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PNA Series Microwave Network Analyzer System
N5251A
Figure 2-2
Coaxial Measurement Configuration, 2-Port System
Wafer Probe Measurement
In this configuration, the test head modules are placed on X-Y-Z positioners that are mounted
to the wafer probe station. Each 1.0 mm test port is directly connected to a wafer probe.
assembly via a coaxial cable.
The wafer probe measurement configuration is not documented in this manual.
For information about probing equipment and accessories, contact:
Cascade Microtech, Inc.
9100 SW Gemini Drive
Beaverton, Oregon 97008,USA
Toll-free telephone: (800) 550-3279
For additional information on DUT bias connections, refer to
Figure 4-1 on page
4-5, and
Installation and Service Guide N5251-90001
Telephone: (503) 601-1000
Fax: (503) 601-1002
Web site:
www.cascademicrotech.com
Figure 4-2 on page
4-6.
System Description
Basic System Measurement Configurations
Table 4-4 on page
4-4,
2-5
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