Agilent Technologies B1500A User Manual page 10

Semiconductor device analyzer
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High Voltage Shock Hazard
Agilent B1500A can force dangerous voltages (±200 V for HPSMU and ±100 V for
MPSMU/HRSMU) at the force, guard, and sense terminals. To prevent electric
shock hazard, the following safety precautions must be observed during the use of
Agilent B1500A.
Use a three-conductor AC power cable to appliance coupler (inlet) and the
instrument to an electric ground (safety ground).
Prepare shielding box which covers interface to a device under test and equipped
with interlock circuit that opens when the door is opened.
Before performing measurement, connect the interlock circuit to the Interlock
terminal of this instrument.
Confirm periodically that the interlock function works normally.
Before touching the connections of the Force, Guard, and Sense terminals, turn
the instrument off and discharge any capacitors of the measurement path. If you
do not turn the instrument off, complete "all" of the following items, regardless
of any instrument's settings.
Terminate measurement by pressing the Stop key, confirm that the
Measurement status indicator is not lit.
Confirm that the High Voltage indicator is not lit.
Open the shielding box access door (open the Interlock terminal).
Discharge any capacitors if the capacitance is connected to an SMU.
Warn workers in the vicinity of the instrument about hazardous conditions.

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