5.4 Dip Switch ........................................................................................... 67
6. Operation .................................................................................................. 72
6.1 Before Starting ................................................................................... 72
6.2 START/STOP ...................................................................................... 75
7.1 Internal energies ................................................................................ 79
7.1.1 Power source .............................................................................. 79
7.1.2 Cooling water .............................................................................. 79
7.1.3 Nitrogen gas ................................................................................ 79
7.4 Lubricating Oil .................................................................................... 83
7.7 Overhaul ............................................................................................. 86
10. Troubleshooting ..................................................................................... 90
PM10U
xvii
(
EBARA
CORPORATION
)