Agilent Technologies B1500A User Manual page 144

Semiconductor device analyzer
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Table 4-7
Force
Range
resolution
100 V
±2 V
±20 V
1 mV
±40 V
2 mV
±100 V
5 mV
±200 V
10 mV
a. ±(% of output/measured value + offset value in mV)
Table 4-8
Force
Range
resolution
±1 nA
50 fA
±10 nA
500 fA
±100 nA
5 pA
±1 A
50 pA
±10 A
500 pA
±100 A
5 nA
±1 mA
50 nA
±10 mA
500 nA
5 A
±100 mA
50 A
±1 A
a. ±(% of output/measured value + fixed offset in A + proportional offset in A), Vo is the output
voltage in V.
b. 200 V (Io  50 mA), 100 V (50 mA < Io  125 mA), 40 V (125 mA < Io  500 mA),
20 V (500 mA < Io  1 A), Io is the output current.
Specifications
Hardware
Voltage range, resolution, and accuracy (high speed ADC)
Measurement
resolution
100 V
1 mV
2 mV
5 mV
10 mV
Current range, resolution, and accuracy (high speed ADC)
Measurement
Force accuracy ±(%+A+A)
resolution
50 fA
±(0.1+3E-13+Vo1E-15)
500 fA
±(0.1+3E-12+Vo1E-14)
5 pA
±(0.05+3E-11+VoE-13)
50 pA
±(0.05+3E-10+VoE-12)
500 pA
±(0.05+3E-9+Vo1E-11)
5 nA
±(0.035+15E-9+VoE-10)
50 nA
±(0.04+15E-8+Vo1E-9)
500 nA
±(0.04+15E-7+VoE-8)
5 A
±(0.045+15E-6+VoE-7)
50 A
±(0.4+3E-4+VoE-6)
4- 12
Force accuracy
Measurement accuracy
a
±(%+mV)
±(0.018 + 0.4)
±(0.018 + 3)
±(0.018 + 6)
±(0.018 + 15)
±(0.018 + 30)
Measurement accuracy
a
±(0.25+3E-13+Vo1E-15)
±(0.25+2E-12+Vo1E-14)
±(0.1+2E-11+Vo1E-13)
±(0.1+2E-10+Vo1E-12)
±(0.05+2E-9+Vo1E-11)
±(0.05+2E-8+Vo1E-10)
±(0.04+2E-7+Vo1E-9)
±(0.04+2E-6+Vo1E-8)
±(0.1+2E-5+Vo1E-7)
±(0.5+3E-4+Vo1E-6)
Agilent B1500A User's Guide, Edition 10
Maximum
a
current
±(%+mV)
±(0.01 + 0.7)
±(0.01 + 4)
±(0.015 + 8)
500 mA
±(0.02 + 20)
125 mA
±(0.035 + 40)
50 mA
Maximum
a
±(%+A+A)
1 A
1 A
voltage
200 V
200 V
200 V
200 V
200 V
200 V
200 V
200 V
b

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