10 Kv, 500 A Measurement For On-Wafer Lateral Device - Keysight Technologies B1505A Configuration Manual

Connection and Ordering Examples
Configuration Examples for Lateral Device Measurement with Wafer Prober

10 kV, 500 A Measurement for On-Wafer Lateral Device

•
•
Figure 7-23 Connection example
16493J Interlock cable
(Included in B1505A)
16493G-001 Digital I/O cable
(Included in N1265A)
B1505A
F
F
MC
For N1268A MCSMU
S
S
F
F
MC
For N1268A MCSMU
S
S
F
For N1265A F
MC
MCSMU
S
S
For N1265A F
F
MC
MCSMU
S
/ Chuck S
F
MCSMU
For Gate
S
GNDU
NOTE
When using the N1268A, P1 to P4 terminals need to be connected to Gate, Source, Chuck
and Drain respectively, instead of the connection shown in
NOTE
Prober vendor is responsible for cabling inside the shielding box.
Table 7-21 Required equipment, accessories, and cables
Model/Option Quantity
B1505A
B1514A-FG
16493V
16493V-002
N1265A
N1265A-001
N1268A
7-44
Device Type: Lateral MOSFET (4 terminals)
Key Specification
• Max voltage/current: 10 kV/500 A
N1268A UHV Exp
16493G-001 Digital I/O control cable (Included in N1265A)
16494A (Included in the MCSMU)
16494A (Included in the MCSMU)
16493L (Included in B1505A)
1 Power Device Analyzer/Curve Tracer mainframe
5 Medium Current Source Monitor Unit, 1 A/30 V(Pulsed), 100 mA/30 V(DC)
1 10 kV Ultra High Voltage Cable
1 10 kV Ultra High Voltage Cable (3.0 m)
1 Ultra High Current Expander/Fixture
1 Ultra High Current Expander/Fixture
1 Ultra High Voltage Expander
16493J-001 Interlock cable (Included in N1268A)
16493V-002 (3m cable)
N1269A
UHV Low
P1
Gate
Gate MCSMU F
Gate MCSMU S
Source P2
Chuck MCSMU F
P3
Chuck
Chuck MCSMU S
UHC Input
V Control
I Control
Gate F
Gate S
GNDU
Description
Keysight B1505A Configuration and Connection Guide
N1254A-521
P4
N1265A
To D
N1254A-524
Selector
Output
High
Low
HF
D
LF
Gate
HS G
LS
Chuck
G
ate
S
To S
To G
P1
P2
To Chuck
P3
Figure 7-23.