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Agilent Technologies B1500A Training Manual

Agilent Technologies B1500A Training Manual

Semiconductor device analyzer self-paced training manual, 4
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Agilent B1500A
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Self-paced Training Manual, 4
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Summary of Contents for Agilent Technologies B1500A

  • Page 1 Agilent B1500A Semiconductor Device Analyzer Self-paced Training Manual, 4 Agilent Technologies...
  • Page 2 Notices © Agilent Technologies 2005 - 2008 Manual Part Number ware” as defined in DFAR 252.227-7014 (June 1995), or as a “commercial item” as No part of this manual may be reproduced B1500-90043 defined in FAR 2.101(a) or as “Restricted in any form or by any means (including computer software”...
  • Page 4 EasyEXPERT. You will learn about what is the B1500A. • Module 2. Getting Started This module explains the basic operations of the B1500A. You will learn about how to launch B1500A/EasyEXPERT and how to perform application test and quick test. •...
  • Page 5 This module explains the SPGU Control classic test. You will learn how to create the classic test setup and the applications using SPGU in the course exercises. EasyEXPERT is a trademark of Agilent Technologies. All other trademarks are the property of their respective owners.
  • Page 6 Class Exercises Class exercises use the test setup listed below. The test setup data are only examples and included in the Demo.xpg file stored in the Manual CD-ROM. Module Exercise Device Test setup/definition/data Page Module 1 no exercise Module 2 Id-Vd measurement MOSFET CMOS: Id-Vd...
  • Page 7 Demo.xpg file Demo.xpg file is required to create the Demo preset group which contains the test setup data used by the class exercises. And it is stored in the \data folder on the Agilent B1500A Manual CD-ROM, Edition 4 or later.
  • Page 8 Test Setup for Class Exercises The Demo preset group contains the following test setup. The setup data are only examples for the class exercises. The following table lists the test setup name in alphabetical order. Test Setup Name Description ALWG monitor 511 kohm sampling measurement with SPGU ALWG output Charge Pumping 4T MOSFET Icp-Vbase measurement...
  • Page 9 Test Setup Name Description Trng List MOSFET Vth-gmmax measurement using I/V List Sweep Trng Multi Multi Channel I/V Sweep (Bipolar transistor and LED) 0.1 μF sampling measurement Trng Sampling Trng Switch B2200/E5250 switch setup, Input 1-3-5-7 to Output 1-3-5-7 Zero-check SMU open measurement Zero-check-ASU SMU open measurement with ASU...
  • Page 10 Required Devices for Class Exercises To perform the class exercises, you need the device set (Agilent part number 04156-87001) which contains the following devices. Description Quantity N-channel MOSFET 2 ea. NPN Bipolar Transistor 1 ea. Red Miniature LED 1 ea. 0.1 μF Capacitor 50 V 1 ea.
  • Page 11 Required Accessories for Class Exercises To perform the class exercises, you need the following accessories. Prepare the accessories shown below. Designation Description Model No. Qty. Test Fixture 1 ea. 16442A/B 28 pin socket module 1 ea. Connection wire 6 ea. Triaxial Cable 16494A 4 ea.
  • Page 12 To perform the flash memory class exercise in Module 13 and if you use the ASU, you need the following accessories. Description Model No. Qty. ASU (Atto Sense/Switch Unit) with control cable E5288A Total 3sets Triaxial Cable 16494A or Total equivalent 7ea.
  • Page 13 • • SMU/Pulse Generator Selector • B2200/E5250 Switch Control • Desktop EasyEXPERT Module 2. Getting Started • To Turn on/off B1500A • To Launch EasyEXPERT • To Specify/Create Workspace • To Perform Application Test • To Save/Recall Your Test Setup •...
  • Page 14 Contents Module 3. Data Display and Management • Data Display window • Graph Analysis Tools • Data Status • To Change Graph/List/Display Setup • To See Print Preview • To Print Display Data • To Copy Graph Plot/List Data • To Save Analysis Result •...
  • Page 15 Contents Module 5. Basic Measurement • SMU Fundamentals • Classic Test Environment • SMUs Connected in Series or Parallel • Cabling and Fixture Issues • Kelvin and Driven Guard • Probes and Prober Connections • Triax and Coax Adapters • Safety Interlock Issues Module 6.

