Agilent Technologies B1500A User Manual page 154

Semiconductor device analyzer
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Specifications
Hardware
SCUU/GSWU
SCUU: SMU CMU Unify Unit
GSWU: Guard Switch Unit
The SCUU multiplexes the outputs from two SMUs (MPSMUs and/or HRSMUs)
and the CMU. The SCUU outputs are two sets of Kelvin triaxial ports (Force and
Sense). The SCUU also allows the SMUs to act as DC bias sources in conjunction
with the CMU. Special cables are available to connect the SMUs and CMU with the
SCUU, and an auto-detect feature automatically compensates for the cable length
going to the SCUU.
The GSWU contains a relay that automatically opens for IV measurements and
closes for CV measurements, forming a guard return path to improve CV
measurement accuracy.
Supported SMU: MPSMU and HRSMU
SCUU
Inputs
Triaxial port: Force1, Sense1, Force2, and Sense2
BNC port: for MFCMU
Control port: for MFCMU
Outputs
Triaxial port: Force1/CMUH, Sense1, Force2/CMUL, and Sense2
Control port: for GSWU
LED: SMU/CMU output status indicator
Docking mode
Direct and indirect mode
GSWU
Input
Control port: for SCUU
Mini pin plug port: Guard1 and Guard2
Output
LED: Connection status indicator
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Agilent B1500A User's Guide, Edition 10

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