EBARA EV-S20 Instruction Manual page 69

Pin. No. Signal name
1 MP START (+)
2 BP START (+)
3 MP START STATUS (+)
4 BP START STATUS (+)
5 WARNING STATUS (+)
6 ALARM STATUS (+)
7 REMOTE STATUS (+)
−
8
9 MP START (−)
10 BP START (−)
11 MP START STATUS (−)
12 BP START STATUS (−)
13 WARNING STATUS (−)
14 ALARM STATUS (−)
15 REMOTE STATUS (−)
PM10U
8 1
15 9
Fig. 4.6
15 Pin D Sub-Miniature Female Receptacle
(As seen from connecting side)
Table 4.7 Control Connector Pin Assignment
(CN-Z: In accordance with SEMI-E73)
Screw lock size: M2.6
Contact pin surface: Au
I/O Signal type
IN Run:CLOSE, Alternate
IN Run:CLOSE, Alternate
OUT Run:CLOSE, Alternate
OUT Run:CLOSE, Alternate
OUT WARNING:OPEN, Alternate
OUT ALARM:OPEN, Alternate
OUT REMOTE: CLOSE
P.50
EBARA
CORPORATION