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Agilent Technologies B1500A User Manual

Semiconductor device analyzer
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Agilent B1500A
Semiconductor Device
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Summary of Contents for Agilent Technologies B1500A

  • Page 1 Agilent B1500A Semiconductor Device Analyzer User’s Guide Agilent Technologies...
  • Page 2 Notices © Agilent Technologies, Inc. 2005 - 2010 Warranty defined in FAR 52.227-19(c)(1-2) (June 1987). U.S. Government users will receive No part of this manual may be reproduced in The material contained in this docu- no greater than Limited Rights as defined in any form or by any means (including elec- ment is provided “as is,”...
  • Page 3 This DoC applies to above-listed products placed on the EU market after: March 20, 2010 Date Toshiyuki Kawaji QA Manager Agilent Technologies For further information, please contact your local Agilent Technologies sales office, agent or distributor, or Agilent Technologies Deutschland GmbH, Herrenberger Straße 130, 71034 Böblingen, Germany.
  • Page 4 • Herstellerbescheinigung GEÄUSCHEMISSION Lpa < 70 dB am Arbeitsplatz normaler Betrieb nach DIN 45635 T. 19 • Manufacturer’s Declaration ACOUSTIC NOISE EMISSION Lpa < 70dB operator position normal operation per ISO 7779 This ISM device complies with Canadian ICES-001. NOTE Cet appareil ISM est conforme à...
  • Page 5 In addition, it violates safety standards of design, manufacture, and intended use of the instrument. Agilent Technologies, Inc. assumes no liability for customer’s failure to comply with these requirements.
  • Page 6 Because of the danger of introducing additional hazards, do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to a Agilent Technologies Sales and Service Office for services and repair to ensure that safety features are maintained.
  • Page 7 Safety Symbols The general definitions of safety symbols used on equipment or in manuals are listed below. Direct current. Alternating current. Protective conductor terminal. For protection against electrical shock in case of a fault. Used with field wiring terminals to indicate the terminal which must be connected to ground before operating equipment.
  • Page 8 Power Supply and Measurement Safety • Power Supply Safety This instrument can output high currents and voltages. Make sure that the load or device under test can safely handle the output current and voltage. Also, make sure that the connection leads can safely withstand the expected currents and are insulated for the expected voltages.
  • Page 9 Guard must be never connected to anything at the device side. Circuit Common should be connected to shielding of the coaxial cable used. The following image is the Kelvin triaxial connector of Agilent B1500A’s HPSMU.
  • Page 10 High Voltage Shock Hazard Agilent B1500A can force dangerous voltages (±200 V for HPSMU and ±100 V for MPSMU/HRSMU) at the force, guard, and sense terminals. To prevent electric shock hazard, the following safety precautions must be observed during the use of Agilent B1500A.
  • Page 11 Gefahr durch Hochspannung Von den Geräten Agilent B1500A können Spannungen an den Anschlüssen “Force, Guard und Sense” von bis zu 200 V ausgehen. Um elektrischem Schlag vorzubeugen, ist bei der Benützung der Geräte Agilent B1500A folgendes zu beachten. • Verwenden Sie ein dreiphasiges AC-Stromkabel für die Gerätsteckvorrichtung (Eingang) und schließen Sie das Instrument an eine Erdung an...
  • Page 12 Danger de choc dû à une haute tension Une tension dangereuse (max. ± pour HPSMU; 200 Vdc, max. ± pour MPSMU/ HRSMU; 100 Vdc) émanant du dispositif Agilent B1500A peut être sortie aux bornes de force, d'appareil de protection ou de détection. Les précautions suivantes doivent être obserées contre commotion électrique accidentelle.
  • Page 13 高電圧感電注意 Agilent B1500A のフォース、ガード、センス端子には、危険電圧が出力されること があります（HPSMU の場合は最大 ±200 Vdc、MPSMU/HRSMU の場合は最大 ±100 Vdc） 。感電事故防止のため、必ず以下の事柄を守ってください。 • 3 極電源ケーブルを使用して本器を接地してください。 • ドアを開くことによって開放されるインターロック回路を装備し、被測定デバ イスとのインタフェースを覆うことのできるシールド・ボックスを用意してく ださい。 • 測定を開始する前にはインターロック回路を本器の Interlock 端子に接続してく ださい。 • インターロック機能が正常であることを定期的に確認してください。 • Force、Guard、Sense 端子に繋がる接続部に触れる前には、本器の電源を切断し てください。また、測定系のキャパシタを放電してください。電源を切らない 場合は、以下の事項を全て実施してください。 • Stop キーを押して Measurement インジケータが消灯したことを確認してくだ さい。 • 高電圧警告（High Voltage）インジケータが消灯していることを確認してく...
  • Page 14 Product Stewardship • Waste Electrical and Electronic Equipment (WEEE) Directive 2002/96/EC This product complies with the WEEE Directive (2002/96/EC) marking requirements. The affixed label indicates that you must not discard this electrical/ electronic product in domestic household waste. Product Category: With reference to the equipment types in the WEEE directive Annex 1, this product is classified as a “Monitoring and Control instrumentation”...
  • Page 15 Other notes • Back up the internal HDD to prevent loss of data by accident or failure. • Protect Agilent B1500A from computer viruses. If you connect Agilent B1500A to the network, take care to protect it from • computer virus.
  • Page 16 Working in Comfort To optimize your comfort and productivity, it is important that you set up your work area correctly and use your instrument properly. With that in mind, we have developed some set-up and use recommendations for you to follow based on established ergonomic principles.
  • Page 17 • Performing an activity in an awkward or unnatural posture. • Maintaining static posture for prolonged periods. • Failing to take frequent short breaks. • Other environmental and psychosocial factors. In addition, there have been reports associating the occurrence of RSI with the use of keyboards, mice, and other input devices.
  • Page 18 Oscilloscopes, Analyzers, Meters > Parametric & Device Analyzers, Curve Tracers. You can reach the support site for the Agilent B1500A, B1505A, and EasyEXPERT. Intel and Celeron are trademarks of Intel Corporation in the U.S. and other countries. Microsoft, Windows, and Windows...

  • Page 19: Table Of Contents

    To Turn On/Off B1500A ........
  • Page 20 Installing Accessories ..........3-11 To Connect 16442B Test Fixture (B1500A-A5F)......3-12 To Connect Connector Plate .
  • Page 21 General Specifications ..........4-46 5. Accessories and Options Agilent B1500A User’s Guide, Edition 10...
  • Page 22 Contents Agilent B1500A User’s Guide, Edition 10...

  • Page 23: Getting Started

    Getting Started...
  • Page 24 Getting Started This chapter describes the basic operations of Agilent B1500A. Before learning the product details, let’s try to use the B1500A briefly. The operations need the B1500A, power cable, and USB keyboard only (USB mouse and stylus pen are optional).

