Agilent Technologies B1500A User Manual page 156

Specifications
Hardware
Additional errors (for SMU voltage output accuracy): ± 100 V
(open load)
• DC bias monitor additional errors (open load):
± 20 mV, direct docking
± 30 mV, indirect docking
Output impedance: 50 , typical
•
DC output resistance: 50  (CMU bias), 130  (SMU bias)
•
• Measurement accuracy
Impedance measurement error is given by adding the following
additional error Ee to the MFCMU measurement error.
Ee = ± (A + Zs / |Zx| + Yo |Zx| )  100 (%)
Zx: Impedance measurement value ()
A: 0.05 % (direct docking) or 0.1 % (indirect docking)
Zs: 500  (1 + f ) m (f: frequency in MHz)
Yo: 1 + f  10 nS (direct docking,  2 for indirect docking)
When the measurement terminals are extended by using the
measurement cable, the measurement accuracy is applied to the data
measured after performing the open/short/load correction at the DUT
side cable end.
Specification conditions:
Temperature: 23 C ± 5 C
•
• Integration time: 1 PLC or 16 PLC
4- 24 Agilent B1500A User's Guide, Edition 10