Agilent Technologies B1500A User Manual page 162

Semiconductor device analyzer
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Specifications
Hardware
WGFMU/RSU
WGFMU: Waveform Generator/Fast Measurement Unit
RSU: Remote-sense and Switch Unit
The WGFMU is a self-contained module offering the combination of arbitrary linear
waveform generation (ALWG) with synchronized fast current or voltage (IV)
measurement. The ALWG function allows you to generate not only DC, but also
various types of AC waveforms. In addition to this versatile sourcing capability, the
WGFMU can also perform measurement in synchronization with the applied
waveform, which enables accurate high-speed IV characterization.
Number of output channels: 2 channels per module
Modes: Fast IV, PG (pulse generator), DC, and SMU pass-through
Measurement functions: See Table 4-17.
Voltage force accuracy, resolution, and timing: See Table 4-18.
Voltage measurement accuracy, resolution and noise: See Table 4-19.
Current measurement accuracy and resolution: See Table 4-20.
RF electromagnetic field and WGFMU measurement accuracy
The voltage and current measurement accuracy and the timing accuracy between
modules may be affected by RF electromagnetic field of strength over 3 V/m at
frequencies 80 MHz to 1 GHz and 1.4 GHz to 2.0 GHz, and 1 V/m at
frequencies 2.0 GHz to 2.7 GHz.
instrument is positioned and shielded.
RSU
Output terminal
Connector: SMA
Source impedance: 50  (nominal), at DC output in PG mode
SMU path
Maximum voltage: ± 25 V
Maximum current: ± 100 mA
V Monitor terminal
Connector: BNC
Source impedance: 50  (nominal), at DC output
4- 30
The extent of this effect depends upon how the
Agilent B1500A User's Guide, Edition 10

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