  • Page 25: To Turn On/Off B1500A

    When turning the B1500A on NOTE Open the measurement terminals at the device side when turning the B1500A on. Also disconnect the device from the measurement terminals and open the measurement terminals after the test. If you leave the connection with the device, the device may be damaged by unexpected operations or charge-up of measurement cables.

  • Page 26: To Turn B1500A On

    Getting Started To Turn On/Off B1500A To Turn B1500A On 1. Connect the power cable from Agilent B1500A to an AC power outlet. 2. Connect the USB keyboard to the B1500A. Optionally, connect the USB mouse to the B1500A. 3. Press the Standby switch (lower right corner of the front panel). Windows, measurement module initialization, and self-calibration will start.
  • Page 27 Touch Panel Off Enables or disables the touch screen operation. • Standby switch Turns the B1500A on. Pressing the button in the ON state makes the B1500A in the standby state. • LCD Off Enables or disables the LCD panel. LED lights when the LCD is disabled.

  • Page 28: To Launch Easyexpert

    Skip to “To Use Tracer Test Mode” on page 1-10, “To Use Application Test Mode” on page 1-12, or “To Use Classic Test Mode” on page 1-14. 3. If only one workspace exists, the B1500A displays the screen as shown in Figure 1-1.

  • Page 29: If Only One Workspace Exists

    Mode” on page 1-12, or “To Use Classic Test Mode” on page 1-14. 2. If you want to create a workspace, select the No radio button and click Next. The B1500A displays the screen as shown in Figure 1-2. Skip to “To Create Workspace” on page 1-8.

  • Page 30: To Create Workspace

    3. Click OK. Skip to “To Use Tracer Test Mode” on page 1-10, “To Use Application Test Mode” on page 1-12, or “To Use Classic Test Mode” on page 1-14. Figure 1-2 To Create Workspace Agilent B1500A User’s Guide, Edition 10...

  • Page 31: To Select Workspace

    If this check box is checked, the workspace selection screen will be skipped at the next startup and EasyEXPERT will be launched with the workspace used at the last operation. To perform this setup again, click the File > Close Workspace menu on the EasyEXPERT main screen. Agilent B1500A User’s Guide, Edition 10...

  • Page 32: To Use Tracer Test Mode

    Channel output mode. Set I or IPULSE for the current output and volt- age measurement. Set V or VPULSE for the voltage output and current measurement. Table 1-2 I/V Trace Graph Setup Name Scale Name Scale Y    X  1-10 Agilent B1500A User’s Guide, Edition 10...
  • Page 33 Start Source Stop Compliance 5 mA Step 10 mV Interlacing Compliance 5 mA Pwr Comp. Meas. Time 2 us Dual Polarity Step Time 500 us Figure 1-4 Display Example of I/V Trace Screen Agilent B1500A User’s Guide, Edition 10 1-11...

  • Page 34: To Use Application Test Mode

    4. Change the measurement conditions at the Test Parameters field. The following example changes the voltage sweep output. a. Set VgStart to 0 V and VgStep to 0.2 V. b. Set VsubsStep to -1.0 V. 1-12 Agilent B1500A User’s Guide, Edition 10...
  • Page 35 You can execute the test without modifications. Also you can create your own test setup/definition by making any changes. All furnished test definitions are just sample. Agilent Technologies is NOT LIABLE for any damages caused by the samples.

  • Page 36: To Use Classic Test Mode

    5. Click the Display Setup tab and set the parameters as shown in Table 1-6. To enter the value, use the USB keyboard or the screen/numeric keyboard opened by clicking the right button of the entry field. Figure 1-7 Display Example of I/V Sweep Channel Setup Screen 1-14 Agilent B1500A User’s Guide, Edition 10...
  • Page 37 Step 10 mV No of Step Compliance 100 mA Pwr Comp Sweep status CONTINUE AT ANY Table 1-6 I/V Sweep Display Setup Name Sharing Scale (None) Linear (None) Linear -1 pA 1 pA Agilent B1500A User’s Guide, Edition 10 1-15...

  • Page 38: To Perform Measurement

    2. If the automatic data record function has been set to ON (Auto Record ON), Test Result Editor appears on the lower area of the screen when the measurement is completed. See “To Use Test Result Editor” on page 1-17. Figure 1-8 Display Example of Data Display Window 1-16 Agilent B1500A User’s Guide, Edition 10...

  • Page 39: To Use Test Result Editor

    You can enter characters into this field. The characters will be recorded as the Remarks value of the test result record. • OK button Applies the setup on the Test Result Editor, and closes this dialog box. Agilent B1500A User’s Guide, Edition 10 1-17...

  • Page 40: To Use Analysis Tools

    Figure 1-8. You can read position of the marker and the active cursor, and interrupt and gradient of the active line. Figure 1-9 Display Example of Analysis Tools 1-18 Agilent B1500A User’s Guide, Edition 10...

  • Page 41: Introduction

    Introduction...
  • Page 42 Introduction This chapter describes the basic functions and features of Agilent B1500A Semiconductor Device Analyzer, and consists of the following sections: • “Overview” • “Front View” • “Rear View” • “Measurement Units” Application Library NOTE Agilent B1500A has installed Agilent EasyEXPERT software as the user interface.

  • Page 43: Overview

    Also, in the GPIB remote control mode, you can control the B1500A from an external computer by using Agilent FLEX command set that is the common language for Agilent semiconductor DC measurement instruments.
  • Page 44 Windows XP Professional. The B1500A is equipped with the 15 inch LCD with touch panel, hard disk drive, DVD-ROM/CD-ROM/CD-RW drive, and USB/LAN/GP-IB interfaces. The USB keyboard, the USB mouse, and the stylus pen are available as option.
  • Page 45 (two types), blank Teflon board, and connection wires for device connection. • Agilent 16445A selector adapter Used to connect the 16440A selector (B1500A-A04) to the B1500A. Two selectors can be connected. • Agilent E5288A ASU Atto sense and switch unit (ASU).

  • Page 46: Agilent Easyexpert Software

    Agilent EasyEXPERT software is a specially-designed Windows XP application program for controlling Agilent B1500A. The EasyEXPERT provides the easy and effective measurement and analysis environment with intuitive graphical user interface (GUI), touch screen LCD panel, keyboard, and mouse. Some of the functions are listed below.
  • Page 47 • Direct Control The Direct Control test mode is used to control the measurement modules directly by using the B1500A GPIB control commands and perform measurement. For the control commands, see “Programming Guide”. Tracer Test Curve tracer test mode. This test allows you to perform the high speed I-V measurement on one screen.