  • Page 16: Table Of Contents

    Contents Module 7. Measurement Functions • SMU Pulsed Sweep Measurement • I/V-t Sampling Measurement • Negative Hold Time for High Speed Sampling • Auto Analysis • SMU Filter • SMU Series Resistor • Standby Function • Bias Hold Function Module 8. Capacitance Measurement •...
  • Page 17 Contents Module 9. Modifying Application Test Definitions • To Open Application Test Definition • To Modify Test Definition • To Use Debug Tools • To Use Built-in Functions • To Add Data Display • To Use Auto Analysis • To Use Test Setup Internal Variables Module 10.
  • Page 18 Contents Module 11. Advanced Definitions and Operations • To Control External GPIB Devices • To Call Execution Files • To Perform Repeat Measurements • Prober Control Script Module 12. Miscellaneous Operations • Function Status Indicator • Run Option • Automatic Data Export and Data Record •...
  • Page 19 Contents Module 13. SPGU Control and Applications • High Voltage SPGU • SPGU Control • Pulse Generator Mode • Charge Pumping • Flash Memory Test • ALWG Mode Contents-7...
  • Page 21 Measurement Functions...
  • Page 22 Module 7 Measurement Functions In This Module • SMU Pulsed Sweep Measurement • I/V-t Sampling Measurement • Negative Hold Time for High Speed Sampling • Auto Analysis • SMU Filter • SMU Series Resistor • Standby Function • Bias Hold Function There are too many measurement functions to conveniently cover in one module.

  • Page 23: Smu Pulsed Sweep Measurement

    Module 7 Measurement Functions SMU Pulsed Sweep Measurement Use PULSE mode for precise force/measure timing Pulse down to 500 μs width Use current ranges from 1 nA to 1 A (HPSMU) Use voltage ranges from 2 V to 200 V (HPSMU) Use PULSE mode for repeatable 1 A measurements Eliminate heating during IV sweeps Avoid device damage...
  • Page 24 Module 7 Measurement Functions SMU Pulse Mode VAR1 Sweep output voltage or current pulse period stop pulse width start base hold time time When you select VPULSE or IPULSE on the Channel Setup screen, the SMU Pulse area will appear on the Measurement Setup screen.
  • Page 25 Module 7 Measurement Functions SMU Pulse Mode Pulse On Primary Source VAR1 Primary VAR2 Secondary One SMU can pulse while another follows. Either VAR1 or VAR2 may be pulsed, but not both. The settings above could be used to pulse a drain while stepping the gate.
  • Page 26 Module 7 Measurement Functions Hints on Pulsing the HPSMU Use the HPSMU or GNDU as the current return path Use Kelvin connections (must use on GNDU) Use 16493L GNDU cable for the GNDU connection HPSMU 1.0 A HRSMU MPSMU GNDU 4.2 A The 1 A SMU (HPSMU) cannot use another MPSMU or HRSMU as the current return.
  • Page 27 Module 7 Measurement Functions SMU Pulse Mode Limitations Minimum pulse width is 500 us Only one pulsed source is available Only one measurement channel is available Measurement range is always compliance range Integration time cannot be changed...
  • Page 28 Module 7 Measurement Functions Class Exercise SMU Pulse Mode You will observe a MOS FET family of curves You will edit VAR1 from V mode to VPULSE mode You will learn how to properly define a "pulsed" algorithm To Get Started: Use the next several pages as you guide Get the IDVD setup Follow the instructions on the following pages...
  • Page 29 GNDU B1500A Rear View This is the SMU cable setup that will be used in the remainder of the class exercises. Connect the cables between the B1500A and test fixture as follows. SMU1 : SMU1 SMU2 : SMU2 SMU3 : SMU3...
  • Page 30 Module 7 Measurement Functions Jumper Leads – MOS transistor GNDU 1: Substrate 2: Source 3: Gate 4: Drain For all class exercises, you need the 28-pin dual in line socket which comes standard with the 4145 fixture (16058A) or the newer fixture (16442A/B). Either fixture works fine. With the 16442A/B fixture, note that there are two SMU numbering schemes..3 SMUs with force and sense, or six SMUs with force only.
  • Page 31 Module 7 Measurement Functions VPULSE Data Display Window Make a measurement to verify the setup is correct. You should see the above family of curves. The algorithm is defaulted to standard staircase sweep on VAR1 (no pulsed SMU). 7-11...
  • Page 32 Module 7 Measurement Functions VPULSE Channel Setup Enter new name before save Drain pulse Switch VAR1 from V mode to VPULSE mode. A new panel will pop up on the Measurement Setup. Before saving this new setup, enter new name into the Setup Name field, then click the Save button. 7-12...

  • Page 33: Measurement Setup

    Module 7 Measurement Functions VPULSE Range and Measurement Setup ADC/Integ are disabled This box pops up only if VPULSE or IPULSE is set on Channel Setup. Maximum measurement value Default pulse conditions for the Measurement Setup are shown here. The base is 0, and the pulse duty cycle is 10 %.

