•
Maximum guard capacitance
900 pF (HPSMU, MPSMU, HRSMU)
660 pF (HRSMU with ASU)
•
Maximum shield capacitance
5000 pF (HPSMU, MPSMU, HRSMU)
3500 pF (HRSMU with ASU)
•
Maximum guard offset voltage
± 1 mV (HPSMU)
± 3 mV (MPSMU, HRSMU)
± 4.2 mV (HRSMU with ASU, Iout 100 A)
•
Noise characteristics (filter ON)
Voltage source: 0.01 % of V range (rms.)
Current source: 0.1 % of I range (rms.)
•
Overshoot (filter ON), typical
Voltage source: 0.03 % of V range
Current source: 1 % of I range
•
Range switching transient noise (filter ON)
Voltage ranging: 250 mV
Current ranging: 70 mV
•
Slew rate: 0.2 V/s (maximum)
•
Voltage range, resolution, and accuracy (high speed ADC)
See Table 4-9.
•
Current range, resolution, and accuracy (high speed ADC)
See Table 4-10.
Specified measurement resolution is limited by fundamental noise limits.
Minimum displayed resolution is 1 aA at 1 pA range by 6 digits.
Measurements made in the lower ranges can be greatly impacted by vibrations
and shocks. These specifications assume an environment free of these factors.
Agilent B1500A User's Guide, Edition 10
Specifications
Hardware
4- 15