EBARA EV-S20 Instruction Manual page 78

Multi-stage dry vacuum pump ce / semi / nrtl model 200-220v(50/60hz)
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BP:##.## kW
MP:##.## kW
CONTROL:LOCAL
MODE:NORMAL
PUMP RUNNING
HISTORY?
ALARM/WARNING
HISTORY?
EV-S20
***V
&&&&&&&&
OPE.TIME
#### h
BACK PRESSURE
###.# kPa
PUMP N2 FLOW
##.# Pam3/s
CASING TEMP.
### ℃
BP: #.# kmin-1
MP: #.# kmin-1
ALARM:CASING
TEMP.HIGH
PM10U
Power
Control mode: LOCAL, REMOTE
Pump operational mode: NORMAL (rated), S. ENERGY (energy-saving)
PRG.
ENTER
Running history
(Indication of history)
Alarm history
(Indication of history)
ENTER
Pump type Voltage
Pump unit No.
Total operation time
Back Pressure
Pump N2 gas flow
Pump casing
temperature
Motor speed
1
ALARM/WARNING
MP START/STOP
HISTORY
BP START/STOP
HISTORY
ALARM:CASING
TEMP.HIGH
WARNING:BP MOTOR
TEMP.HIGH
How to read the alarm history
Alarm 1st code
History No.
(The lower number. is newer.)
002 51 00
020901 12:25:26
Occurrence date
Fig. 5.2 Key operation for the pump
operation status display screen
PRG.
001MP START
ENTER
070101 12:00:00
PRG.
001BP1 STOP
ENTER
070101 12:00:00
001BP1 START
070101 12:00:00
001 06
00 ####
ENTER
020901 12:23:21
002 51
00 ####
ENTER
020901 12:25:26
Alarm 2nd code
Analog value
####
EBARA
P.59
CORPORATION

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