  • Page 48: Front View

    This section describes the front view of Agilent B1500A. 1. Standby switch Turns the B1500A on. Pressing the button in the ON state makes the B1500A in the standby state. The green LED lights when the B1500A is in the ON state.
  • Page 49 To remove USB devices from the B1500A, use “Safely Remove Hardware” on Windows taskbar. If it is not used, the B1500A may cause the internal USB communication error. If the error occurs, turn the B1500A off and disconnect the power cable from the B1500A.
  • Page 50 Seven softkeys are available for Agilent EasyEXPERT environment. Used to select an alternative for the entry field specified or the dialog box. 11. DVD-ROM/CD-ROM/CD-RW drive For data backup, B1500A update, or data transfer. 12. Touch Panel Off key Works on Agilent EasyEXPERT environment. Enables or disables the touch screen operation.

  • Page 51: Rear View

    2. LED status indicator For troubleshooting. Followings are some examples. • Both LEDs turn off: B1500A is in the standby state and Standby switch is OFF position. • One LED turns green: Power supply works normally. • Both LEDs turn orange: B1500A is in the standby state and Standby switch is ON position.
  • Page 52 Allowable number of modules installed in one mainframe (each/mainframe): HPSMU 4, MPSMU 10, HRSMU 10, CMU 1, SPGU 5, WGFMU 5 If the B1500A contains the WGFMU, sum of Rating for all module types in the mainframe must be < 60.
  • Page 53 Introduction Rear View CAUTION The Zero Check terminal can be used for the service purpose only. For the B1500A normal operation, leave this terminal open and do not connect anything to this terminal. Connecting anything can damage the B1500A. 8. GNDU terminal 0 V constant voltage source.
  • Page 54 Interlock terminal is closed. A. GNDU/ADC Ground unit and A/D converter module. Always installed in the B1500A. B. SPGU module The semiconductor pulse generator unit (SPGU) has the Output 1 and Output 2 terminals and the following terminals to synchronize the operation between SPGUs or with an external equipment.
  • Page 55 Connecting to the other terminal may result in damage to the WGFMU. Connect the connection cable between the WGFMU and the RSU (remote-sense and switch unit) before turning the B1500A on. Changing the cable connection in the power on state may damage the WGFMU and RSU. See Agilent B1530A User’s Guide for cable connection and usage.
  • Page 56 Use a three-conductor AC power cable to connect the cabinet (if used) and the B1500A to an electrical ground (safety ground). b. If you do not use the 16442B test fixture (B1500A-A5F), you must install and connect an interlock circuit that opens the Interlock terminal when the shielding box access door is opened.

  • Page 57: Measurement Units

    GPIB remote mode. See Agilent B1530A User’s Guide for using the WGFMU. GNDU - Ground Unit Agilent B1500A is equipped with the ground unit (GNDU). The GNDU is a 0 V constant voltage source, and used for the reference of measurement ground. Also the GNDU can sink up to ±...

  • Page 58: About Smu

    When the SMU applies voltage, you can specify current compliance. When the SMU applies current, you can specify voltage compliance. For details about the compliance, see Agilent EasyEXPERT User’s Guide. 2- 18 Agilent B1500A User’s Guide, Edition 10...

  • Page 59: Hpsmu - High Power Smu

    Measurement Units HPSMU - High Power SMU This section describes typical specification of the high power source/monitor unit (HPSMU) for Agilent B1500A. Maximum four modules can be installed in one mainframe. • Maximum voltage, current, output power: ± 200 V, ± 1 A, 20 W •...
  • Page 60 50 mA < |I|  125 mA 50 A ± 100 V 125 mA < |I|  500 mA 50 A ± 40 V 500 mA < |I|  1 A 50 A ± 20 V 2- 20 Agilent B1500A User’s Guide, Edition 10...
  • Page 61 0  |I|  1 A 50 A 1 A a. This column is applied to the auto ranging or the limited auto ranging. For fixed ranging, maximum measurement value is Range column value. Agilent B1500A User’s Guide, Edition 10 2- 21...

  • Page 62: Mpsmu - Medium Power Smu

    Maximum voltage, current, output power: ± 100 V, ± 100 mA, 2 W • Minimum range: 0.5 V, 1 nA • Output/measurement value and resolution: see Table 2-5 to Table 2-8. Figure 2-4 MPSMU Output and Measurement Ranges 2- 22 Agilent B1500A User’s Guide, Edition 10...
  • Page 63 0  |I|  20 mA 5 A 100 mA ± 100 V 20 mA < |I|  50 mA 5 A ± 40 V 50 mA < |I|  100 mA 5 A ± 20 V Agilent B1500A User’s Guide, Edition 10 2- 23...
  • Page 64 0  |I|  100 mA 5 A 100 mA 100 nA a. This column is applied to the auto ranging or the limited auto ranging. For fixed ranging, maximum measurement value is Range column value. 2- 24 Agilent B1500A User’s Guide, Edition 10...

  • Page 65: Hrsmu - High Resolution Smu

    Minimum range: 0.5 V, 10 pA (1 pA when the E5288A ASU is used) • Output/measurement value and resolution: see Table 2-9 to Table 2-12. Figure 2-5 HRSMU Output and Measurement Ranges Agilent B1500A User’s Guide, Edition 10 2- 25...
  • Page 66 20 mA < |I|  50 mA 5 A ± 40 V 50 mA < |I|  100 mA 5 A ± 20 V a. Available when the E5288A Atto Sense and Switch Unit (ASU) is used. 2- 26 Agilent B1500A User’s Guide, Edition 10...
  • Page 67 This column is applied to the auto ranging or the limited auto ranging. For fixed ranging, maximum measurement value is Range column value. b. Available when the E5288A Atto Sense and Switch Unit (ASU) is used. Agilent B1500A User’s Guide, Edition 10 2- 27...
  • Page 68 1 pA range, set the 1 pA fixed range or the 1 pA limited auto ranging. The B1500A automatically performs the compensation of the data measured by the 1 pA range and returns the compensated data. You can use either the pre-stored offset data or the pre-measured offset data.

  • Page 69: Mfcmu - Multi Frequency Cmu

    MFCMU - Multi Frequency CMU This section describes typical specification of the multi frequency capacitance measurement unit (CMU) for Agilent B1500A. The CMU performs the impedance measurement and returns the specified measurement data such as Cp-G. Only one module can be installed in one mainframe.
  • Page 70 Q (quality factor) Rp (parallel resistance, ) Lp (parallel inductance, H) Rs (series resistance, ) Ls (series inductance, H) Ls (series inductance, H) D (dissipation factor) Ls (series inductance, H) Q (quality factor) 2- 30 Agilent B1500A User’s Guide, Edition 10...
  • Page 71 100 nF 100 m 10 m 10 F 100 F 1 mF 10 mF range 100 mF 100 n 10 n 1 kHz 10 kHz 100 kHz 1 MHz 5 MHz Frequency f Agilent B1500A User’s Guide, Edition 10 2- 31...

