multi display mode •Test name •Variables •Test description •Analysis parameters •Variables •Test result display •Device parameters •X-Y graph •Test parameters •Entry fields •Data list •Parameter display •Local variables •Test execution flow •Test setup...

  • Page 24: What Is Test Contents

    Module 10 Creating Your Test Definitions What is Test Contents Test Specification Test Output Variables Variables •Device parameters •Analysis parameters •Test parameters Analysis Local variables Miscellaneous Program Component Classic Test My Favorite Application Test Test contents are the test execution flow (program flow), and is the core of the test definition. In the test contents, the following elements can be defined.

  • Page 25: To Open Test Definition Editor

    Module 10 Creating Your Test Definitions To Open Test Definition Editor Define New Test… To start test definition, open the test definition editor. Select the Application Test tab, click the Library button, and select the Define New Test… function. The test definition editor will be opened. See next slide. 10-5...

  • Page 26: To Define Test Specification

    Module 10 Creating Your Test Definitions To Define Test Specification Set test information Set properties of parameter Define device parameters The test definition editor provides three tabs, Test Specification, Test Contents, and Test Output. At first define the test specification. Click the Test Specification tab. In the Test Information area: •Click the right button in the Category field to specify the category the new test definition belongs.
  • Page 27 Module 10 Creating Your Test Definitions To Define Test Specification Set properties of parameter Define test parameters In the Test Parameters Definition area: •Select the Background that will be displayed on the application test setup area of the main screen. Usually it is the image that shows the device connections.
  • Page 28 Module 10 Creating Your Test Definitions Setup example This example sets: Category: Exercise (This category may be created by the class exercise in Module 9) Test Name: Trng idvd idvg Icon: MOSFET.bmp Device parameters: Hold and Delay Background: Vth_Const_Id.PNG Test parameters: Drain, Gate, Source, Subs, Idcomp, Igcomp IdVd_V1start, IdVd_V1step, IdVd_V1stop, IdVd_V2start, IdVd_V2step, IdVd_V2nop IdVg_V1start, IdVg_V1stop, IdVg_V1step, IdVg_Vdrain...
  • Page 29 Module 10 Creating Your Test Definitions Setup example - Layout Primary Entry Field The Define Layout dialog box is used to define the layout of the test parameter entry fields displayed on the application test setup screen. The following methods are available for selecting the entry fields. •Click on the entry field.
  • Page 30 Module 10 Creating Your Test Definitions Result example This is a result example of the test specification setup shown in the previous pages. 10-10...

  • Page 31: To Define Test Contents

    Module 10 Creating Your Test Definitions To Define Test Contents 4. Select available element 5. Click Insert or desired button 2. Define the local variables used in this test contents 3. Specify the line to insert element or to be edited 6.

  • Page 32: Available Elements

    Module 10 Creating Your Test Definitions Available elements Program Component Application Test Analysis Classic Test Miscellaneous My Favorite Available elements are shown above. The Program Component provides the typical program statements such as IF, LOOP, FOR, and so on. They are used to control the test execution flow. The Application Test, Classic Test, and My Favorite are used to define the test setup/test condition.