  • Page 34: I/V-T Sampling Measurement

    Time a, b : time from measurement start to integration start B1500A supports the sampling measurement which performs the operation shown above. With the SEQUENTIAL output sequence, the source channels start to force the Source value sequentially. Then the last source channel forces the Base value, and forces the Source value after the Bias hold time.
  • Page 35 Module 7 Measurement Functions I/V-t Sampling Measurement LINEAR Sampling interval: >= 2 ms 0.1 ms to 1.99 ms (limited) Number of samples: 1 to 100001 Sampling interval: >= 2 ms Number of samples: 1 + number of data for 11 decades Remaining data: 10/25/50/100/250/500 data are plotted into one decade of the log scale in the same distance...

  • Page 36: Sampling Measurement

    Module 7 Measurement Functions Class Exercise Sampling Measurement You will: Monitor the charging voltage of an RC circuit Learn LOG10 data interval Learn how to properly define a sampling algorithm To Get Started: Use the instrument setup as same as the SMU pulse exercise Connect the RC components as shown in the next page Get and run the RC-sampling-log setup Change the range or ADC and perform append measurement...
  • Page 37 Module 7 Measurement Functions Jumper Leads – Sampling Exercise GNDU 28: SMU1 0.5M 25: SMU2 0.1 uF 0.1 uF 22: SMU4 0.5 M The 0.5 M ohm and 0.1 uF values were chosen because these values are readily available, and they give a RC time constant suitable for observing 2 ms time steps.
  • Page 38 Module 7 Measurement Functions Sampling Exercise – LOG10, 2 ms interval RC Measurement X data 10 data 10 data 10 data Y data X + Y = 20 5 decades 2 ms 200 s The RC-sampling-log setup is for the LOG10 sampling with 2 ms interval and 51 samples. LOG10 sampling obtains 10 data in one decade.
  • Page 39 Module 7 Measurement Functions Sampling Exercise – LOG10, 2 ms interval 10 data/decade 10 data/decade 10 data/decade 7-19...
  • Page 40 Module 7 Measurement Functions Sampling Exercise Channel Setup Variable for time data 7-20...
  • Page 41 Module 7 Measurement Functions Sampling Exercise Measurement Setup FIXED range High speed ADC Use the FIXED range and the high speed A/D converter to get 2 ms interval. Change the range to AUTO. Or change the ADC to the high resolution ADC. And perform append measurement.
  • Page 42 Module 7 Measurement Functions Negative Hold Time Available for Interval < 2 ms -90 ms =< Hold Time =< -0.1 ms, 0.1 ms step Bias starts at 0 s For the sampling measurement, the available hold time value is 0 to 655.35 s, in 10 ms step. However, the negative hold time -90 ms to -0.1 ms, in 0.1 ms step is also available for the high speed sampling which the Interval is less than 2 ms.
  • Page 43 Module 7 Measurement Functions Jumper Leads – Negative Hold Time GNDU 28: SMU1 0.5M 25: SMU2 0.5 M 7-23...
  • Page 44 Module 7 Measurement Functions Negative Hold Time Channel and Measurement Setup Current source Interval < 2 ms Negative Hold Time 7-24...

  • Page 45: Auto Analysis

    The B1500A has built-in functions such as axis intercepts, logs, regression lines, area integration, max/min, and many more. The ability to automatically extract important parameters such as threshold voltage without the need to manually manipulate screen cursors or markers is important in process development.
  • Page 46 Apply button on the Auto Analysis Setup screen. IMPORTANT! Please note that formulas for auto analysis are not hard coded into the B1500A. You define the formulas, and so you can customize the method of performing the analysis.
  • Page 47 Vth which are less complex, but now you don't have to worry about complexity. The B1500A can perform the process without you having to interact with the screen. Not only automation removes human error, but also it allows computer controlled analysis to proceed without interruption.
  • Page 48 Module 7 Measurement Functions Class Exercise Auto Analysis You will: Make a MOS threshold voltage (Vth) measurement Observe how parameters for the analysis are defined Observe how the user functions and analysis functions are used in the analysis To Get Started: Use the standard MOS device and pin connections Get the GMMAX setup Make a measurement and turn the knob...
  • Page 49 At the wafer level, you can have the same problems. Putting a charged probe with cables attached down on a gate junction can weaken or destroy the device. Also, the B1500A offset cancel (zero cancel) sends signals down to the probes. These voltages can damage a sensitive gate junction.
  • Page 50 Module 7 Measurement Functions Vth Measurement Channel and Measurement Setup Nothing new here. This slide is included for completeness. You will notice that these variables are heavily used on the Function Setup screen. 7-30...
  • Page 51 Module 7 Measurement Functions Vth Measurement Function Setup Here are definitions for the Y1-axis plot (SQRT_ID) and the Y2-axis plot (PEAK). @L1X means the X-axis intercept of LINE 1. @L1G^2 means the squared gradient value of LINE 1. In this case, it is just calculating line 1 slope. It is squared to account for the fact that the Y1-axis is a square root.
  • Page 52 Module 7 Measurement Functions Vth Measurement Display Setup Page VTH and BETA are values which will be displayed at the Parameters area on the Data Display window. These variables are defined in the Function Setup screen. 7-32...
  • Page 53 Module 7 Measurement Functions Auto Analysis Analysis Setup Page This screen is the heart of auto analysis. You define custom procedures for graphical analysis with fill-in-the-blank ease. (End of This Class Exercise) 7-33...

