For Semi S2 Standard - EBARA EV-S20 Instruction Manual

9. For SEMI S2 standard

Additional electrical parts required for SEMI application are shown in Table 9.1. The
process tool panel may provide these items or they may appear in an auxiliary control
panel mounted on the pump or remotely.
Parts name
CB
(Circuit Breaker)
EMO
(Emergency Off)
Safty Interlock
Pump Fixation
PM10U
Table 9.1 Necessary parts for SEMI S2 standard
Please use CB of 10 kA or more in the breaking
current capacity. (UL489 corresponding)
Please select it based on the law and the standard of
installation features.
Please intercept the power supply of the pump when
EMO operates. Optional EMS Switch Button can be
used as EMO Button with External CB and Magnetic
Switch.
Hard interlock signal is output as the final safty
protection by EXT.IL connector.
Please intercept the power supply of the pump when
Hard interlock signal is open.
Pump side Circuit
ＥXT.IL 100mA Max.
(N.C)
Dry Contact
Please fix the pump to the floor or other firm ground
with the brackets at the installation.
Conditions
Customer's connection
4VDC-27VDC
EBARA
P.89
CORPORATION