  • Page 33: Available Variables

    Module 10 Creating Your Test Definitions Available variables Assign to external variables… Test Contents •Local variables Test Specification •Device parameters •Test parameters Test Output You can connect the •Analysis parameters variables in test setup with •Local variables •Device parameters Do not set the same name •Test parameters for variables and •Analysis parameters...
  • Page 34 Module 10 Creating Your Test Definitions Defining local variables Local Variables Definition Add Numeric Variable button displays the Numeric Variable area that provides the following fields. •Name: Numeric variable name •Value: Initial value of the variable •Description: Additional information for the variable Add Vector Variable button displays the Vector Variable area that provides the following fields.
  • Page 35 Module 10 Creating Your Test Definitions Editing test contents •Block Selection •Insert •Delete •Copy •Cut •Paste The Edit tab provides the following buttons: •Block Selection/Line Selection toggle button selects the edit target selection mode. In the line selection mode, clicking line just selects the line. In the block selection mode, clicking line selects the block the line belongs.
  • Page 36 Module 10 Creating Your Test Definitions Debug menu •Run •Abort •Stop •Break •Inspect The Debug tab menu provides the following buttons: •Run button starts the debug (executes the test flow). During execution, the label changes to Pause. Clicking Pause button pauses the execution, and changes the label to Run that is used to continue the debug (execution).
  • Page 37 Module 10 Creating Your Test Definitions Class Exercise Create test definition and perform test. 1. Open test definition editor. 2. Define Test Specification (see previous page) 3. Define Test Contents shown below. 4. Save the definition as Trng idvd idvg. 5.
  • Page 38 Module 10 Creating Your Test Definitions Test Definition Example variables Use IDVD and GMMAX in the Demo preset group (My Favorite Setup) for the test setup. Use the variables defined in the Test Specification to set the Unit on the Channel Setup, the source values on the Measurement Setup, the Min and Max values on the Display Setup, and so on.
  • Page 39 Module 10 Creating Your Test Definitions Measurement Result Example This is a test result example displayed on the Data Display window. 10-19...

  • Page 40: To Define Test Output

    Module 10 Creating Your Test Definitions To Define Test Output 2. Define the analysis parameters 6. Select the multi display mode Comply with above level Enable Disable 3. Specify X axis and Y axis 5. Select parameters 4. Select variables to list to display The test output setup is optional.
  • Page 41 Module 10 Creating Your Test Definitions To Define Test Output Analysis Parameters Define Analysis Parameters… Define the analysis parameters as shown below: At the Vector Parameters area or the Scalar Parameters area: 1. Click the Add button. 2. Enter the Name, Unit, and Description of the parameter. For the sweep output/measurement data, use the vector parameter.
  • Page 42 Module 10 Creating Your Test Definitions To Define Test Output Display Parameters This example sets: X-Y Graph: ID-VG plot for Y1-X graph and GM-VG plot for Y2-X graph List Display: VG, ID, and GM Parameters: GM_MAX and VTH All parameters must be defined in the Analysis Parameter Definition window shown in the previous slide.
  • Page 43 Advanced Definitions and Operations...
  • Page 44 Module 11 Advanced Definitions and Operations In This Module • To Control External GPIB Devices • To Call Execution Files • To Perform Repeat Measurements • Prober Control Script Note: 11-2...

  • Page 45: To Control External Gpib Devices

    Module 11 Advanced Definitions and Operations To Control External GPIB Devices Miscellaneous: GPIB I/O Write String to send a string command to GPIB device Write Value to send a command to GPIB device Read String to read a string value from GPIB device Read Value to read a numeric value data from GPIB device Read List...
  • Page 46 Module 11 Advanced Definitions and Operations To Control External GPIB Devices Agilent B2200 control example To send command Programming image: *RST :ROUT:FUNC ACON (enters “SMU1” to StringPort) :ROUT:SYMB:PORT {0},”{1}” :ROUT:SYMB:PORT? {0} (reads string data) *OPC? (reads operation complete flag) (enters “OUT1” to StringCh) Value 1 :ROUT:SYMB:CHAN {0},{2},”{1}”...
  • Page 47 Module 11 Advanced Definitions and Operations To Control External GPIB Devices Agilent B2200 control example To read data Programming image: *RST :ROUT:FUNC ACON (enters “SMU1” to StringPort) :ROUT:SYMB:PORT {0},”{1}” :ROUT:SYMB:PORT? {0} (reads string data) *OPC? (reads operation complete flag) (enters “OUT1” to StringCh) :ROUT:SYMB:CHAN {0},{2},”{1}”...