  • Page 54: Smu Filter

    Module 7 Measurement Functions SMU Filter Filter OFF Force V/I DAC Filter ON Series Resistor Sense (1 M ohm) (V or I mode) Time Filter setting The filter is mounted on each SMU. It assures clean source output with no spikes or overshooting. However, using a filter may increase the SMU settling time.
  • Page 55 Module 7 Measurement Functions SMU Filter SMU Filter: ON (add filter) or OFF (no filter) To change the SMU filter setup, open the Advanced Setup window by clicking the Advanced button on the Measurement Setup screen. And specify ON or OFF by using the SMU Filter pull down menu.

  • Page 56: Smu Series Resistor

    Module 7 Measurement Functions SMU Series Resistor Use short cable to minimize the guard capacitance Series Resistor Force (1 M ohm) GNDU Guard Sense line is internally disconnected during the series resistor is connected Sense The series resistor (approx. 1 Mohm) is mounted on each SMU. The series resistor may be used for the device protection, negative resistance measurement, and so on.
  • Page 57 Module 7 Measurement Functions Class Exercise SMU Series Resistor You will: Measure 0.5 M ohm without Series Resistor Measure the same device with Series Resistor Learn how the Series Resistor works To Get Started: Use the instrument setup as same as the SMU pulse exercise Connect 0.5 M ohm as shown in the next page Get and run the IV-res setup Set the Series Resistor and perform Append measurement...
  • Page 58 Module 7 Measurement Functions Jumper Leads – SMU Series Resistor GNDU 28: SMU1 0.5M 25: SMU2 0.5 M 7-38...
  • Page 59 Module 7 Measurement Functions SMU Series Resistor 1.5 M ohm (with Series Resistor) 0.5 M ohm (device only) The measurement result without the SMU series resistor shows about 0.5 M ohm I-V characteristics. By setting the SMU series resistor, the measurement result shows about 1.5 M ohm characteristics. The IV-res setup uses the analysis function and auto analysis function to draw the regression line and get the slope of the line.
  • Page 60 Module 7 Measurement Functions SMU Series Resistor Series R: 1MOHM (add 1 M ohm) or NONE (thru) To change the SMU series resistor setup, open the Advanced Setup window by clicking the Advanced button on the Measurement Setup screen. And specify NONE or 1MOHM by using the Series R pull down menu.
  • Page 61 Module 7 Measurement Functions SMU Series Resistor Function Setup and Auto Analysis Setup to draw regression line to get slope of the line The analysis function and the auto analysis function are used to calculate the resistance value. This auto analysis setup will draw the regression line for the X-Y1 curve. And the analysis function @L1G is used to pass the slope of the line to the R1 variable.
  • Page 62 Module 7 Measurement Functions SMU Series Resistor Compensation 1.5 M ohm (with Series Resistor) Calculated value If you use the SMU series resistor, you will need to compensate the measurement data to eliminate the effects of the series resistor (1 M ohm). This is a compensation example by using the following user function.

  • Page 63: Standby Function

    Module 7 Measurement Functions Standby Function Standby function sets any SMUs (except HRSMU with ASU) to specific output values and compliances before starting or after stopping measurement. Standby function is useful for power supplies of complicated device (eg. Smart TEG), defect analysis, and so on. This slide shows the standby and measurement operation in the following setup.
  • Page 64 Module 7 Measurement Functions To Use Standby Function Click the Standby Channel Definition button to open the Standby Channel Definition window. Define Standby channels (Unit, Mode, Source, and Compliance). Click the Standby ON button to set standby channel outputs. The Standby indicator will change from OFF to ON.
  • Page 65 Module 7 Measurement Functions Bias Hold After Measurement End of Single measurement Start of next measurement Bias Hold ON Source or Base value for Sampling CONST VAR1/VAR1’/CMU Stop or Start value VAR2 Stop value Bias Hold OFF CONST VAR1/VAR1’/CMU VAR2 Bias hold function keeps bias output after a measurement is made.

