EBARA EV-S20 Instruction Manual page 18

MODEL EV-S100P / EV-S 100N OUTLINE DRAWING ........................... 19
MODEL EV-S200 OUTLINE DRAWING .................................................. 20
MODEL EV-S200P / EV-S 200N OUTLINE DRAWING ........................... 21
MODEL EV-S20 OUTLINE DRAWING（OPTION） ................................... 22
MODEL EV-S20P / EV-S 20N OUTLINE DRAWING(OPTION) ............... 23
MODEL EV-S50 OUTLINE DRAWING(OPTION) .................................... 24
MODEL EV-S50P / EV-S50N OUTLINE DRAWING(OPTION)................ 25
MODEL EV-S100 OUTLINE DRAWING(OPTION) .................................. 26
MODEL EV-S100P / EV-S 100N OUTLINE DRAWING(OPTION) ........... 27
MODEL EV-S200 OUTLINE DRAWING(OPTION) .................................. 28
MODEL EV-S200P / EV-S 200N OUTLINE DRAWING(OPTION) ........... 29
3.5.4 Performance Curve ....................................................................... 30
4. Installation ................................................................................................ 33
4.1 Movement and Fixation ..................................................................... 33
4.1.1 Location ....................................................................................... 33
4.1.2 Caster and adjustment foot ....................................................... 33
4.1.3 How to stack pumps ................................................................... 34
4.1.4 Pump Fixation (Option) .............................................................. 36
4.2 Piping .................................................................................................. 41
4.2.1 Vacuum and Exhaust Piping ...................................................... 41
4.2.2 Cooling Water Piping.................................................................. 42
4.2.3 N
4.2.4 Ventilation Duct（MODEL EV-S***N / MODEL EV-S***P） ........... 44
4.3 Electrical Wiring ................................................................................. 45
4.3.1 Power Supply Wiring .................................................................. 46
4.3.2 Control Signal Wiring ................................................................. 49
4.3.3 Emergency Stop Switch Box (EMS Switch Box) - Optional ... 53
4.4 Safety interlock Connector (Connector EXT.IL) .............................. 55
4.5 Power Supply for the Options (Connector CN-C) ........................... 55
5. LCD Controller .......................................................................................... 56
5.1 LCD Outline ........................................................................................ 56
5.2 LCD Indication .................................................................................... 57
5.3 Setting the operational mode ............................................................ 61
5.3.1 Setting the pump operation control mode ................................ 63
5.3.2 Setting the DIP switch ................................................................ 63
5.3.3 Setting the pump running mode ................................................ 64
5.3.4 Setting the rotational speed in the Normal mode .................... 64
5.3.5 Setting the rotational speed in the S. ENERGY mode ............. 65
PM10U
Gas Piping .............................................................................. 43
2
xvi
（
EBARA
CORPORATION
）