  • Page 72: Hvspgu - High Voltage Spgu

    Measurement Units HVSPGU - High Voltage SPGU This section describes key specification of the high voltage semiconductor pulse generator unit (SPGU) for Agilent B1500A. Maximum five modules can be installed in one mainframe. • Number of output channels: 2 channels per module Output impedance: 50 ...

  • Page 73: Wgfmu - Waveform Generator/Fast Measurement Unit

    Unit This section describes typical specification of the waveform generator/fast measurement unit (WGFMU) and the remote-sense and switch unit (RSU) for Agilent B1500A. Maximum five modules can be installed in one mainframe. • Number of channels: 2 channels per module •...
  • Page 74 Introduction Measurement Units 2- 34 Agilent B1500A User’s Guide, Edition 10...

  • Page 75: Installation

    Installation...
  • Page 76 • “Maintenance” • “About Plug-in Modules” To change the GPIB address of the B1500A, see “To Change GPIB Address” on page 3-9. To control external GPIB devices from the B1500A/EasyEXPERT, see “To Enable System Controller” on page 3-10. WARNING There are potentially hazardous voltages (200 V for HPSMU, and 100 V for MPSMU/HRSMU/ASU) present at the Force, Sense, and Guard terminals of Agilent B1500A.

  • Page 77: Requirements

    • “Power Cable” Power Requirements The B1500A can operate from any single-phase AC power source supplying 90 to 264 V at 47 to 63 Hz. The maximum power consumption is 900 VA. Operating Environment The B1500A is specified to operate within the following environmental conditions: 5 C to 40 C...

  • Page 78: Installation Requirements

    Requirements Installation Requirements The B1500A has cooling fans. To ensure adequate airflow, make sure that there is sufficient clearance around the cooling fans: 6 inches (150 mm) behind, 3 inches (70 mm) on the sides, and 0.5 inch (12 mm) above and below.
  • Page 79 PN: 8121-1866 • PN: 8120-8376 • PN: 8120-4211, 8121-0564 • Plug: CNS 10917-2, • Plug: CS 0017:2003, 125 V, 10 A 250 V, 10 A • PN: 8120-6825, • PN: 8120-8871, 8121-1635 8121-1638 Agilent B1500A User’s Guide, Edition 10 3- 5...

  • Page 80: Inspection And Installation

    To change the Windows logon setting, see “To Change Windows Logon Setting” on page 3-9. To change the GPIB address of the B1500A, see “To Change GPIB Address” on page 3-9. To allow the B1500A/EasyEXPERT to control external GPIB devices, see “To Enable System Controller”...

  • Page 81: To Perform Initial Setup

    After you receive the B1500A, perform the following setup. 1. Make sure that the Standby switch is set to off. 2. On the B1500A rear panel, connect the Circuit Common terminal to the frame ground terminal by using a shorting-bar.
  • Page 82 15. For the message Thank you!, select the Finish button. Agilent Recovery Image Setup dialog box is displayed. 16. For the dialog box, click OK. The initial setup will be completed. And the B1500A internal Windows will have the following setup. •...

  • Page 83: To Change Windows Logon Setting

    To Change GPIB Address When Agilent B1500A is shipped from the factory, the GPIB address is set to 17. To change the GPIB address, perform the following procedure. 1. If the EasyEXPERT software is running, terminate it as shown below: a.

  • Page 84: To Enable System Controller

    To Disable System Controller NOTE If the B1500A is the system controller, you cannot control the B1500A by using an external computer. To disable the system controller, change the steps 4 and 5 for setting the GPIB Address value to not 21 and removing the check from the System Controller box, and perform the procedure to the step 8.

  • Page 85: Installing Accessories

    “To Interconnect SPGUs” Before connecting accessory to MFCMU NOTE Turn the B1500A off before connecting the SCUU, the SCUU cable, or the CMU cable to the MFCMU. WARNING There are potentially hazardous voltages of up to ± 100 V (MPSMU/HRSMU) or ±...

  • Page 86: To Connect 16442B Test Fixture (B1500A-A5F)

    To Connect 16442B Test Fixture (B1500A-A5F) See this section if you use Agilent 16442B test fixture (B1500A-A5F). This section describes how to set up the 16442B and how to connect the B1500A to the 16442B. To Set up 16442B (B1500A-A5F) You can stabilize the 16442B (B1500A-A5F) as shown in the figure below.
  • Page 87 Hcur and Hpot terminals together and the Lcur and Lpot terminals together at the socket module inputs. It is ok to leave open the ground wire extended from the CMU cable. Agilent B1500A User’s Guide, Edition 10 3- 13...

  • Page 88: To Connect Connector Plate

    For the 16495H/J, the insulator is inserted between the panel and the outer conductor of Triax connectors/BNC connectors. Use the cables shown in Table 3-3 to connect from the B1500A connectors to the connector plate’s relative connectors. For the cable connections from the connector plate to the DUT interface such as manipulator and probe card, see “Mounting...
  • Page 89 Hcur and Hpot terminals together and the Lcur and Lpot terminals together on the DUT interface. See Figure 3-17. It is ok to leave open the ground wire extended from the CMU cable. Agilent B1500A User’s Guide, Edition 10 3- 15...

  • Page 90: Connecting The Interlock Terminal

    Installing Accessories Connecting the interlock terminal The B1500A provides the Interlock connector to prevent you from receiving an electrical shock from high voltage (more than ± 42 V). If the Interlock connector is open, the B1500A cannot force high voltage more than ± 42 V.

  • Page 91: To Connect Asu

    See Agilent 16495 Installation Guide. The 16495K is the plate that has the mechanism to block the light from the cable hole used to pass the cables in the shielding box. Agilent B1500A User’s Guide, Edition 10 3- 17...
  • Page 92 AUX 1. Turn the instrument off. 2. Connect the BNC cable from the ASU CMU-cur/AUX In terminal to the instrument. Prepare an adapter if the instrument’s input/output connector is not BNC. 3- 18 Agilent B1500A User’s Guide, Edition 10...
  • Page 93 Installation Installing Accessories Figure 3-2 To Connect ASU Figure 3-3 To Set Shorting Bar 5 / 8 CMU-cur/AUX In b / c SMU Force 6 / 9 SMU Force Shorting bar Agilent B1500A User’s Guide, Edition 10 3- 19...
  • Page 94 CMU Return terminals of the ASU #1 and ASU #2 together. About ASU output cables NOTE To perform capacitance measurements accurately, the cable length between DUT and the ASU output must be as short as possible. 3- 20 Agilent B1500A User’s Guide, Edition 10...

