Agilent Technologies B1500A User Manual page 148

Semiconductor device analyzer
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Table 4-9
Measurement
Range
resolution
25 V
b
±0.5 V
100 V
±2 V
250 V
b
±5 V
±20 V
1 mV
a. ±(% of reading + offset value in mV). Averaging is 128 samples in 1 PLC.
b. Available for MPSMU/HRSMU.
c. Available for HPSMU.
Table 4-10
Measurement
Range
resolution
0.1 fA
b
±1 pA
1 fA
c
±10 pA
5 fA
c
±100 pA
±1 nA
50 fA
±10 nA
500 fA
±100 nA
5 pA
±1 A
50 pA
a. ±(% of reading + fixed offset in A + proportional offset in A), Vo is the output voltage in V.
b. Available when Agilent E5288A Atto Sense and Switch Unit (ASU) is used.
c. 10 pA and 100 pA ranges are available for HRSMU with or without ASU.
d. Available for HPSMU.
Specifications
Hardware
Voltage range, resolution, and accuracy (high speed ADC), supplemental
information
Measurement accuracy
a
±(%+mV)
±(0.01 + 0.25)
±(0.01 + 0.7)
±(0.01 + 2)
±(0.01 + 4)
Current range, resolution, and accuracy (high speed ADC), supplemental
information
Measurement accuracy
a
±(%+A+A)
±(1.8+12E-15)
±(0.5+15E-15+Vo1E-17)
±(0.3+3E-14+Vo1E-16)
±(0.1+3E-13+Vo1E-15)
±(0.1+2E-12+Vo1E-14)
±(0.05+2E-11+Vo1E-13)
±(0.05+2E-10+Vo1E-12)
4- 16
Measurement
Range
resolution
±40 V
2 mV
±100 V
5 mV
10 mV
c
±200 V
Measurement
Range
resolution
±10 A
500 pA
±100 A
5 nA
±1 mA
50 nA
±10 mA
500 nA
5 A
±100 mA
50 A
d
±1 A
Agilent B1500A User's Guide, Edition 10
Measurement accuracy
a
±(%+mV)
±(0.015 + 8)
±(0.02 + 20)
±(0.035 + 40)
Measurement accuracy
a
±(%+A+A)
±(0.04+2E-9+Vo1E-11)
±(0.03+2E-8+Vo1E-10)
±(0.03+2E-7+Vo1E-9)
±(0.03+2E-6+Vo1E-8)
±(0.04+2E-5+Vo1E-7)
±(0.4+3E-4+Vo1E-6)

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