Agilent Technologies B1500A User Manual page 146

Semiconductor device analyzer
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Specifications
Hardware
About measurement accuracy
RF electromagnetic field and SMU measurement accuracy
Voltage and current measurement accuracy may be affected by RF
electromagnetic field of strength over 3 V/m at frequencies 80 MHz to
1 GHz and 1.4 GHz to 2.0 GHz, and 1 V/m at frequencies 2.0 GHz to 2.7
GHz.
The extent of this effect depends upon how the instrument is
positioned and shielded.
Induced RF field noise and SMU measurement accuracy
Voltage and current measurement accuracy can be affected by induced RF
field noise strengths greater than 3Vrms in the frequency range of 150 kHz
to 80 MHz.
The extent of this effect depends upon how the instrument is
positioned and shielded.
SMU Supplemental Information
Maximum allowable cable resistance (Kelvin connection)
Sense: 10 
Force: 10  (  100 mA), 1.5  ( > 100 mA)
Voltage source output resistance (Force line, Non-Kelvin connection)
0.2  (HPSMU)
0.3  (MPSMU, HRSMU)
Voltage measurement input resistance:  10
Current source output resistance:  10
Current compliance setting accuracy (for opposite polarity)
For 1 pA to 10 nA ranges: Setting accuracy ± 12 % of range
For 100 nA to 1 A ranges: Setting accuracy ± 2.5 % of range
Maximum capacitive load
For 1 pA to 10 nA ranges: 1000 pF
For 100 nA to 10 mA ranges: 10 nF
For 100 mA and 1 A ranges: 100 F
4- 14
13
13
 (at 1 nA range)
Agilent B1500A User's Guide, Edition 10

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