  • Page 66: Bias Hold Function

    Module 7 Measurement Functions Class Exercise Bias Hold Function You will: Perform Repeat Measurement Measure the LED I-V characteristics Monitor LED during Repeat Measurement To Get Started: Use the connection as same as the SMU pulse exercise Add an LED and jumper leads per following pages Get the LED setup 7-46...
  • Page 67 Module 7 Measurement Functions Jumper Leads – Bias Hold Exercise GNDU Shorter Lead Connect test leads as shown. And add the LED between terminals 13 and 14 of the 28-pin dual in line socket. 7-47...
  • Page 68 Module 7 Measurement Functions Bias Hold Exercise Channel and Measurement Setup SMU1 Function to VAR1 Vh = 0 to 2.5 V Bias Hold to ON Output Value to STOP Set the SMU1 Function to VAR1. The VAR1 output 0 to 2.5 V is enough to light the LED. Set the Bias Hold after Measurement field to ON to enable the bias hold function.
  • Page 69 Module 7 Measurement Functions Bias Hold Exercise Repeat Measurement Setup Repeat button Repeats three times Click Run to start measurement Click Repeat button to open this window which is used to set and run the repeat measurement. This example performs the LED I-V sweep measurement three times and then finishes the repeat measurement.
  • Page 70 Module 7 Measurement Functions Bias Hold Exercise LED lights on LED lights off During the measurement, leave the fixture lid open. And monitor the LED. This measurement does not force dangerous voltage. At the start of measurement, LED lights off. Beyond the threshold voltage, the LED lights on. After the measurement, the LED keeps lighting until start of the next sweep measurement.
  • Page 71 Capacitance Measurement...

  • Page 72: Cmu Fundamentals

    Module 8 Capacitance Measurement In This Module • CMU Fundamentals • Classic Test Environment • CMU Calibration • SCUU for IV/CV Switching • GSWU for Accurate Capacitance Measurement • ASU for IV/CV Switching Note:...
  • Page 73 • Higher accuracy below 100pF The multi frequency CMU (capacitance measurement unit) adds the CV measurement capability to the B1500A. You can now perform both IV and CV measurements by using the B1500A one box without an external capacitance meter.
  • Page 74 Module 8 Capacitance Measurement CMU Block Diagram Four-Terminal Pair Configuration Generally, any mutual inductance, interference of the measurement signals, and unwanted residual factors in the connection method incidental to ordinary termination methods will have significant effects on the measurements, especially at a high frequency. The CMU employs the four-terminal pair (4TP) measurement configuration which permits easy, stable, and accurate measurements and avoids the measurement limitations inherent to such factors.
  • Page 75 Module 8 Capacitance Measurement C-V Sweep Source Single Sweep Double Sweep Linear Sweep Up to +/- 25 V, using only CMU Up to +/- 100 V, using SCUU (Agilent N1301A-100) CMU supports the linear single sweep and the linear double sweep. The CMU can sweep up to a value and then back down (double sweep).
  • Page 76 Module 8 Capacitance Measurement Class Exercise C-V Sweep Measurement You will make the MOS FET Cgs-Vg measurement You will learn how to properly define a C-V sweep algorithm To Get Started: Use the next several pages as you guide Get the CV-1MHz setup Follow the instructions on the following pages...
  • Page 77 One side of the CMU cable forms the attachment used to join and fix it to the CMU. And the other side provides four BNC connectors used to connect the fixture as shown. Connect the cables between the B1500A and the test fixture as follows. SMU1 : SMU1...
  • Page 78 Module 8 Capacitance Measurement Jumper Leads – MOS transistor GNDU CMUH 1: Substrate CMUL 2: Source 3: Gate 4: Drain For all class exercises, you need the 28-pin dual in line socket which comes standard with the 4145 fixture (16058A) or the newer fixture (16442A/B). Either fixture works fine. With the 16442A/B fixture, note that there are two SMU numbering schemes..3 SMUs with force and sense, or six SMUs with force only.
  • Page 79 Module 8 Capacitance Measurement Capacitance Measurement Measurement Example Conductance This is the measurement example of the MOS FET Cgs-Vg characteristics. To make the measurement, set SMU1 and SMU2 to COMMON. And set the CMU as shown in the next page.
  • Page 80 Module 8 Capacitance Measurement Capacitance Measurement Measurement Setup Selects measurement parameters Frequency and Oscillation level DC bias: -5 V to +5 V Integration time 1. Select the Cp-G mode, and enter the C Name and G Name. 2. Set the Start, Stop, and Step to specify the DC bias sweep condition. 3.

  • Page 81: Cmu Calibration

    Module 8 Capacitance Measurement CMU Calibration Type Effectiveness Measurement terminals Phase Corrects phase error caused Open terminals Compensation by extending measurement Perform before cables. measurement Open Correction Corrects for stray admittance. Open terminals Effective for high impedance Perform before measurement measurement.
  • Page 82 Module 8 Capacitance Measurement CMU Calibration Calibration Opens dialog box to start correction/compensation. Open the Calibration window and click the CMU Calibration tab to perform the CMU calibration. At first, open the measurement terminals for CMUH and CMUL, and perform the Phase Compensation by clicking the Measure…...