  • Page 48: To Call Execution Files

    The above example calls the sleep.exe file used to insert the wait time for program execution. The WAIT value must be defined in msec. After the normal command execution, the sleep.exe returns 1 for Value and 0 for Result. The sleep.exe file is stored in the following folder. C:\Program Files\Agilent\B1500A\EasyEXPERT\Utilities 11-6...
  • Page 49 Module 11 Advanced Definitions and Operations To set Format field {I[,A][:F]} • I List data index. Or index of element. Integer. • [,A] Character length of the specified data element. Positive integer for right-aligned, or negative integer for left-aligned. Optional. •...
  • Page 50 Module 11 Advanced Definitions and Operations Exercise Try to improve your test definition as you want. • To Use Built-in Functions • To Use Read Out Functions • To Control External GPIB Devices • To Call Execution Files 11-8...

  • Page 51: To Perform Repeat Measurements

    Module 11 Advanced Definitions and Operations To Perform Repeat Measurements Start (Run) Count=0 Start Procedure C:\Program Files\Agilent\B1500\EasyEXPERT status= 0 ? C:\Program Files\Agilent\B1500\EasyEXPERT Count < limit Test Execution C:\Program Files\Agilent\B1500\EasyEXPERT Count=Count+1 Iteration Procedure status= 0 ? Abort Final Procedure If Abort is clicked limit status Repeat measurement is performed as shown in this flowchart.
  • Page 52 Module 11 Advanced Definitions and Operations Subsite move Test Setup Save Specify ProberType. Or specify driver for your prober in CustomProber. Select If you do not use the sub die (subsite) move operation, skip this page. Click Application Test tab and open the Subsite move test setup in the Utility category. On the Subsite move setup screen, specify ProberType (Cascade, Suss, or Vector) or driver for your prober in CustomerProber, and save it as a setup in your preset group (My Favorite Setup).
  • Page 53 Module 11 Advanced Definitions and Operations To Use Subsite move C:\Program Files\Agilent\B1500\EasyEXP C:\Program Files\Agilent\B1500\EasyEXP C:\Program Files\Agilent\B1500\EasyEXP If you do not use the sub die (subsite) move operation, skip this page. To perform the test with the sub die move operation, do as follows. 1.

  • Page 54: Prober Control Script

    Module 11 Advanced Definitions and Operations Prober Control Script • Prober information file Use prober control script in EasyEXPERT prober_info.ini Repeat Measurement Setup window • Start Procedure Start_xxxx.exe • Iteration Procedure Iterator_xxxx.exe • Final Procedure Final_xxxx.exe • Subsite Procedure Subsite_xxxx.exe xxxx: •...
  • Page 55 Module 11 Advanced Definitions and Operations Start_xxxx.exe Start • Arguments: -a GPIB_address Displays Device ID Entry dialog box -l log_file_name Example: Updates prober_info.ini file –a GPIB0::5::INSTR –l C:\temp\prb.log Displays Start Confirmation dialog box • Response: XML format data Moves to the first position <Response>...
  • Page 56 Module 11 Advanced Definitions and Operations Prober_info.ini [Prober] Address=GPIB::5::INSTR GPIB address of prober LogMode=True LogName=C:\temp\prb.log Full path name of log file [Target] UseID=True device_id = prefix:coordinate SubsiteInfo=False WaferInfo=False <Response> ID=waf1a <Break>0</Break> <Target>waf1a:4 1</Target> </Response> Prefix you enter in the Device ID Entry dialog box. ID is automatically recorded in the prober_info.ini file.
  • Page 57 Module 11 Advanced Definitions and Operations Iterator_xxxx.exe Start • Arguments: -a GPIB_address Chuck down -l log_file_name Example: Prober error? –a GPIB0::5::INSTR –l C:\temp\prb.log • Response: XML format data Moves to the next position <Response> Prober error? <Break>status</Break> <Target>device_id</Target> Gets X-Y coordinate </Response>...
  • Page 58 Module 11 Advanced Definitions and Operations Final_xxxx.exe • Arguments: -a GPIB_address -l log_file_name Example: –a GPIB0::5::INSTR –l C:\temp\prb.log • Response: none C:\Program Files\Agilent\B1500\EasyEXP Start C:\Program Files\Agilent\B1500\EasyEXP Chuck down C:\Program Files\Agilent\B1500\EasyEXP Stop condition To specify the final procedure on the Repeat Measurement Setup dialog box, enter the full path name of Final_xxxx.exe into the Final Procedure field.
  • Page 59 Module 11 Advanced Definitions and Operations Subsite_xxxx.exe Start • Arguments: -a GPIB_address Chuck down -l log_file_name Example: Prober error? –a GPIB0::5::INSTR –l C:\temp\prb.log • Response: XML format data Moves to the next subsite <Response> Prober error? <Break>status</Break> <Target>device_id</Target> Gets X-Y coordinate </Response>...
  • Page 60 Module 11 Advanced Definitions and Operations To Change Execution Flow Test Execution Subsite Procedure status= 0 ? Move to the 1 subsite If you use the subsite procedure, change the flowchart as follows. On the page 11-9, replace the box A with the block A shown above. On the page 11-13 and 11-15, insert the box B shown above to the position B of the flowchart.
  • Page 61 Miscellaneous Operations...
  • Page 62 Module 12 Miscellaneous Operations In This Module • Function Status Indicators • Run Option • Automatic Data Export and Data Record • Calibration • Configuration • XSLT Filters • To Enable System Controller • To Start Desktop EasyEXPERT • To Use 415x Setup File Converter This module describes the above topics.

