Table of Contents
Advertisement
Table 5-5
To Make UHC Measurement Path
N1265A
*6
N1266A
B1505A
*5
*1: 1252-1419
*2: N1254A-523
*3: N1254A-506
*4: N1254A-503
*5: 16494A, 6 ea., 16493L, and 16493G
(needs more cables for using HVSMU/HVMCU
or HP/MPSMU through selector of N1265A .)
B1505A terminals
1
Force
16494A Triaxial cable, 1.5 m, 1 ea.
MCSMU
Sense
16494A Triaxial cable, 1.5 m, 1 ea.
1
Force
16494A Triaxial cable, 1.5 m, 1 ea.
MCSMU
Sense
16494A Triaxial cable, 1.5 m, 1 ea.
1
Force
16494A Triaxial cable, 1.5 m, 1 ea.
MCSMU
Sense
16494A Triaxial cable, 1.5 m, 1 ea.
16493L GNDU cable, 1.5 m, 1 ea. Also see
GNDU
Digital I/O
16493G Digital I/O cable, 1.5 m, 1 ea. Also see
Terminals
Low Force
Cable with banana connector. N1254A-523 can be used.
Low Sense
Coaxial cable with BNC(m) connector. N1254A-503 can be used.
High Force
Cable with banana connector. N1254A-523 can be used.
High Sense
Triaxial cable with HV(plug) connector. N1254A-505 can be used.
Gate
Coaxial cable with BNC(m) connector. N1254A-503 can be used.
LINE
Power cable, 1 ea., for connecting to power line
Earth
Wire, 1 ea., for earthing
B1505A Interlock
16493J Interlock cable, 3 m or 1.5 m, 1 ea., and 1252-1419
Interlock connector, 1 ea.
1. HCSMU is substitutable. Then use 16493S HCSMU cable, N1254A-103 adapter for Force, and
N1254A-517 adapter for Sense.
2. Non-Kelvin connection is not allowed. GNDU Sense is internally connected to Low Sense.
Keysight B1505A Configuration and Connection Guide
*6: 16494A, 4 ea., 16493L, 16493T, and 16493G to configure HVMCU.
16493J
*1
Interlock circuit
N1254A-524
Required cables
Required cables/Description
Connection Guide for Wafer Prober and Your Own Test Fixture
Force *2
Sense
*3
High
*4
Gate
Low
Table
5-2.
Table
5-2.
Connection Overview
Shielding box
DUT interface
*2
Force
*4
Sense
N1265A terminals
UHC
Force
Input
Sense
I Control
UHC
Force
Input
Sense
V Control
Gate
Force
Sense
GNDU
Digital I/O Input
Connect to
DUT low terminal
2
(ex: source)
DUT high terminal
2
(ex: drain)
DUT gate or base
site AC power
site ground
Interlock circuit
5-9
Hide quick links:
Advertisement
Table of Contents