  • Page 83: Scuu For Iv/Cv Switching

    The SCUU removes all of these worries and makes connection simple and easy. In addition, the B1500A software automatically takes care of the multiplexing based upon the type of algorithm selected from the front panel. 8-13...
  • Page 84 GNDU B1500A Rear View Before connecting the SCUU, turn the B1500A off. And restart the B1500A after connection is completed. The B1500A cannot recognize the SCUU without restart after connection. Use normal triaxial cables or Kelvin triaxial cables to connect between the SCUU and the test fixture.
  • Page 85 Module 8 Capacitance Measurement SCUU Connection Example – SCUU Cable SMU CMU Unify Unit (SCUU) Force1 or CMUH Sense1 Sense2 SCUU cable Force2 or CMUL To install the SCUU near the manipulators/positioners, use the N1301A-102 SCUU cable. To realize accurate capacitance measurement, use the N1301A-200/201/202 GSWU & cable. See the next section.
  • Page 86 The residual inductance will be roughly 1/10 to 1/30 compared with no return path. To make the return path, use the GSWU (Guard Switch Unit) which was developed to make the setup easily. The GSWU is the accessory available only for the B1500A equipped with the CMU and the SCUU.
  • Page 87 Module 8 Capacitance Measurement GSWU Connection Example SCUU Output: Force1/CMUH B1500A with SCUU Force2/CMUL Triaxial Cable Hcur/Hpot SMU N+1 Force Manipulator/Positioner Force Lcur/Lpot SMU N Guard Guard N: SMU number, Integer. Switches CV/IV Clip wire Clip wire Switches CV/IV CV: thru...
  • Page 88 Sense To HRSMU 2 The ASU (Atto Sense and Switch Unit) is available for the B1500A installed with the HRSMU. Using the ASU permits use of the 1 pA range. Also the ASU can switch the measurement resources, HRSMU or an instrument connected to the AUX input connectors.
  • Page 89 The triax cable and the D-sub cable are connected between ASU and HRSMU. Before starting the ASU connection, turn the B1500A off. And restart the B1500A after the connection is completed. The B1500A cannot recognize the ASUs without restart after the connection.
  • Page 90 If the ASU Serial Number field shows its serial number, the HRSMU-ASU combination is correct. If the ASU Serial Number field shows *s/n mismatch, the combination is wrong. The B1500A can work with this wrong combination however it cannot satisfy its specifications. The specifications are guaranteed for the correct combination of HRSMU and ASU.
  • Page 91 Modifying Application Test Definitions...

  • Page 92: To Open Application Test Definition

    Module 9 Modifying Application Test Definitions In This Module • To Open Application Test Definition • To Modify Test Definition • To Use Debug Tools • To Use Built-in Functions • To Add Data Display • To Use Auto Analysis •...
  • Page 93 Module 9 Modifying Application Test Definitions Modification Overview 1. Open an application test definition to be modified 2. Open test definition editor 3. Save the definition as your test definition 4. Modify the definition as you like 5. Resave and close the definition 6.
  • Page 94 Module 9 Modifying Application Test Definitions To Open an Application Test Definition Example: Select Vth Const Id as template Click a test definition in Library list area, and click Select button to open the test definition. For example, open Vth Const Id.
  • Page 95 Module 9 Modifying Application Test Definitions To Open Test Definition Editor Click Library>Open Definition of This Test… Cancel Define New Test… Open Definition of This Test… Delete Definition of This Test Import Test Definition… Export Test Definition… Click Library and select Open Definition of This Test… to open the test definition editor. The following pages show the modification example to display the gm-Vg curve given by the Vth Const Id test result.
  • Page 96 Module 9 Modifying Application Test Definitions To Save Definition As Your Definition Save the definition as your definition (ex: Trng vth) Save Ctrl+S Close new test name new category Test Definition editor Create a new Category (ex. Exercise), and change the Test Name (ex. Trng Vth). After changing the test name, save the test definition.