  • Page 63: Function Status Indicator

    Module 12 Miscellaneous Operations Function Status Indicators Automatic data record ON Automatic data export OFF SMU zero offset cancel OFF Standby function OFF Multiple data display OFF Function status indicators let you know the status OFF or ON of the following functions. The indicators are placed at the bottom of the main screen.

  • Page 64: Run Option

    Module 12 Miscellaneous Operations Run Option Auto Export and Auto Record status: Save Data button appears if the last test result data is in the memory when both Auto Export and Auto Record are OFF, and allows you to save the last data as the test result record.

  • Page 65: Automatic Data Export And Data Record

    Module 12 Miscellaneous Operations Automatic Data Export and Data Record The automatic data export function and the automatic data record function can be enabled or disabled by using the Test Results Data Auto Export dialog box. This dialog box is displayed by clicking these indicators or selecting the Results >...

  • Page 66: Calibration

    Module 12 Miscellaneous Operations SMU Calibration Calibration The Calibration window is opened by clicking the Calibration button. The SMU calibration screen of this window is used to perform the calibration of SMUs. The list area of this screen lists Name, Full Range, and Status.
  • Page 67 Module 12 Miscellaneous Operations SMU Zero Cancel Calibration The SMU Zero Cancel screen is used to perform the SMU zero offset current measurement and set the SMU zero offset cancel function. This function subtracts the offset current from the current measurement raw data, and returns the result as the measurement data.
  • Page 68 Module 12 Miscellaneous Operations CMU Calibration Calibration The CMU Calibration screen is used to perform the measurement data correction of the multi frequency capacitance measurement unit (MFCMU). For the easy way, perform the phase compensation and the open correction at least. The check boxes left of the Open/Short/Load Correction and the Phase Compensation are effective after the corresponding measurement is performed.
  • Page 69 Module 12 Miscellaneous Operations Advanced Options for CMU Calibration This dialog box is opened by clicking the Advanced Options... button, and is used to set the information required to measure the open/short/load correction data and the phase compensation data. This dialog box provides the following action button. OK: Applies the setup changes and closes this dialog box.
  • Page 70 Module 12 Miscellaneous Operations Advanced Options for CMU Calibration Integration Time area defines the integration time used for measuring phase compensation data or open/short/load correction data. The number of averaging samples (Mode=AUTO) or the averaging time (Mode=PLC) is set. Mode: A/D converter operation mode, AUTO or PLC. Factor: Factor for the initial value.
  • Page 71 Module 12 Miscellaneous Operations Advanced Options for CMU Calibration Reference Standard Values area provides the following entry fields used to set the reference values of the open/short/load standard. If you use the standard, enter the reference values to the entry fields. OPEN Reference: Capacitance and Conductance.

