SMU Common Specifications
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Output terminal/connection
Dual triaxial connector, Kelvin (remote sensing)
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Voltage/current compliance (limiting)
The SMU can limit output voltage or current to prevent damaging the device
under test.
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Voltage compliance:
0 V to ± 100 V (MPSMU, HRSMU)
0 V to ± 200 V (HPSMU)
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Current compliance:
± 10 fA to ± 100 mA (HRSMU with ASU)
± 100 fA to ± 100 mA (HRSMU)
± 1 pA to ± 100 mA (MPSMU)
± 1 pA to ± 1 A (HPSMU)
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Compliance accuracy:
Same as the current or voltage set accuracy.
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Pulsed measurement
Width: 500 s to 2 s
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Period: 5 ms to 5 s
Period Width+2 ms (when Width 100 ms)
Period Width+10 ms (when Width > 100 ms)
Resolution: 100 s
•
•
Pulse setting accuracy (fixed measurement range), supplemental information
Width: 0.5 % + 50 s
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Period: 0.5 % + 100 s
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Agilent B1500A User's Guide, Edition 10
Specifications
Hardware
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