EBARA EV-S20 Instruction Manual page 51

Power
P&N
N Gas
2
Water
* The MODEL EV-S20 pump is supplied without a booster pump (BP).
PM10U
Control
Connector
Circuit
Control Circuit
Protector
Motor Driver 1
Motor Driver 2
Pressure Gauge
P
Pump N Gas Flow Sensor
2
FT1
N
Regulator 2
FT2
Cooling Water Flow Seneor
Figure 3.5 System Flow
LCD Controller
Gas Inlet
Selector Valve
Booster Pump
（ＢＰ）
Main Pump
（ＭＰ）
Check Valve
P.32
Motor 2
Gas Outlet
Motor 1
Silencer
EBARA
CORPORATION