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EV-S100N
EBARA EV-S100N Manuals
Manuals and User Guides for EBARA EV-S100N. We have
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EBARA EV-S100N manual available for free PDF download: Instruction Manual
EBARA EV-S100N Instruction Manual (113 pages)
MULTI-STAGE DRY VACUUM PUMP CE / SEMI / NRTL MODEL 200-220V(50/60Hz)
Brand:
EBARA
| Category:
Water Pump
| Size: 2.5 MB
Table of Contents
Safety Information
4
Important Prior Warnings
5
Safety Interlocks
12
Standard Limited Warranty
15
Table of Contents
17
1 Foreword
20
2 Introduction
20
Environmental Concerns
21
3 Product Description
22
Outline
22
Pump Module
22
Gas (MODEL EV-S**P / MODEL EV-S**N)
22
Cooling Water
23
Exhaust
23
Control System
23
Warning
23
Operation Status Control
24
The Way of Pump Moving
24
Preparation
24
Moving Method
25
Release and Shut off Residual Internal Energy
26
Electrical Power - Lockout and Tagout
26
Cooling Water
27
Nitrogen (N )
27
Returning to Service
27
Detailed Specifications
28
Model Description
28
Model Spectications
29
Outline Drawing
33
Model Ev-S20 Outline Drawing
33
Model Ev-S20P / Ev-S 20N Outline Drawing
34
Model Ev-S50 Outline Drawing
35
Model Ev-S50P / Ev-S50N Outline Drawing
36
Model Ev-S100 Outline Drawing
37
Model Ev-S100P / Ev-S 100N Outline Drawing
38
Model Ev-S200 Outline Drawing
39
Model Ev-S200P / Ev-S 200N Outline Drawing
40
Model Ev-S20 Outline Drawing(Option
41
Model Ev-S20P / Ev-S 20N Outline Drawing(Option)
42
Model Ev-S50 Outline Drawing(Option)
43
Model Ev-S50P / Ev-S50N Outline Drawing(Option)
44
Model Ev-S100 Outline Drawing(Option)
45
Model Ev-S100P / Ev-S 100N Outline Drawing(Option)
46
Model Ev-S200 Outline Drawing(Option)
47
Model Ev-S200P / Ev-S 200N Outline Drawing(Option)
48
Performance Curve
49
4 Installation
52
Movement and Fixation
52
Location
52
Caster and Adjustment Foot
52
How to Stack Pumps
53
Pump Fixation (Option)
55
Piping
60
Vacuum and Exhaust Piping
60
Cooling Water Piping
61
N 2 Gas Piping
62
Ventilation Duct(Model EV-S***N / MODEL EV-S***P
63
Electrical Wiring
64
Power Supply Wiring
65
Control Signal Wiring
68
Emergency Stop Switch Box (EMS Switch Box) - Optional
72
Safety Interlock Connector (Connector EXT.IL)
74
Power Supply for the Options (Connector CN-C)
74
5 LCD Controller
75
LCD Outline
75
LCD Indication
76
Setting the Operational Mode
80
Setting the Pump Operation Control Mode
82
Setting the DIP Switch
82
Setting the Pump Running Mode
83
Setting the Rotational Speed in the Normal Mode
83
Setting the Rotational Speed in the S. ENERGY Mode
84
Setting the Pump N2 Flow Low Warning Threshold
84
Setting the Back Pressure High Warning Threshold
85
Dip Switch
86
DIP Switch Setting Display
89
Starting/Stopping the Pump with the LCD Controller
90
6 Operation
91
Before Starting
91
Start/Stop
94
LOCAL (Pump Side) Start/Stop
96
REMOTE Start/Stop
96
COMMUNICATION Start/Stop
97
Operation When Momentarily Power Failure Happens
97
7 Maintenance and Inspection
98
Internal Energies
98
Power Source
98
Cooling Water
98
Nitrogen Gas
98
Routine Inspection
99
Vacuum and Exhaust Piping
100
Lubricating Oil
102
Spare (Maintenance) Parts List
104
List of Wastes During Maintenance
105
Overhaul
105
8 Disconnection and Transportation
106
9 For SEMI S2 Standard
108
10 Troubleshooting
109
Troubleshooting (1) Basic Trouble
110
Troubleshooting (2) WARNING
111
Troubleshooting (3) ALARM
112
Troubleshooting (4) Option
113
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