  • Page 95: To Connect Scuu/Gswu

    • Agilent N1301A-102 SCUU cable (if SCUU is not attached to the MFCMU) • Agilent N1301A-110 Magnet stand (if GSWU is used) • BNC cable, coaxial cable, manipulator, wire, and so on Agilent B1500A User’s Guide, Edition 10 3- 21...
  • Page 96 1. GSWU is furnished with wires (2 ea.) for the connection between the GSWU and the DUT interface Guard terminal. If it is too short to connect them, prepare additional wire. 2. Turn the B1500A off. Figure 3-5 To Connect SCUU/GSWU 3- 22 Agilent B1500A User’s Guide, Edition 10...
  • Page 97 To attach the SCUU to the B1500A: SCUU/GSWU 1 1. Attach the SCUU to the B1500A rear panel connectors for the MFCMU in the slot N and two SMUs in the slots N-1 and N-2 (N: integer, 3 to 10).
  • Page 98 Stand will be useful for fixing the SCUU. 3. Attach the other end of the SCUU cable to the B1500A rear panel connectors for the MFCMU in the slot N and two SMUs in the slots N-1 and N-2 (N: integer, 3 to 10).

  • Page 99: To Connect Gndu Adapter

    Table 3-4 Kelvin Triaxial Cable and Maximum Current Maximum Model No. or Description Option Item Current 16493K-001 1.5 m Kelvin Triaxial Cable 3.0 A 16493K-002 3 m Kelvin Triaxial Cable 2.6 A Agilent B1500A User’s Guide, Edition 10 3- 25...

  • Page 100: To Interconnect Spgus

    CAUTION Connect the Ref Out/In, Sync Out/In, and Trig Out terminals to the specified terminal properly. Connecting to the other terminal may result in damage to the SPGU. 3- 26 Agilent B1500A User’s Guide, Edition 10...

  • Page 101: Mounting Connectors

    4. Attach cables from the connectors to the DUT (device under test). See “To Connect GNDU Output” on page 3-32, “To Connect SMU Output” on page 3-33, and “To Connect MFCMU Output” on page 3-39. Agilent B1500A User’s Guide, Edition 10 3- 27...
  • Page 102 DUT  8120-0367 Coaxial Cable (50 8150-0447 Wire Table 3-6 Dimensions of Connector Holes Kelvin Triaxial Connector (in mm) Triaxial Connector (in mm) BNC Connector (in mm) Interlock Connector (in mm) 3- 28 Agilent B1500A User’s Guide, Edition 10...

  • Page 103: To Make An Interlock Circuit

    Figure 3-8 Interlock Connector Pin Assignments WARNING Potentially hazardous voltages may be present at the Force, Guard, and Sense terminals when the interlock terminals are shorted. Agilent B1500A User’s Guide, Edition 10 3- 29...
  • Page 104 See Figure 3-8. If Agilent B1500A Interlock connector is connected to the interlock circuit, Agilent B1500A SMU cannot force more than ± 42 V when the door is open. When the door is closed, it can force more than ± 42 V.
  • Page 105 Installation Mounting Connectors Figure 3-10 Dimensions of the Interlock Switch (Agilent part number 3101-0302) Figure 3-11 Dimensions of the Interlock Switch (Agilent part number 3101-3241) Agilent B1500A User’s Guide, Edition 10 3- 31...

  • Page 106: To Connect Gndu Output

    Use Agilent 16493L GNDU cable to connect the GNDU to your connector plate or test fixture. Do not use the triaxial cable. The GNDU is rated for up to 4.2 A, while the maximum current rating of the triaxial cable is 1 A. 3- 32 Agilent B1500A User’s Guide, Edition 10...

  • Page 107: To Connect Smu Output

    To prevent electrical shock, do not expose these lines. Before turning Agilent B1500A on, connect the Interlock terminal to an interlock circuit. Before you touch any connections to these terminals, turn Agilent B1500A off, disconnect the power cable, and discharge any capacitors. CAUTION Never connect the Guard terminal to any output, including circuit common, chassis ground, or any other guard terminal.
  • Page 108 To Minimize Leakage Current NOTE For the highly accurate current forcing and measurements, surround all force and sense lines by a guard as far as possible, and physically stable the cables with tape. 3- 34 Agilent B1500A User’s Guide, Edition 10...
  • Page 109 ASU#1 CMU Return and the ASU#2 CMU Return. If the 4TP instrument is not used, you can ignore the CMH, CML, CMU Return, and the DUT1 high and low terminals. Agilent B1500A User’s Guide, Edition 10 3- 35...
  • Page 110 ASU#1 CMU Return and the ASU#2 CMU Return. If the 4TP instrument is not used, you can ignore the CMH, CML, CMU Return, and the DUT1 high and low terminals shown above. 3- 36 Agilent B1500A User’s Guide, Edition 10...
  • Page 111 CMU high, and the other one is used for the CMU low. For the accurate impedance measurements, wires must be connected to the GSWU from the CMH guard and the CML guard as near as possible to the DUT. Agilent B1500A User’s Guide, Edition 10 3- 37...
  • Page 112 CMU high signal, and the other one is used for the CMU low signal. For the accurate impedance measurements, wires must be connected to the GSWU from the CMH guard and the CML guard as near as possible to the DUT. 3- 38 Agilent B1500A User’s Guide, Edition 10...

  • Page 113: To Connect Mfcmu Output

    The Hcur/Hpot/Lcur/Lpot lines should be connected to the DUT as shown above. Use a 50  coaxial cable (Agilent part number: 8120-0367) for the Hcur/Hpot/Lcur/Lpot lines connection. Use a wire for the guard connection. Agilent B1500A User’s Guide, Edition 10 3- 39...

  • Page 114: Connecting Measurement Devices

    Connecting Measurement Devices This section describes how to connect device under test (DUT) to the 16442B test fixture (B1500A-A5F), and how to connect cables to the connector plate. If you use a wafer prober, see wafer prober manuals. Note that you must set the module output off when connecting or disconnecting DUTs.

  • Page 115: Using Test Fixture

    CAUTION Do not connect or disconnect your DUT while Agilent B1500A is forcing voltage or current. Otherwise, your DUT may be damaged. CAUTION Do not touch the terminals of the test leads. Oil, perspiration, and dirt prevent good electrical contact, deteriorate insulation, and degrade measurement accuracy.
  • Page 116 Kelvin connections on the test fixture. Examples: Kelvin Connection To cancel the effects of the residual resistance, test leads must be connected as close as possible to the DUT. 3- 42 Agilent B1500A User’s Guide, Edition 10...

  • Page 117: Using Connector Plate

    The potential of the guard terminal is equal to the output voltage. CAUTION Never connect the guard terminal to any other output, including circuit common, frame ground, or the terminals of any other unit. Doing so may damage the unit. Agilent B1500A User’s Guide, Edition 10 3- 43...
  • Page 118 Therefore, the current measured by SMU is same as current at measurement point because no current is leaked. 3- 44 Agilent B1500A User’s Guide, Edition 10...
  • Page 119 Center conductor Force Outer conductor Probing needle Sense Contact pad Coaxial cable Connector plate Contact pad This example uses test leads. To reduce the leakage current, use coaxial cables. Agilent B1500A User’s Guide, Edition 10 3- 45...
  • Page 120 So output error is not significant if the sense line wiring has a residual resistance of 10  or less. Therefore, the specified voltage appears at the sense point (point where sense line contacts force line) 3- 46 Agilent B1500A User’s Guide, Edition 10...

