Agilent Technologies B1500A User Manual page 153

Semiconductor device analyzer
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Table 4-14
Example of calculated C/G measurement accuracy
Measured
Frequency
Capacitance
5 MHz
1 MHz
100 kHz
10 kHz
1 kHz
a. The calculation examples are specified under the conditions Dx = 0.1, 1 PLC integration time,
30 mVrms test signal level, and at four-terminal pair port of MFCMU.
Agilent B1500A User's Guide, Edition 10
C Accuracy
1 pF
± 0.61 %
10 pF
± 0.32 %
100 pF
± 0.29 %
1 nF
± 0.32 %
1 pF
± 0.26 %
10 pF
± 0.11 %
100 pF
± 0.10 %
1 nF
± 0.10 %
10 pF
± 0.18 %
100 pF
± 0.11 %
1 nF
± 0.10 %
10 nF
± 0.10 %
100 pF
± 0.18 %
1 nF
± 0.11 %
10 nF
± 0.10 %
100 nF
± 0.10 %
100 pF
± 0.92 %
1 nF
± 0.18 %
10 nF
± 0.11 %
100 nF
± 0.10 %
Measured
a
Conductance
 3 S
 31 S
 314 S
 3 mS
 628 nS
 6 S
 63 S
 628 S
 628 nS
 6 S
 63 S
 628 S
 628 nS
 6 S
 63 S
 628 S
 63 nS
 628 nS
 6 S
 63 S
Specifications
Hardware
a
G Accuracy
± 192 nS
± 990 nS
± 9 S
± 99 S
± 16 nS
± 71 nS
± 624 nS
± 7 S
± 11 nS
± 66 nS
± 619 nS
± 7 S
± 11 nS
± 66 nS
± 619 nS
± 7 S
± 6 nS
± 11 nS
± 66 nS
± 619 nS
4- 21

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