  • Page 72: Configuration

    EasyEXPERT Rev.: Displays the revision number of the EasyEXPERT. Firmware Rev.: Displays the revision number of the B1500 firmware. Host ID: Displays the host id of the B1500A internal computer. Main Frame Diagnosis: This area lists Item and Status. Item: Name of diagnostics item. To select, check the left check box.
  • Page 73 Module 12 Miscellaneous Operations Configuration Modules The Modules screen is used to perform self-test of modules. Slot: Slot number where the module is installed. To select, check the left check box. Module Type: Module model number Name: Module name Status: Self-test status, Passed, Failed, Recovered, or ---- (self-test has not been performed) SCUU: Specifies if the module is connected to the SCUU.
  • Page 74 Module 12 Miscellaneous Operations Configuration The ASU screen is available if the B1500A installs the HRSMU connected to the ASU (Atto Sense/Switch Unit), and shows the ASU information. Slot: Slot number Module Type: Type of module Name: Module name or SMU name ASU Serial Number: Serial number of the ASU connected to the HRSMU.
  • Page 75 Switching Matrix Type: Displays the type of the switching matrix or No Switching Matrix. GPIB Address: Specifies the GPIB address of the switching matrix. 1 to 30. Poll: Confirms if the switching matrix of the specified GPIB address is connected to the B1500A. Start Self Test: Starts the selftest of the switching matrix.
  • Page 76 Module 12 Miscellaneous Operations Configuration Extended Configuration This dialog box is opened by clicking the Extended Configuration button in the Configuration window Switching Matrix screen. Save as Hardware Profile is used to save the hardware profile that is the B2200A/B2201A/E5250A hardware configuration and the measurement module connection.
  • Page 77 Module 12 Miscellaneous Operations Configuration SMU/PG Selector The SMU/PG Selector screen is used to specify the input connection and the channel connection status of the Agilent 16440A SMU/PG selector. Enable SMU/PG Selector: Check this box to use the selector. Selector CH1/CH2: Indicates the channels 1 and 2 of the first selector respectively. Selector CH3/CH4: Indicates the channels 1 and 2 of the second selector respectively.
  • Page 78 Module 12 Miscellaneous Operations SMU/PG Selector Easy to switch between SMU and PGU ● Solid state relay ● 16440A Selector Input SMU To DUT Channel 1 Input PGU Input SMU Channel 2 To DUT Input PGU SW1 & SW2 : Mechanical Relay ✓...
  • Page 79 Module 12 Miscellaneous Operations Configuration Event Log The Event Log screen displays the event log. Date/Time: Displays date and time of the event. Message: Event message ID: Process ID of the event Process: Process name User: User name. Windows login name. Host: Host name of the B1500 The Refresh button refreshes the event log.
  • Page 80 Module 12 Miscellaneous Operations XSLT Filters Click this button Highlight this line The XSLT (XSL-Transformation, eXtensible Stylesheet Language Transformation) filter files are used to export test records. The fifteen filter files listed below are stored in the C:\Program Files\Agilent\B1500\EasyEXPERT\Utilities\XSLT folder. The following filter files are used for exporting the measurement data only.

  • Page 81: To Enable System Controller

    To Enable System Controller Agilent IO Library Connection Expert To control external GPIB devices, the B1500A must be set to system controller. Exit the EasyEXPERT, and close the Start EasyEXPERT window. After that, launch the Agilent Connection Expert by clicking Start, All Programs, Agilent IO Library Suite, and Agilent connection Expert.

  • Page 82: To Start Desktop Easyexpert

    Note: For the offline mode. To use the same module configuration as the B1500A, copy the UnitConfigB1500A.xml file to your PC which the Desktop EasyEXPERT runs. The file is stored in the B1500A hard disk drive. The location is shown in the slide. The file must be copied to the same location in your PC.

