Agilent Technologies B1500A User Manual page 136

Semiconductor device analyzer
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Specifications
Hardware
Mainframe
The B1500A supports ten slots for plug-in modules.
Module
B1510A HPSMU
B1511A MPSMU
B1517A HRSMU
a
E5288A ASU
B1520A MFCMU
B1525A HV-SPGU
B1530A WGFMU
a. The E5288A Atto Sense and Switch Unit (ASU) is connected with the
B1517A High Resolution SMU (HRSMU).
b. Dispersion of measurement values when connecting a DUT 10 pF to the
measurement terminals under the measurement condition of frequency
1 MHz, signal level 250 mVac, and measurement time 1 PLC. The dis-
play resolution is 0.000001 fF at 1 fF order by 6 digits display.
c. Fast IV mode supports 0 to ± 10 V not supported by PG mode.
d. Display resolution
4- 4
Slots
Range of operation
occupied
2
-200 V to 200 V,
-1A to 1 A
-100 V to 100 V, 
1
-100 mA to 100 mA
-100 V to 100 V, 
1
-100 mA to 100 mA
-100 V to 100 V, 
-
-100 mA to 100 mA
1
1 kHz to 5 MHz
1
± 40 V (80 Vp-p)
1
-3 V to 3 V,
-5 V to 5 V,
0 V to 10 V,
-10 V to 0 V
Agilent B1500A User's Guide, Edition 10
Measurement
resolution
2 V, 10 fA
0.5 V, 10 fA
0.5 V, 1 fA
0.5 V, 0.1 fA
0.035 fFrms
50 V
0.014 % of the
d
range
c
b

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