  • Page 97: To Modify Test Definition

    Module 9 Modifying Application Test Definitions To Modify Test Definition Change default values and add parameters (ex: Pcomp_d) This area sets the properties of the specified parameter. •Min •Max •Digits •Resolution •Unit •Typical Values •Symbols Test Definition editor On the Test Specification tab screen, you can add new parameters or change parameter settings. This example changes the default value of the Module parameters for the MOS FET class exercise typical setup and adds the Pcomp_d test parameter (drain terminal power compliance).
  • Page 98 Module 9 Modifying Application Test Definitions To Modify Test Definition Change or set test parameters (ex: Pcomp_d) Test Definition editor On the Test Contents tab screen, you can change the test execution flow (program flow), measurement conditions, display setup, and so on. To add the Pcomp_d parameter to the measurement setup, click the Vth Const Id line in the program list.
  • Page 99 Module 9 Modifying Application Test Definitions To Modify Test Definition Change display setup and define external variables External variables must be defined before making the matching table. External variable Test setup internal variable Test Definition editor On the Display Setup tab screen, you can change the graph scale Min/Max values or add/delete the list parameters.
  • Page 100 Module 9 Modifying Application Test Definitions To Modify Test Definition Define Test Output and Analysis Parameters Test Definition editor This example defines the Test Output and the Analysis Parameters. 1. Display the Test Output screen. 2. Check the Define own Output Parameters. 3.
  • Page 101 Module 9 Modifying Application Test Definitions To Modify Test Definition Add local variable (ex: Yes for Message box) Variable Yes is used in the message box. Test Definition editor Click Local Variables Definition line to display the local variable list. And define variables. This example defines Yes variable as follows.
  • Page 102 Module 9 Modifying Application Test Definitions To Modify Test Definition Define Message box This message box asks you clicking the OK button to display the gm curve. This setup displays the message “To display the gm curve, click OK.” on the message box. This setup makes the OK button on the message box.
  • Page 103 Module 9 Modifying Application Test Definitions To Modify Test Definition Example: Displaying Message box In this modification example, the message box opens after the Vth Const Id measurement is completed. This message box asks you clicking the OK button to display the gm curve. 9-13...
  • Page 104 Module 9 Modifying Application Test Definitions Class Exercise Perform the following modification example. 1. Open Id-Vd test definition. 2. Modify it as follows. If Yes is clicked after Id-Vd test, move marker and tangent line to Vdrain=1 point. If Yes is clicked, perform Vth gmMax test. 3.
  • Page 105 Module 9 Modifying Application Test Definitions Class Exercise Modify test definition to use a vector data. 1. Open the Cgg-Vg test definition. 2. Modify it for the multiple frequency test using a vector variable. 3. Use the debug tools. 4. Save the definition as a new one (ex. Trng Cgg-Vg). 5.
  • Page 106 Module 9 Modifying Application Test Definitions To Modify Test Definition Opening Cgg-Vg test definition 1. Select the CMOS category. 2. Open the Cgg-Vq test definition. 3. Click the Library button. 4. Select the Open Definition of This Test… menu. The test definition editor is opened with the Cgg-Vg test definition. 9-16...
  • Page 107 Module 9 Modifying Application Test Definitions To Modify Test Definition Setting properties of vector variable 1. Save the test setup as a new one. For example, save it as Trng Cgg-Vg of the Exercise category. 2. Select the FREQ variable and change the type from Numeric to Vector. 3.
  • Page 108 Module 9 Modifying Application Test Definitions To Modify Test Definition Setting vector data 1. Click the Grid button of the FREQ variable. The Define vector data dialog box appears. 2. Define the vector values for the FREQ variable. The example in this slide sets the value 1 MHz, 2 MHz, and 3 MHz to the FREQ three elements vector variable.
  • Page 109 Module 9 Modifying Application Test Definitions To Modify Test Definition Using the at( ) function to read vector data 1. Display the Test Contents screen. 2. Highlight the Cgg-Vg line. 3. Click the Measurement Setup tab and set the Frequency List using the at( ) functions. 9-19...

  • Page 110: To Use Debug Tools

    Module 9 Modifying Application Test Definitions To Use Debug Tools ReturnPort = SMU1 ReturnCh = OUT1 Break point Variable Inspector This slide shows an example of using the Variable Inspector for debugging. Confirm whether the correct values are passed to the variables properly. Set the break point, and click the Run button.
  • Page 111 Module 9 Modifying Application Test Definitions To Use Debug Tools •Run •Abort •Stop •Break •Inspect The Debug tab menu provides the following buttons: •Run button starts the debug (executes the test flow). During execution, the label changes to Pause. Clicking Pause button pauses the execution, and changes the label to Run that is used to continue the debug (execution).
  • Page 112 Module 9 Modifying Application Test Definitions To Use Debug Tools Debug: Inspect button Break point Paused point The Variable Inspector is displayed by clicking the Inspect button after the program is paused, and is used to monitor or change the value of the device parameters, test parameters, analysis parameters, local variables, or system variables.
  • Page 113 Module 9 Modifying Application Test Definitions To Resave and Close Your Test Definition Close the definition editor, and overwrite your test definition Save Ctrl+S Close Test Definition editor After you create your test definition, save the definition and close the Test Definition editor. Click File >...
  • Page 114 Module 9 Modifying Application Test Definitions To Export/Import Test Definition Click Library>Export Test Definition or Import Test Definition Cancel Define New Test… Open Definition of This Test… Delete Definition of This Test Import Test Definition… Export Test Definition… The test definition can be exported as the EasyEXPERT test definition file format or XML file format.

