Model Spectications - EBARA EV-S20 Instruction Manual

3.5.2 Model Spectications

Table 3.1 Specifications (Model EV-S20 / EV-S20P / EV-S20N)
Pumping Speed
Ultimate Pressure
Connection
Approx. Power at Ultimate
Pressure
(Max. Power)
Cooling
Water
Utility
N2
Gas
Duct
Venti-
Lation
Lubrication
Oil
Approx. Weight
Power
Supply
Control Signal
Communication
CP Rating
Airborne noise test data
Max inlet pressure / Flow Rate (N
(for reference)
[Note] The ambient temperature of the pump installation place shall be 30 degrees of
centigrade of lower.
PM10U
Model
Gas Inlet
Gas Outlet
Connection
Pressure
[Gauge Press.]
Flow Rate
Temperature
Connection
Pressure
[Gauge Press.]
Approx. Flow Rate
[N2-0 Mode]
Connection
Pressure
Approx. Flow Rate
Brand
Quantity
Phase/Volt/Freq.
Power Capacity
Connection
SCCR
)
2
Model Model
EV-S20 EV-S20P
1670 L/min
3.0 Pa
0.4 kW
(2.2 kW)
Rc 1/4" (Coupler)
Differential Press.: Min. 0.2 MPa
Supply: Max. 0.4 MPa
1.5 - 3.0 L/min
Max. 30°C
---------- 1/4" Tube Fitting (Same as SWAGELOK)
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BARRIERTA J100ES (NOK)
3 Phase, 200-220V , 50 / 60Hz
3.2 kVA
Amphenol
C016 20C003 100 12
D-sub 15 Pin + D-sub 25 Pin
RS-232C D-sub 9 Pin X 2
4.2kPa / 60L/min
Model
EV-S20N
5.0 Pa
NW50
NW25
Supply: 0.15 - 0.7 MPa
[Setting: 0.09 - 0.012 MPa]
3
17 - 20 Pa m /s
3
[2.4 Pa m /s]
Φ50 mm
-196 Pa
3
0.5 m /min
0.05 L
60 kg
15 A
1.0 kA
57 dB
2.7kPa / 40L/min
EBARA
P.10
CORPORATION