EBARA EV-S100P Manuals

Manuals and User Guides for EBARA EV-S100P. We have 1 EBARA EV-S100P manual available for free PDF download: Instruction Manual

EBARA EV-S100P Instruction Manual

EBARA EV-S100P Instruction Manual (113 pages)

MULTI-STAGE DRY VACUUM PUMP CE / SEMI / NRTL MODEL 200-220V(50/60Hz)

Brand: EBARA | Category: Water Pump | Size: 2 MB

Table of Contents

Safety Information

4
Important Prior Warnings

5
Safety Interlocks

12
Standard Limited Warranty

15
- Table of Contents
  17
1 Foreword

20
2 Introduction

20
- Environmental Concerns
  21
3 Product Description

22
- Outline
  22
  - Pump Module
    22
  - Gas (MODEL EV-S**P / MODEL EV-S**N)
    22
  - Cooling Water
    23
  - Exhaust
    23
- Control System
  23
  - Warning
    23
  - Operation Status Control
    24
- The Way of Pump Moving
  24
  - Preparation
    24
  - Moving Method
    25
- Release and Shut off Residual Internal Energy
  26
  - Electrical Power - Lockout and Tagout
    26
  - Cooling Water
    27
  - Nitrogen (N )
    27
  - Returning to Service
    27
- Detailed Specifications
  28
4 Installation

52
- Movement and Fixation
  52
  - Location
    52
  - Caster and Adjustment Foot
    52
  - How to Stack Pumps
    53
  - Pump Fixation (Option)
    55
- Piping
  60
- Electrical Wiring
  64
- Safety Interlock Connector (Connector EXT.IL)
  74
- Power Supply for the Options (Connector CN-C)
  74
5 LCD Controller

75
6 Operation

91
- Before Starting
  91
- Start/Stop
  94
  - LOCAL (Pump Side) Start/Stop
    96
  - REMOTE Start/Stop
    96
  - COMMUNICATION Start/Stop
    97
- Operation When Momentarily Power Failure Happens
  97
7 Maintenance and Inspection

98
- Internal Energies
  98
  - Power Source
    98
  - Cooling Water
    98
  - Nitrogen Gas
    98
- Routine Inspection
  99
- Vacuum and Exhaust Piping
  100
- Lubricating Oil
  102
- Spare (Maintenance) Parts List
  104
- List of Wastes During Maintenance
  105
- Overhaul
  105
8 Disconnection and Transportation

106
9 For SEMI S2 Standard

108
10 Troubleshooting

109
- Troubleshooting (1) Basic Trouble
  110
- Troubleshooting (2) WARNING
  111
- Troubleshooting (3) ALARM
  112
- Troubleshooting (4) Option
  113

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