Agilent Technologies B1500A User Manual page 123

Semiconductor device analyzer
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Figure 3-18
Agilent B1500A/MFCMU
Agilent N1300A
+ BNC-T adapters
High
Low
to CMH
to CML
Agilent B2200A with B2210A or
Agilent B2201A with B2211A or
Agilent E5250A with E5252A
Capacitance Compensation When Using Switching Matrix
In Figure 3-18, C1 (DATA04), C2H (DATA05), C2L (DATA06), C3H (DATA07),
C3L (DATA08) are the compensation coefficients defined in the compensation data
file. where, CxH is for the path connected to the MFCMU Hc-Hp terminal, and CxL
is for the path connected to the MFCMU Lc-Lp terminal.
When Agilent B2220A probe card interface is used, obtain the coefficients for C3x,
and create your compensation data file. In this case, probe card will be used for the
C3x path.
When the connector plate is used, obtain the coefficients for C2x and C3x, and
create your compensation data file. In this case, triaxial cable with connector plate
will be used for the C2x path. And coaxial cable with positioner will be used for the
C3x path.
For obtaining the compensation coefficients and creating the compensation data file,
see "To Create Compensation Data File" on page 3-50.
Extension Cables and Compensation Coefficients
Case 1. Probe card interface
Agilent 16494A/C
(C1, DATA04, fixed)
Case 2. Connector plate
Agilent 16494A/B
(C1, DATA04, fixed)
B2210A outputs or
B2211A outputs or
E5252A outputs
Agilent B1500A User's Guide, Edition 10
Perform open calibration at this plane.
Short calibration is optional.
C2H, C3H, DATA05, DATA07: for CMH path
C2L, C3L, DATA06, DATA08: for CML path
Agilent B2220A (C2H, DATA05, need update)
Agilent 16495F/G
Extended triaxial
cables
with connector plate
(C2H, DATA05, need update)
(C2L, DATA06, need update)
Installation
(C2L, DATA06, need update)
Case 1 is not available
for E5250A.
Probe card etc.
(C3H, DATA07, need update)
(C3L, DATA08, need update)
Extended coaxial
cables and positioners
(C3H, DATA07, need update)
(C3L, DATA08, need update)
3- 49

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