Agilent Technologies B1500A User Manual page 164

Semiconductor device analyzer
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Table 4-17
Mode
Fast IV
PG
DC
SMU pass
through
Specifications
Hardware
WGFMU supplemental data
RSU SMU path
Leakage current: < 100 pA
Residual resistance: < 300 m
Jitter: < 1 ns
Skew between channels: < 3 ns, under no electrostatic discharge condition
Trigger output skew: < 3 ns
Current range change time: < 150 s
This is the time until the measured current settles within ± 0.3 % of the final
result value after the range change.
Minimum rise/fall time: See Table 4-22. This is the minimum setting value
effective for suppressing overshoot and distortion.
Settling time: See Table 4-23. This is the time until the measured value
settles within ± 0.3 % of the final result value after the output voltage is
changed from the initial value (0 V). Applicable condition: Rise time = 10 ns
Minimum pulse width: See Table 4-24. This is the time until the pulse peak
output value (0 to 5 V) settles within ± 0.3 % of the setup value after the
output voltage is changed from the initial value (0 V). Applicable condition:
Rise time is set to the minimum rise/fall time shown in Table 4-22.
Measurement functions, voltage forcing, voltage measurement, and current
measurement
Function
V force/
I measure,
V force/
V measure
V force/
V measure
V force/
I measure,
V force/
V measure
Measurement
using SMU
4- 32
V force ranges
V measure ranges
-3 V to +3 V,
-5 V to +5 V,
-5 V to +5 V,
-10 V to +10 V
-10 V to 0 V,
0 V to +10 V
-3 V to +3 V,
-5 V to +5 V
-5 V to +5 V
-3 V to +3 V,
-5 V to +5 V,
-5 V to +5 V,
-10 V to +10 V
-10 V to 0 V,
0 V to +10 V
Maximum
± 25 V
Agilent B1500A User's Guide, Edition 10
I measure ranges
1 A, 10 A,
100 A, 1 mA,
10 mA
-
1 A, 10 A,
100 A, 1 mA,
10 mA
Maximum
-
± 100 mA

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