EBARA EV-S20 Instruction Manual page 79

ALARM name
MP casing temp.
BP motor temp.
MP motor temp.
Water Leakage (▲)
Emergency Stop(▲)
Back pressure high (▲)
Power failure
MP's driver protective circuit activated (OC)
MP's driver protective circuit activated (OV)
MP's driver protective circuit activated (OH1)
MP's driver protective circuit activated (OH2)
MP's driver protective circuit activated (CPF)
BP's driver protective circuit activated (OC)
BP's driver protective circuit activated (OV)
BP's driver protective circuit activated (OH1)
BP's driver protective circuit activated (OH2)
BP's driver protective circuit activated (CPF)
BP overload 2
MP overload 2
BP step out
MP step out
Cooling water flow low
Motor thermostat
Inner communication error (MP driver)
Inner communication error (IO)
Inner communication error (BP driver)
MP Driver Gate OFF
BP Driver Gate OFF
PM10U
Table 5.2 Alarm code list
Code
1st 2nd
WARNING name
code code
50 01 Cooling water flow low
51 00 MP casing temp.
52 00 High board inner temp.
53 00 Pump N2 flow low
59 00 Back pressure high (▲)
63 00 Back pressure wire broke (▲)
64 00 BP motor temp.
01 MP motor temp.
02 Inner communication error (MP driver)
65 04 Inner communication error (BP driver)
05 Inner communication error (IO)
06 Inner communication error (AI) (▲)
01
02
66 04
05
06
67 00
68 00
69 00
70 00
73 00
00
01
02
81
03
20
21
The mark "▲" indicates the item is optional.
EBARA
P.60
Code
1st
2nd
cod
code
e
00 01
05 01
13 00
18 01
01
21
02
23 00
24 00
01
02
26
03
04
CORPORATION