Table Of Contents - EBARA EV-S20 Instruction Manual

Environmental Basic Policies ........................................................................... i
Safety Information ............................................................................................ ii
Important Prior Warnings................................................................................ iii
Safety Interlocks ............................................................................................... x
Standard Limited Warranty ........................................................................... xiii
Contents .......................................................................................................... xv
1. Foreword ..................................................................................................... 1
2. Introduction ................................................................................................ 1
2.1 Introduction .......................................................................................... 1
2.2 Environmental Concerns ..................................................................... 2
3. Product Description ................................................................................... 3
3.1 Outline................................................................................................... 3
3.1.1 Pump Module ................................................................................ 3
3.1.2 N
3.1.3 Cooling Water ............................................................................... 4
3.1.4 Exhaust .......................................................................................... 4
3.2 Control System .................................................................................... 4
3.2.1 Warning ......................................................................................... 4
3.2.2 Operation Status Control ............................................................. 5
3.3 The way of pump moving .................................................................... 5
3.3.1 Preparation .................................................................................... 5
3.3.2 Moving method ............................................................................. 6
3.4 Release and shut off residual internal energy ................................... 7
3.4.1 Electrical Power - Lockout and Tagout ....................................... 7
3.4.2 Cooling water ................................................................................ 8
3.4.3 Nitrogen (N
3.4.4 Returning to Service ..................................................................... 8
3.5 Detailed Specifications ........................................................................ 9
3.5.1 Model Description ......................................................................... 9
3.5.2 Model Spectications .................................................................... 10
3.5.3 Outline Drawing ........................................................................... 14
MODEL EV-S20 OUTLINE DRAWING .................................................... 14
MODEL EV-S20P / EV-S 20N OUTLINE DRAWING ............................... 15
MODEL EV-S50 OUTLINE DRAWING .................................................... 16
MODEL EV-S50P / EV-S50N OUTLINE DRAWING ................................ 17
MODEL EV-S100 OUTLINE DRAWING .................................................. 18
PM10U
Contents
Gas (MODEL EV-S**P / MODEL EV-S**N) ............................... 3
2
) .................................................................................. 8
2
xv
（ ）
EBARA
CORPORATION