Agilent Technologies B1500A User Manual page 145

Semiconductor device analyzer
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SMU Common Specifications
Output terminal/connection
Dual triaxial connector, Kelvin (remote sensing)
Voltage/current compliance (limiting)
The SMU can limit output voltage or current to prevent damaging the device
under test.
Voltage compliance:
0 V to ± 100 V (MPSMU, HRSMU)
0 V to ± 200 V (HPSMU)
Current compliance:
± 10 fA to ± 100 mA (HRSMU with ASU)
± 100 fA to ± 100 mA (HRSMU)
± 1 pA to ± 100 mA (MPSMU)
± 1 pA to ± 1 A (HPSMU)
Compliance accuracy:
Same as the current or voltage set accuracy.
Pulsed measurement
Width: 500 s to 2 s
Period: 5 ms to 5 s
Period  Width+2 ms (when Width  100 ms)
Period  Width+10 ms (when Width > 100 ms)
Resolution: 100 s
Pulse setting accuracy (fixed measurement range), supplemental information
Width: 0.5 % + 50 s
Period: 0.5 % + 100 s
Agilent B1500A User's Guide, Edition 10
Specifications
Hardware
4- 13

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