  • Page 121: Capacitance Compensation When Using Switching Matrix

    B2200A/B2201A/E5250A switching matrix, Agilent B1500A measures the capacitance/ conductance of the path including a DUT (device under test), matrix switches, extension cables and so on. So, the data measured by the B1500A is far from the DUT’s capacitance/conductance. Agilent EasyEXPERT provides the functions used to compensate the data measured in the environments described in “Required Conditions”...

  • Page 122: Required Conditions

    You can also use another type of triaxial cable, coaxial cable, or combination of these. To approximate the capacitance/conductance of the DUT, you need to obtain the appropriate compensation coefficients for your measurement environment, and create your compensation data file. See Figure 3-18. 3- 48 Agilent B1500A User’s Guide, Edition 10...
  • Page 123 Agilent E5250A with E5252A Extended triaxial B2210A outputs or (C3H, DATA07, need update) cables B2211A outputs or (C3L, DATA08, need update) with connector plate E5252A outputs (C2H, DATA05, need update) (C2L, DATA06, need update) Agilent B1500A User’s Guide, Edition 10 3- 49...

  • Page 124: To Create Compensation Data File

    See Table 3-9. Do not modify the other lines. NOTE EasyEXPERT provides the template of the compensation data file for the B2200A/B2201A. See Table 3-11. Select and use the template suitable for your measurement environment. 3- 50 Agilent B1500A User’s Guide, Edition 10...
  • Page 125 C3L (DATA08) path shown in Figure 3-18. (DATA08) For the connector plate, the coaxial cable with positioner will be the appropriate path. For Agilent B2220A probe card interface, the probe card will be the appropriate path. Agilent B1500A User’s Guide, Edition 10 3- 51...
  • Page 126 User Compensation Data File field of the Extended Configuration dialog box, and execute the measurement. Before starting measurement, perform the CMU calibration. For details, see Agilent EasyEXPERT User’s Guide. 3- 52 Agilent B1500A User’s Guide, Edition 10...
  • Page 127 For triaxial cable, connect B to F directly, and measure L between A and E. For coaxial cable, ignore E and F, and connect B to D directly, and measure L between A and C. Figure 3-19 Compensation Coefficient Measurement Terminals of Extended Cables Agilent B1500A User’s Guide, Edition 10 3- 53...
  • Page 128 <path>\b2211a\cable\kelvin\4m.data 16494C-005 a. <path>: \Program Files\Agilent\B1500\EasyEXPERT\B220xA\ccdata b. Model number of the cable connected between the switch module and the DUT interface. c. Agilent B2220A probe card interface or Agilent 16495F/G connector plate. 3- 54 Agilent B1500A User’s Guide, Edition 10...

  • Page 129: Maintenance

    Interlock function limits the SMU maximum output voltage to ± 42 V when the measurement terminal is touchable. For safety, this function must be checked before using the B1500A after power on at least once a day by performing the diagnostics. Calibration Calibration and adjustments must be performed periodically so that the instruments satisfy the specifications, and keep a good condition.

  • Page 130: About Plug-In Modules

    Module locations after servicing NOTE After the module installation, upgrade, and so on, the B1500A will be returned with the module configuration decided by the rule shown in Table 3-12. If you want to change the module locations, consult the service personnel before servicing.

  • Page 131: Module Type And Locations

    For example, if the module configuration is two HPSMU, two MPSMU, and one CMU, the B1500A will be shipped with the HPSMUs of the slots 1 to 4, the MPSMUs of the slots 5 to 6, the CMU of the slot 7, and the blank panels of the slots 8 to 10.
  • Page 132 Installation About Plug-in Modules 3- 58 Agilent B1500A User’s Guide, Edition 10...

  • Page 133: Specifications

    Specifications...
  • Page 134 B1500A Semiconductor Device Analyzer and its associated modules. The specifications are the standards against which the B1500A and its associated modules are tested. When the B1500A and any of its associated modules are shipped from the factory, they meet the specifications. The “supplemental” information and “typical”...