  • Page 83: To Use 415X Setup File Converter

    Setup File Converter which has the function to create the XTS file by converting the MES or DAT file to the EasyEXPERT format. This executable file is stored in the following folder. C:\Program Files\Agilent\B1500A\EasyEXPERT\Utilities You can execute the setup file converter on the Command Prompt as shown below. If you want to use the Windows desktop instead of the Command Prompt, see the next page.
  • Page 84 Module 12 Miscellaneous Operations To Use 415x Setup File Converter 1. Drag and drop the shortcuts of the MES/DAT file on the shortcut of the Setup File Converter. 3. XTS file and shortcut are created. 2. File conversion is executed and system message is displayed. You can perform the file conversion on the Windows desktop as follows.
  • Page 85 SPGU Control and Applications...
  • Page 86 Module 13 SPGU Control and Applications In This Module • High Voltage SPGU • SPGU Control • Pulse Generator Mode • Charge Pumping • Flash Memory Test • ALWG Mode Note: 13-2...

  • Page 87: High Voltage Spgu

    Module 13 SPGU Control and Applications High Voltage SPGU High Voltage Semiconductor Pulse Generator Unit 2 channels per module Output impedance: 50 ohm Amplitude: +/-40 V (open load), +/-20 V (50 ohm load) PG mode or ALWG mode Free run, duration, or count 2- or 3-level pulse output for each channel in PG mode Pulse switch Automatic voltage level adjustment...
  • Page 88 LED to show the output switch status The B1500A can install the maximum of five SPGUs. The SPGUs must be installed in the contiguous slots from the slot 1. Where the SPGU installed in the slot 1 is the master SPGU. The channel number PG1 is assigned for the Output 1 of the master SPGU.
  • Page 89 Module 13 SPGU Control and Applications High Voltage SPGU Pulse Switch CLOSE Write Erase Drain CLOSE OPEN Substrate Gate Source Drain CLOSE Pulse period Substrate Gate Source OPEN Write Erase The pulse switch is the built-in high speed analog switch to open/close the SPGU output for each channel.
  • Page 90 Module 13 SPGU Control and Applications High Voltage SPGU Effects of Load Impedance Output Impedance 50 Ω Vset Vdut Rdut Pulse Source Vset: Setting voltage with open load Rdut × Vdut Vset Rdut The voltage actually applied to the DUT depends on it’s impedance. This behavior is very common among the instrumentations like DC power supply and pulse generators.
  • Page 91 Module 13 SPGU Control and Applications High Voltage SPGU Effects of Load Impedance Mismatch of load impedance setting may cause the error of Actual applied voltage to the DUT. Expected Setup: 1V output, 50 Ω load Actual load: 1 MΩ 2 V output Expected Actual...
  • Page 92 Module 13 SPGU Control and Applications High Voltage SPGU Agilent 16493P BNC (m) - SMA (m) Cable BNC (m) connector: • To connector plate • To 16442A/B test fixture • To 16440A SMU/PGU selector • To E5288A ASU (Atto Sense and Switch Unit ) SMA (m) connector: •...

  • Page 93: Spgu Control

    The SPGU provides two output mode, VPULSE (pulse generator mode) and ALWG (arbitrary linear waveform generator mode). And the same mode must be set to the all output channels. The B1500A can have the maximum of ten SPGU output channels.
  • Page 94 Module 13 SPGU Control and Applications SPGU Control SPGU Pulse Setup SPGU Control Buttons on Measurement Setup screen of a Classic Test If the SPGU output mode is set to VPULSE, the Pulse/ALWG button opens the SPGU Pulse Setup window. This window is used to define the voltage pulses applied by the specified SPGU channels. For the setup parameters, see later page titled Pulse Setup Parameters of Pulse Generator Mode.
  • Page 95 Module 13 SPGU Control and Applications SPGU Control Pulse Switch Setup Pulse period Pulse switch 50 ohm Width Delay SPGU 3-level voltage pulse OPEN Write Erase Default setting of the switch is “CLOSE” You can set the pulse switch operation on the Pulse Switch Setup dialog box. Set the SW Sync to ENABLE to use the pulse switch.
  • Page 96 Module 13 SPGU Control and Applications SPGU Control Load Z Setup Output Impedance Setting (default=50 ohm) 50 Ω Vset Vdut Rdut Vset: Setting voltage with open load You can specify the load impedance of DUT on the Load Z Setup dialog box. By setting the load impedance value accurately, the SPGU can apply the voltage near the setting value to the DUT.
  • Page 97 Module 13 SPGU Control and Applications SPGU Control SPGU ALWG Setup SPGU Control Buttons on Measurement Setup screen of a Classic Test This button opens the Define ALWG Waveform window used to define the ALWG output sequence. If the SPGU output mode is set to ALWG, the Pulse/ALWG button opens the SPGU ALWG Setup window.