  • Page 115: To Use Built-In Functions

    Module 9 Modifying Application Test Definitions To Use Built-in Functions Absolute value: abs(A) Averaging: avg(A), mavg(A,B) Data conversion: string(A), value(A) Difference: delta(A) Differentiation, integration: diff(A,B), integ(A,B) Exponent, logarithm: exp(A), lgt(A), log(A) Maximum, minimum: max(A), min(A) Reading data : getNumericData(A), getVectorData(A) Square root: sqrt(A) Trigonometric function:...
  • Page 116 Module 9 Modifying Application Test Definitions To Use Built-in Functions User function setup example gm = diff(Id,Vg) VG=getVectorData(Vg) gmMax = max(gm) ID=getVectorData(Id) GM=getVectorData(gm) VTH=getNumericData(Vth) GM_MAX=getVectorData(gmMax) This is an user function setup example. This example uses the diff function to calculate gm values and the max function to get the maximum gm value.
  • Page 117 Module 9 Modifying Application Test Definitions To Use Read Out Functions Marker index value: X coordinate value: @MX, @CX Y coordinate value: @MY, @MYn, @CY, @CYn Regression line parameter: @L1CO, @L2CO Line slope: @L1G, @L1Gn, @L2G. @L2Gn Line X intercept: @L1X, @L2X Line Y intercept: @L1Y, @L1Yn, @L2Y, @L2Yn...
  • Page 118 Module 9 Modifying Application Test Definitions To Use Read Out Functions Analysis function setup example Vth = @L1X This is an analysis function setup example. This example uses the @L1X function to get the X intercept value of the line 1. 9-28...

  • Page 119: To Add Data Display

    Module 9 Modifying Application Test Definitions To Add Data Display Analysis: Display Data Setup Measurement, data display, and data save Data display The test setup performs measurement, displays the test result, and stores the test result data to the test record.
  • Page 120 Module 9 Modifying Application Test Definitions To Add Data Display Additional data display example This is a test result example displayed on the Data Display window. The auto analysis setup for this example is shown in the next page. 9-30...
  • Page 121 Module 9 Modifying Application Test Definitions To Use Auto Analysis Function Analysis: Auto Analysis • Line 1 • Line 2 • Marker GM=GM_MAX The Auto Analysis statement is used to apply the automatic analysis function to the last test result before this statement.
  • Page 122 Module 9 Modifying Application Test Definitions To Control Test Result Data Outputs Analysis: Data Display Control Data Display: OFF/ON Miscellaneous: Data Store Control Data Store: OFF/ON By the default setting, the results of the tests defined in your test definition are displayed on the Data Display window and are stored to the data record.

  • Page 123: To Use Test Setup Internal Variables

    Module 9 Modifying Application Test Definitions To Use Test Setup Internal Variables From Display Setup screen of Classic Test setup Assign to external variables… Assign to external variables… Internal variable •Local variable •Device parameter •Test parameter •Analysis parameter External Variable Setup From Application Test setup You may want to read the parameters/variables used in Classic Test setup or Application Test setup defined in the Test Contents.
  • Page 124 Module 9 Modifying Application Test Definitions To Use Test Setup Internal Variables Setup example Assign to external variables… This example makes the mapping table between the test setup internal parameters and the analysis parameters. •Define VTH, GM_MAX, VG, ID, and GM as the analysis parameters. •Set these analysis parameters to the display parameters.
  • Page 125 Module 9 Modifying Application Test Definitions To Use Test Setup Internal Variables Result example This is a result example of the test output setup shown in the previous pages. 9-35...
  • Page 126 Module 9 Modifying Application Test Definitions To Use Test Setup Internal Variables Using built-in functions Display parameters of Local Variables Definition the last Data Display window BLOCK IdVg Test setup VG = getVectorData(“Vg”) ID = getVectorData(“Id”) GM = getVectorData(“gm”) GM_MAX = getVectorData(“gmMax”) VTH = getNumericData(“Vth”) Vg, Id, gm, gmMax, and Vth must be the display...
  • Page 127 Module 9 Modifying Application Test Definitions To Use Test Setup Internal Variables Using built-in functions, setup example This example sets the following test flow: Local Variables Definition ! Defiles Yes variable BLOCK Message ! Do you perform Id-Vg measurement? IF Yes=1 IdVg ! Classic test setup for Id-Vg measurement VG=getVectorData(“Vg”) ID=getVectorData(“Id”)
  • Page 128 Module 9 Modifying Application Test Definitions To Use Test Setup Internal Variables Using built-in functions, result example This is a result example of the test output setup shown in the previous pages. 9-38...

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