  • Page 135: Hardware

    10. WGFMU load capacitance: 25 pF or less NOTE Agilent Technologies is responsible for removing, installing, and replacing the B1500A modules. Contact your nearest Agilent Technologies to install and calibrate the B1500A modules. Agilent B1500A User’s Guide, Edition 10 4- 3...
  • Page 136 Specifications Hardware Mainframe The B1500A supports ten slots for plug-in modules. Slots Measurement Module Range of operation occupied resolution 2 V, 10 fA B1510A HPSMU -200 V to 200 V, -1A to 1 A -100 V to 100 V, ...
  • Page 137 Allowable number of modules installed in one mainframe (each/mainframe): HPSMU 4, MPSMU 10, HRSMU 10, MFCMU 1, HV-SPGU 5, WGFMU 5 If the B1500A contains the WGFMU, sum of Rating for all module types in the mainframe must be < 60.
  • Page 138 Io  20 20 < Vc  40 Io  40 40 < Vc  100 Io  100 a. Vc is the voltage compliance setting. b. Io is the output current. 4- 6 Agilent B1500A User’s Guide, Edition 10...
  • Page 139 Available when Agilent E5288A Atto Sense and Switch Unit (ASU) is used. c. Available for HRSMU. d. 100 V (Io  20 mA), 40 V (20 mA < Io  50 mA), 20 V (50 mA < Io), Io is the output current. Agilent B1500A User’s Guide, Edition 10 4- 7...
  • Page 140 Available when Agilent E5288A Atto Sense and Switch Unit (ASU) is used. c. Available for HRSMU. d. 100 V (Io  20 mA), 40 V (20 mA < Io  50 mA), 20 V (50 mA < Io), Io is the output current. 4- 8 Agilent B1500A User’s Guide, Edition 10...
  • Page 141 ASU and the HRSMU. So confirm the serial number of the ASU and connect it to the dedicated HRSMU properly. Connection path control NOTE Disable source output of the SMU and other instrument connected to the ASU inputs before controlling the ASU connection path. Agilent B1500A User’s Guide, Edition 10 4- 9...
  • Page 142 Io  40 40 < Vc  100 Io  100 100 < Vc  200 Io  200 a. Vc is the voltage compliance setting. b. Io is the output current. 4- 10 Agilent B1500A User’s Guide, Edition 10...
  • Page 143 200 V (Io  50 mA), 100 V (50 mA < Io  125 mA), 40 V (125 mA < Io  500 mA), 20 V (500 mA < Io  1 A), Io is the output current. Agilent B1500A User’s Guide, Edition 10 4- 11...
  • Page 144 200 V (Io  50 mA), 100 V (50 mA < Io  125 mA), 40 V (125 mA < Io  500 mA), 20 V (500 mA < Io  1 A), Io is the output current. 4- 12 Agilent B1500A User’s Guide, Edition 10...
  • Page 145 Period  Width+10 ms (when Width > 100 ms) Resolution: 100 s • • Pulse setting accuracy (fixed measurement range), supplemental information Width: 0.5 % + 50 s • Period: 0.5 % + 100 s • Agilent B1500A User’s Guide, Edition 10 4- 13...
  • Page 146 For 100 nA to 1 A ranges: Setting accuracy ± 2.5 % of range • Maximum capacitive load For 1 pA to 10 nA ranges: 1000 pF For 100 nA to 10 mA ranges: 10 nF For 100 mA and 1 A ranges: 100 F 4- 14 Agilent B1500A User’s Guide, Edition 10...
  • Page 147 Minimum displayed resolution is 1 aA at 1 pA range by 6 digits. Measurements made in the lower ranges can be greatly impacted by vibrations and shocks. These specifications assume an environment free of these factors. Agilent B1500A User’s Guide, Edition 10 4- 15...
  • Page 148 Available when Agilent E5288A Atto Sense and Switch Unit (ASU) is used. c. 10 pA and 100 pA ranges are available for HRSMU with or without ASU. d. Available for HPSMU. 4- 16 Agilent B1500A User’s Guide, Edition 10...
  • Page 149 ± (10.0 % of reading + 1 mVrms) at the measurement port of the MFCMU ± (15.0 % of reading + 1 mVrms) at the measurement port of the MFCMU cable (1.5 m or 3.0 m) Agilent B1500A User’s Guide, Edition 10 4- 17...
  • Page 150 • Available sweep parameters: DC bias voltage, oscillator level, frequency • Sweep type: linear, log • Sweep mode: single, double • Sweep direction: up, down • Number of measurement points: maximum 1001 4- 18 Agilent B1500A User’s Guide, Edition 10...
  • Page 151 For the parameter value, see Table 4-11 to Table 4-13. Calculation example of the measurement accuracy is also shown in Table 4-14. Specification conditions: Temperature: 23 C ± 5 C • • Integration time: 1 PLC or 16 PLC Agilent B1500A User’s Guide, Edition 10 4- 19...
  • Page 152 1k  f  200k 1(125/Vosc-0.5) 0.095 200k < f  1M 2(125/Vosc-0.5) 0.095 1M < f  2M 2(125/Vosc-0.5) 0.28 2M < f 20(125/Vosc-0.5) 30.0 0.28 Vosc is oscillator level in mV. 4- 20 Agilent B1500A User’s Guide, Edition 10...
  • Page 153 ± 0.10 % ± 619 nS a. The calculation examples are specified under the conditions Dx = 0.1, 1 PLC integration time, 30 mVrms test signal level, and at four-terminal pair port of MFCMU. Agilent B1500A User’s Guide, Edition 10 4- 21...
  • Page 154 LED: SMU/CMU output status indicator • Docking mode Direct and indirect mode • GSWU • Input Control port: for SCUU Mini pin plug port: Guard1 and Guard2 • Output LED: Connection status indicator 4- 22 Agilent B1500A User’s Guide, Edition 10...
  • Page 155 Range: 0 to ± 25 V Resolution: 1 mV Additional errors (for CMU bias): ± 100 V (open load) • DC voltage bias (SMU bias) Range: 0 to ± 100 V Resolution: 5 mV Agilent B1500A User’s Guide, Edition 10 4- 23...
  • Page 156 DUT side cable end. Specification conditions: Temperature: 23 C ± 5 C • • Integration time: 1 PLC or 16 PLC 4- 24 Agilent B1500A User’s Guide, Edition 10...
  • Page 157 > 10 s) • Pulse range and pulse parameter: See Table 4-15. • Pulse/DC output voltage and accuracy: See Table 4-16. Figure 4-1 SPGU pulse setup parameters Tperiod Tdelay Twidth Vpeak Vamp Vbase Agilent B1500A User’s Guide, Edition 10 4- 25...
  • Page 158 Typical minimum. This is the supplemental information. c. The time from 10 % to 90 % of Vamp which is the amplitude of output pulse. d. The time it takes the open state relay to open or close. 4- 26 Agilent B1500A User’s Guide, Edition 10...
  • Page 159 Output complex waveform per one channel of HV-SPGU • Define multi-level pulse and multi-pulse waveform including open state pulse with ALWG GUI editor • Sequential pulse waveform from user-defined pulse waveform • 1024 points per one channel Agilent B1500A User’s Guide, Edition 10 4- 27...
  • Page 160 320 ns 10.0 V 400 ns 10.0 V 450 ns 0.0 V 500 ns 500 ns 0.0 V Figure 4-3 ALWG complex waveform example Pattern1 x 1 Pattern2 x 5 Pattern3 x 1 4- 28 Agilent B1500A User’s Guide, Edition 10...
  • Page 161 Hardware Selector Agilent 16440A (B1500A-A04) SMU/pulse generator selector switches either a SMU or PGU to the associated output port. You can expand to four channels by adding an additional selector. The PGU port on channel 1 provides a “PGU OPEN”...
  • Page 162 • • SMU path • Maximum voltage: ± 25 V • Maximum current: ± 100 mA • V Monitor terminal • Connector: BNC Source impedance: 50  (nominal), at DC output • 4- 30 Agilent B1500A User’s Guide, Edition 10...
  • Page 163 Note: The maximum number of installable RSUs for a given prober depends upon the available space. Please contact your local sales representative for details on connecting and mounting the WGFMU and RSU. Agilent B1500A User’s Guide, Edition 10 4- 31...
  • Page 164 -10 V to +10 V V force/ -10 V to 0 V, 10 mA V measure 0 V to +10 V SMU pass Measurement Maximum Maximum through using SMU ± 25 V ± 100 mA 4- 32 Agilent B1500A User’s Guide, Edition 10...
  • Page 165 PG mode, 50  load, T  24 ns and T rise fall f. PG mode, 50  load, pulse period  100 ns g. PG mode, 50  load, pulse width  50 ns Agilent B1500A User’s Guide, Edition 10 4- 33...
  • Page 166 Sampling rate 5 ns, or 10 ns to 1 s with 10 ns resolution Averaging time 10 ns to 20 ms with 10 ns resolution Hardware memory About 4 M data points/channel (typical) 4- 34 Agilent B1500A User’s Guide, Edition 10...
  • Page 167 1 mA 500 ns 25 pF, 10 k 100 A 1.6 s 25 pF, 100 k 10 A 14.5 s 25 pF, 1 M 1 A 115 s 25 pF, 10 M Agilent B1500A User’s Guide, Edition 10 4- 35...