  • Page 98: Pulse Generator Mode

    Module 13 SPGU Control and Applications Pulse Generator Mode Pulse Setup Parameters Pulse period Pulse width Leading time Trailing time Pulse peak 90 % Amplitude 10 % Pulse base Delay time The pulse setup parameters are defined as shown above. The pulse leading time and trailing time are defined as the voltage transition time between 10 % and 90 % of the amplitude.
  • Page 99 Module 13 SPGU Control and Applications Pulse Generator Mode Pulse output example: 2. SPGU Pulse Setup window Pulse period 3. Pulse setup parameters To apply the SPGU pulse output, set the pulse setup parameters, specify the Operation, and click the Single button.
  • Page 100 -40V SPGU1 Up to 10 output channels can be installed in one B1500A and each channel can output 3-level pulse with a maximum output voltage. The channels are independent. So the channels can apply the different pulses. However, the pulse period value is common for all channels.

  • Page 101: Charge Pumping

    Module 13 SPGU Control and Applications Charge Pumping Gate Source Drain Oxide Substrate Charge pumping is a type of hot carrier measurement. It provides direct measurement of interface states and an indication of electron and hole trapping. The gate of the MOS transistor is connected to a pulse generator. The current (Icp) is caused by the repetitive recombination of minority carriers with majority carriers at the silicon-silicon oxide interface.
  • Page 102 Module 13 SPGU Control and Applications Charge Pumping Three Methods of Charge Pumping Gate Waveforms Voltage Square Pulse Triangle Pulse Trapezoidal Pulse Time Square Pulse The base of the pulse is stepped from well below gate threshold to well above. At each step, the substrate leakage current is monitored.
  • Page 103 Module 13 SPGU Control and Applications Charge Pumping Start Calculates Vbase & Sets meas. parameters to I_sub sampling test I_sub sampling meas. by applying Vg pulse Records Isub and Vbase Looping of classic test for each More Vbase? base step of Gate pulse. Calculates IcpMax &...
  • Page 104 Module 13 SPGU Control and Applications Class Exercise Square Pulse Charge Pumping 1. Recall the Charge Pumping 4T 0.1V step test record. 2. Connect the DUT (MOS FET) as shown in the next page. 3. Specify the module (SMU and PGU) connected to DUT terminal properly.
  • Page 105 SMU4 : terminal 4 PGU1 : terminal 3 Then, the modules must be connected to the fixture as shown below. B1500A SMU1 -> Fixture SMU1 connector B1500A SMU2 -> Fixture SMU2 connector B1500A SMU4 -> Fixture SMU4 connector B1500A PG1 -> Fixture PGU1 connector...
  • Page 106 Module 13 SPGU Control and Applications Measurement Result Example Here we see the result of plotting Icp vs pulse base voltage. 13-22...
  • Page 107 Module 13 SPGU Control and Applications Flash Memory Basic Flash memory Cell Structure Erase Write (discharged) (Qf is injected) Control gate Floating node Delta Vg Source Drain Bulk Voltage for Write/Erase judgment Effective gate voltage shifts Delta Vg = Qf/Cf. Cf is effective floating gate capacitance.
  • Page 108 Module 13 SPGU Control and Applications Flash Memory – Endurance Test 1 million Write/Erase cycle test Start Initial Write/Erase Test Next burst test i <= 10^6 Write/ Program Burst Write/Erase Test Write Erase (*1) Id(on) and Id(off) Measure Vth (*1) are measured as well.
  • Page 109 Module 13 SPGU Control and Applications Flash Memory – Endurance Test NAND Cell Test Write pulse SPGU output • Burst write/erase reduces test time dramatically Gate Drain In an example, the test time was less -40V Source than 2 hours for 1 million cycle test. It will be about 1/70 compared with 3-level pulse by each channel Erase pulse...
  • Page 110 Module 13 SPGU Control and Applications Flash Memory – Endurance Test NOR Write Connection Selector or ASU ch3 SMU4 Mech Solid Mech Selector or ASU ch2 State Drain SMU3 Mech SMU1 Substrate Mech Selector or ASU ch1 Source Gate SMU2 Mech Solid Mech...
  • Page 111 Module 13 SPGU Control and Applications Flash Memory – Endurance Test NOR Erase Connection Selector or ASU ch3 SMU4 Mech Solid Mech Selector or ASU ch2 State Drain SMU3 Mech SMU1 Substrate Mech Selector or ASU ch1 Source Gate SMU2 Mech Solid Mech...
  • Page 112 Module 13 SPGU Control and Applications Flash Memory – Endurance Test Measure Vth Connection Selector or ASU ch3 SMU4 Mech Solid Mech Selector or ASU ch2 State Drain SMU3 Mech SMU1 Substrate Mech Selector or ASU ch1 Source Gate SMU2 Mech Solid Mech...
  • Page 113 B1500A installed with two SPGU modules and four SMU modules Test fixture Triaxial cable, 7 ea. BNC-SMA cable, 3 ea. B1500A installed with two SPGU modules, three pairs of HRSMU and ASU, and a SMU module Test fixture Triaxial cable, 7 ea. BNC-SMA cable, 3 ea.
  • Page 114 B1500A SMU3 -> Selector ch2 SMU input or ASU ch2 Force B1500A SMU4 -> Selector ch3 SMU input or ASU ch3 Force B1500A PG2 -> Selector ch1 PGU input or ASU ch1 AUX In B1500A PG3 -> Selector ch2 PGU input or ASU ch2 AUX In B1500A PG4 ->...
  • Page 115 Module 13 SPGU Control and Applications Demo-S-NorFlash Endurance Test Setup For the instrument connection shown in the previous pages, change the value as follows. Pgate -> SPGU3 Gate -> SMU3 Psource -> SPGU2 Source -> SMU2 Pdrain -> SPGU4 Drain -> SMU4 Subs ->...
  • Page 116 Module 13 SPGU Control and Applications Measurement Result Example Write Erase This is a test result example displayed on the Data Display window. 13-32...

