Agilent Technologies B1500A User Manual page 140

Semiconductor device analyzer
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Table 4-3
Force
Range
resolution
25 V
±0.5 V
100 V
±2 V
250 V
±5 V
±20 V
1 mV
±40 V
2 mV
±100 V
5 mV
a. ±(% of output/measured value + offset value in mV)
b. 100 mA (Vo  20 V), 50 mA (20 V < Vo  40 V), 20 mA (40 V < Vo), Vo is the output voltage.
Table 4-4
Force
Range
resolution
1 fA
b
±1 pA
c
5 fA
±10 pA
5 fA
c
±100 pA
±1 nA
50 fA
±10 nA
500 fA
±100 nA
5 pA
±1 A
50 pA
±10 A
500 pA
±100 A
5 nA
±1 mA
50 nA
±10 mA
500 nA
5 A
±100 mA
a. ±(% of output/measured value + fixed offset in A + proportional offset in A), Vo is the output voltage in V.
b. Available when Agilent E5288A Atto Sense and Switch Unit (ASU) is used.
c. Available for HRSMU.
d. 100 V (Io  20 mA), 40 V (20 mA < Io  50 mA), 20 V (50 mA < Io), Io is the output current.
Specifications
Hardware
Voltage range, resolution, and accuracy (high speed ADC)
Measurement
resolution
25 V
100 V
250 V
1 mV
2 mV
5 mV
Current range, resolution, and accuracy (high speed ADC)
Measurement
Force accuracy ±(%+A+A)
resolution
0.1 fA
1 fA
±(0.46+3E-14+VoE-17)
5 fA
±(0.3+1E-13+VoE-16)
50 fA
±(0.1+3E-13+Vo1E-15)
500 fA
±(0.1+3E-12+Vo1E-14)
5 pA
±(0.05+3E-11+Vo1E-13)
50 pA
±(0.05+3E-10+Vo1E-12)
500 pA
±(0.05+3E-9+Vo1E-11)
5 nA
±(0.035+15E-9+Vo1E-10)
50 nA
±(0.04+15E-8+Vo1E-9)
500 nA
±(0.04+15E-7+Vo1E-8)
5 A
±(0.045+15E-6+Vo1E-7)
4- 8
Force accuracy
a
±(%+mV)
±(0.018 + 0.15)
±(0.018 + 0.4)
±(0.018 + 0.75)
±(0.018 + 3)
±(0.018 + 6)
±(0.018 + 15)
a
±(0.9+15E-15)
Agilent B1500A User's Guide, Edition 10
Measurement accuracy
a
±(%+mV)
±(0.01 + 0.25)
±(0.01 + 0.7)
±(0.01 + 2)
±(0.01 + 4)
±(0.015 + 8)
±(0.02 + 20)
Measurement accuracy
a
±(%+A+A)
±(1.8+12E-15)
±(0.5+15E-15+Vo1E-17)
±(0.5+4E-14+Vo1E-16)
±(0.25+3E-13+Vo1E-15)
±(0.25+2E-12+Vo1E-14)
±(0.1+2E-11+Vo1E-13)
±(0.1+2E-10+Vo1E-12)
±(0.05+2E-9+Vo1E-11)
±(0.05+2E-8+Vo1E-10)
±(0.04+2E-7+Vo1E-9)
±(0.04+2E-6+Vo1E-8)
±(0.1+2E-5+Vo1E-7)
Maximum
current
100 mA
100 mA
100 mA
100 mA
b
Maximum
voltage
100 V
100 V
100 V
100 V
100 V
100 V
100 V
100 V
100 V
100 V
100 V
d

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