  • Page 168: Easyexpert Software

    Application library Sample application tests are supplied for the following categories. They are subject to change without notice. Structure, CMOS, Bipolar (BJT), Memory, Mixed Signal Device, TFT, Discrete, Reliability, Power Device, Nanotechnology, Utility 4- 36 Agilent B1500A User’s Guide, Edition 10...
  • Page 169 Specifications EasyEXPERT Software Measurement mode details Agilent B1500A supports the following measurement modes: • Staircase sweep • Multi-channel sweep (VAR1’ is not supported) • Pulsed sweep • Staircase sweep with pulsed bias • IV sampling • High speed IV sampling •...
  • Page 170 10 s resolution, or 2 ms to 65.535 s in 1 ms resolution Hold time, bias hold time: -90 ms to -100 s in 100 s resolution, 0 to 655.35 s in 10 ms resolution 4- 38 Agilent B1500A User’s Guide, Edition 10...
  • Page 171 (offset current) caused by the measurement path such as the measurement cables, manipulators, or probe card. • Timestamp The B1500A supports a time stamp function utilizing an internal quartz clock. Resolution: 100 s • Other measurement characteristics •...
  • Page 172 Up to 20 user-defined analysis functions can be defined using arithmetic expressions. Measured data, pre-defined variables, and read out functions can be used in the computation. The results can be displayed on the LCD. 4- 40 Agilent B1500A User’s Guide, Edition 10...
  • Page 173 File type: Agilent EasyEXPERT format, XML-SS format, CSV format • Data storage Hard disk drive, DVD-ROM/CD-R/CD-RW drive • Interfaces GPIB, interlock, USB (USB 2.0, 2 ea. on front, 2 ea. on rear), LAN (100BASE-TX/10BASE-T), trigger in/out, digital I/O Agilent B1500A User’s Guide, Edition 10 4- 41...
  • Page 174 XP Professional service pack 2 or later. Language of operating system: English (US)    2. Operating system: Microsoft Windows XP Professional, or Windows 2000 Professional. Language of operating system: English (US) 4- 42 Agilent B1500A User’s Guide, Edition 10...

  • Page 175: Desktop Easyexpert Software

    You can also combine wafer prober control with either Quick Test mode or an application test based test sequence to perform multiple testing on various devices across the wafer. Agilent B1500A User’s Guide, Edition 10 4- 43...
  • Page 176 Only for online execution, Agilent IO Libraries Suite 15.0 • Supported GPIB I/F, only for online execution: B1500A 4155B/C, 4156B/C Agilent 82350B Supported Supported Agilent 82357A Not supported Supported Agilent 82357B Not supported Supported 4- 44 Agilent B1500A User’s Guide, Edition 10...
  • Page 177 Specifications Desktop EasyEXPERT Software • Supported instruments: B1500A, 4155B, 4156B, 4155C, and 4156C Supported 4155/4156 firmware: HOSTC: 03.08 or later and SMUC: 04.08 or later • External instruments supported by Desktop EasyEXPERT Standard edition: Supported by switching matrix GUI: B2200A, B2201A...

  • Page 178: General Specifications

    • Weight B1500A (empty) 20 kg, B1510A 2.0 kg, B1511A 1.0 kg, B1517A 1.2 kg, E1520A 1.5 kg, E1525A 1.3 kg, E1530A 1.3 kg, E1531A 0.13 kg, E5288A 0.5 kg, N1301A-100 0.8 kg, N1301A-200 0.1 kg, 16440A 1.1 kg, 16445A 1.0 kg 4- 46 Agilent B1500A User’s Guide, Edition 10...

  • Page 179: Accessories And Options

    Accessories and Options...
  • Page 180 Then the GNDU cable must be used for extending the GNDU Force. And the triaxial cable must be used for the Sense. Cable length 1.5 m or 3.0 m is specified by the option B1500A-015 or B1500A-030. 5- 2...
  • Page 181 Test fixture for package device measurement, adds one 16442B, see Table 5-6 B1500A-A6J ANSI Z540 compliant calibration B1500A-ABA Paper manual set, English B1500A-ABJ Paper manual set, Japanese B1500A-UK6 Commercial calibration certificate with test data Agilent B1500A User’s Guide, Edition 10 5- 3...
  • Page 182 RSU cable, 2.4 m, between WGFMU and connector adapter RSU cable, 0.6 m, between RSU and connector adapter 16493R-801 connector adapter (female-female) 1. The option B1500A-A31 cannot be selected with the option B1500A-015. 5- 4 Agilent B1500A User’s Guide, Edition 10...
  • Page 183 Connection wire, mini banana to mini clip 3/color Connection wire, mini banana to mini banana 3/color 1. Contains four types of the connection wire. There is three colors for each connection wire, black, red, and blue. Agilent B1500A User’s Guide, Edition 10 5- 5...
  • Page 184 Socket module, 4-pin TO package 16442B-822 Socket module, 18-pin DIP package 16442B-823 Extra socket module, 28-pin DIP package 16442B-890 Extra accessory case 16444A Accessories for B1500A 16444A-001 USB keyboard 16444A-002 USB mouse 16444A-003 Stylus pen 5- 6 Agilent B1500A User’s Guide, Edition 10...
  • Page 185 1.5 m length 16493M-002 3 m length 16493N GNDU cable for B2200 Kelvin input 16493N-001 2 m length 16493P SPGU output connection cable (SMA to BNC) 16493P-001 1.5 m length 16493P-002 3 m length Agilent B1500A User’s Guide, Edition 10 5- 7...
  • Page 186 3 m length 16494A-003 80 cm length 16494A-004 40 cm length 16494A-005 4 m length 16494B Kelvin triaxial cable (B1500 to E5250) 16494B-001 1.5 m length 16494B-002 3 m length 16494B-003 80 cm length 5- 8 Agilent B1500A User’s Guide, Edition 10...
  • Page 187 Waveform Generator/Fast Measurement Unit (WGFMU) B1530A-0KN Self-paced sample program learning kit B1531A Remote-sense and Switch Unit (RSU) B1540A EasyEXPERT software B1540A-001 Standard edition B1540A-002 Plus edition (supports E5250A+E5252A by switching matrix GUI) Agilent B1500A User’s Guide, Edition 10 5- 9...
  • Page 188 Accessories for CMU N1301A-100 SMU CMU Unify Unit (SCUU) N1301A-102 SCUU cable, 3 m N1301A-110 SCUU magnetic stand N1301A-200 Guard Switch Unit (GSWU) N1301A-201 GSWU cable, 1.5 m N1301A-202 GSWU cable, 3 m 5- 10 Agilent B1500A User’s Guide, Edition 10...

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