Add High Resolution Measurement (10 Fa Resolution With Mpsmu Or Hpsmu) Capability To 3 Kv, 20 A, Capacitance Measurement For On-Wafer Vertical Device - Keysight Technologies B1505A Configuration Manual

Connection and Ordering Examples
Configuration Examples for Vertical Device Measurement with Wafer Prober
Add High Resolution Measurement (10 fA resolution with
MPSMU or HPSMU) Capability to 3 kV, 20 A, Capacitance
Measurement for On-Wafer Vertical Device
•
•
Figure 7-28 Connection example
16493G-001 Digital I/O cable (Included in N1258A)
B1505A
HVSMU
For Drain
F
For Drain
HCSMU
S
F
MPSMU
For Drain
S
F
MCSMU
16494A (Included in the MCSMU)
For Gate
S
GNDU
16493J-001 Interlock cable
NOTE
Prober vendor is responsible for cabling inside the shielding box.
7-54
Device Type: Vertical MOSFET (3 terminals)
Key Specification
• Max voltage/current: 3 kV/20 A
• Drain leakage current down to 10 fA
• Module Selector for multi-parameter automated measurement function
16493T (Included in the HVSMU)
16493S (Included in the HCSMU)
16494A (Included in the MPSMU)
16493L (Included in B1505A)
N1254A-104 TRX(J) to BNC(P) adapter
HCSMU Non-
Kelvin adapter
16493S-011
Digital I/O
HVSMU
High F
High S
HCSMU F
HCSMU S
HPSMU F
HPSMU S
N1258A
Low F
Low S
GNDU
R-Box
1kO
N1262 A-010
16494A-003
16493U-001
1250-2405
Keysight B1505A Configuration and Connection Guide
D
(Chuck)
G
S