  • Page 117: Alwg Mode

    Module 13 SPGU Control and Applications ALWG Mode Specify number of repeat for each pattern group. 50 ns 50 ns Pattern 1 Pattern 2 Pattern N PG1 Output Smooth Transition! Δt No Glitch , No dip to GND. PG2 Output Pattern 3 Pattern 4 Pattern X...
  • Page 118 Module 13 SPGU Control and Applications ALWG Mode 1. SPGU ALWG Setup Window Count Pattern Open This button opens the Pattern Editor used to define the arbitrary linear waveform. 2. Define ALWG Waveform window To apply the ALWG output, define the ALWG output sequence, specify the Operation, and click the Single button.
  • Page 119 Module 13 SPGU Control and Applications ALWG Mode A pattern can be defined by specifying the differential time and the absolute voltage. You can define it by using the left side GUI or the right side table on the window. 13-35...
  • Page 120 Module 13 SPGU Control and Applications Class Exercise Monitor ALWG output by the sampling measurement. 1. Click I/V-t Sampling icon and open setup editor. 2. Define the measurement setup with the ALWG output. 3. Save the test setup. 4. Connect a device (511 kohm resistor) as shown in the next page.
  • Page 121 SMU1 : terminal 1 SMU2 : terminal 4 PGU1 : terminal 1 Then, the modules must be connected to the fixture as shown below. B1500A SMU1 -> Fixture SMU1 connector B1500A SMU2 -> Fixture SMU2 connector B1500A PG1 -> Fixture PGU1 connector 13-37...
  • Page 122 Module 13 SPGU Control and Applications Measurement Result Example This is a test result example displayed on the Data Display window for the “ALWG monitor” test setup. 13-38...

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