Configuration Examples For Lateral Device Measurement With Wafer Prober - Keysight Technologies B1505A Configuration Manual

Configuration Examples for Lateral Device
Measurement with Wafer Prober
This section introduces typical configuration examples for lateral device measurement with
wafer prober shown in
Table 7-12 Configuration examples
Device Max V
Lateral 4 3 kV
terminal
on-wafer
device
3 kV
3 kV
3 kV
3 kV
3 kV
3 kV
10 kV
Keysight B1505A Configuration and Connection Guide

Configuration Examples for Lateral Device Measurement with Wafer Prober

Table 7-12.
Max I HVMC C-V
20 A
20 A YES
20 A
40 A
500 A
500 A YES
500 A YES
500 A
Connection and Ordering Examples
Add
MPSMU
"3 kV, 20 A Measurement for
On-Wafer Lateral Device" on page
7-26
"3 kV, 20 A, Capacitance Measurement
for On-Wafer Lateral Device" on page
7-30
YES "Add High Resolution Measurement
(10 fA resolution with MPSMU or
HPSMU) Capability to 3 kV, 20 A,
Capacitance Measurement for
On-Wafer Lateral Device" on page
7-33
"3 kV, 40 A Measurement for
On-Wafer Lateral Device" on page
7-35
"3 kV, 500 A Measurement for
On-Wafer Lateral Device" on page
7-38
"3 kV, 500 A, Capacitance
Measurement for On-Wafer Lateral
Device" on page 7-40
"3 kV, 500 A, High Voltage Medium
Current Measurement for On-Wafer
Lateral Device" on page 7-42
"10 kV, 500 A Measurement for
On-Wafer Lateral Device" on page
7-44
Note
7-25