Page 1 Keysight Technologies B1505A Power Device Analyzer/Curve Tracer Configuration and Connection Guide...
Page 2 Edition 6, September 2012 clause. Use, duplication or disclosure of Soft- Edition 7, April 2013 ware is subject to Keysight Technologies’ Edition 8, September 2015 standard commercial license terms, and non- Edition 9, November 2015 DOD Departments and Agencies of the U.S.
Page 4 Configuration Guide Describes how to configure the B1505A. N1259A Connection Guide Describes how to connect the B1505A, the N1259A Test Fixture, and a device under test (DUT). N1265A Connection Guide Describes how to connect the B1505A, the N1265A Test Fixture, and a device under test (DUT).
Page 5: Table Of Contents
B1505A Mainframe Furnished Accessories........1-5...
Page 6 To Connect High Voltage Bias Tee......... . . 5-25 Keysight B1505A Configuration and Connection Guide...
Page 7 3 kV, 20 A Measurement for On-Wafer Lateral Device......7-26 Keysight B1505A Configuration and Connection Guide...
Page 8 Example of how to upgrade existing B1505A ....... . 7-76...
Page 9: Configuration Guide
Configuration Guide...
Page 10 Please specify the B1505A’s module configuration and accessories you desire properly. This chapter is a guide for configuring your B1505A system, and consists of the following sections. •...
Page 11: Measurement Resources
Configuration Guide Measurement Resources Measurement Resources Keysight B1505A can be equipped with the following measurement resources. • “HPSMU - High Power SMU” • “HCSMU - High Current SMU” • “HVSMU - High Voltage SMU” • “MPSMU - Medium Power SMU”...
Page 12 HCSMU and a B1514A MCSMU Multi Frequency CMU B1520A MFCMU • 1 kHz to 5 MHz 0 to ±25 V using internal DC bias • • 0 to± 3000 V using HVSMU and High Voltage Bias-Tee Keysight B1505A Configuration and Connection Guide...
Page 13: B1505A Mainframe Furnished Accessories
The label is used to specify the SMU number. Only for the B1505A installed with SMU. Power cable 1. Cable length 1.5 m or 3.0 m is specified by B1505A cable length option (B1505A-015 or -030). Keysight B1505A Configuration and Connection Guide...
Page 14 16493T HVSMU cable, for HVSMU 1 ea./ module 16493S HCSMU cable, for HCSMU 1 ea./ module 16493S-010 HCSMU Kelvin adapter, for HCSMU 1 ea./ module N1300A CMU cable, for MFCMU 1 ea./ module Keysight B1505A Configuration and Connection Guide...
Page 15: B1505A Modules And Mainframe Options
B1505A Modules and Mainframe Options B1505A Modules and Mainframe Options The B1505A can contain several combinations of modules; up to four dual-slot HPSMU modules, up to ten MPSMU, up to two dual-slot HCSMU modules, up to five dual-slot HVSMU, up to six MCSMU and one single-slot MFCMU.
Page 16 Cable length 1.5 m or 3.0 m is specified by option 015 or 030. • Up to one modules can be installed. Specify the cable length (mandatory) 1.5m cable • Same cable length is applied to all furnished cables. 3.0m cable Keysight B1505A Configuration and Connection Guide...
Page 17: Module Type And Locations
For example, if the module configuration is one MFCMU, three MCSMUs, one HCSMU and one HVSMU, the B1505A will be shipped with the MFCMU of the slot 1, the MCSMUs of the slot 2 to 4, the HCSMU of the slot 5 to 6, the HVSMU of the slot 7 to 8, and the blank panels of the slot 9 to 10.
Page 18 B1510A High Power SMU (HPSMU) bottom GNDU/ADC (Always installed) NOTE After module installation at Keysight Service Center, the B1505A will be returned with the module configuration defined by the rule shown in the Table 1-6. If you want to change the module locations, consult the service personnel before servicing.
Page 19: N1259A Test Fixture For Power Device
Kelvin socket module for inline package device (N1259A-010), four black connection wires (N1259A-509) and six red connection wires (N1259A-508). • The N1259A-001 has a built-in GNDU protection adapter and a built-in HPSMU protection adapter inside. Keysight B1505A Configuration and Connection Guide 1-11...
Page 20 N1259A-013 Curve tracer test adapter socket module • The N1259A-013 is the same as the N1265A-013 Curve Tracer Test Adapter Socket Module. • Maximum voltage and current is 3 kV and 500 A. 1-12 Keysight B1505A Configuration and Connection Guide...
Page 21 1 k R-box N1259A-035 Universal R-box N1259A-300 Module Selector • Furnished with a 1.5 m digital I/O control cable (16493G-001), maximum 35VA • The N1259A-300 is a built-in and factory-installed option for the N1259A-001. Keysight B1505A Configuration and Connection Guide 1-13...
Page 22 Cable lug adapter, black 1 ea. and red 1ea. N1254A-512 SHV to SHV cable 350 mm, 1 ea. • The N1259A-020 High Voltage Bias-tee is furnished with two N1254A-512 cables. • The N1254A-513 adapter is required to connect the banana plug. 1-14 Keysight B1505A Configuration and Connection Guide...
Page 23 The N1259A-300 Module Selector option is furnished with a 16493G-001 cable. 16493G-002 Digital I/O control cable (3.0 m) • Cable length 1.5 m or 3.0 m can be specified by option 001 or 002. Keysight B1505A Configuration and Connection Guide 1-15...
Page 24 N1259A-001 test fixture later. For upgrade kit, please refer to "Upgrade Kit for N1259AU Test Fixture" on page 1-65. Keysight Technologies service center is responsible for N1259AU-020 and N1259AU-300 installation. 1-16 Keysight B1505A Configuration and Connection Guide...
Page 25: N1265A Ultra High Current Expander/Fixture
N1265A Ultra High Current Expander/Fixture N1265A Ultra High Current Expander/Fixture The N1265A expands the B1505A’s current capability up to 1500 A. Current expansion is made using the Ultra High Current Unit (UHCU), which is comprised of a current expander in the N1265A and two MCSMUs which are connected to I/V control ports of the N1265A.
Page 26 N1265A-013 Curve tracer test adapter socket module • The N1265A-013 is the same as the N1259A-013 Curve Tracer Test Adapter Socket Module. • Maximum voltage and current is 3 kV and 500 A. 1-18 Keysight B1505A Configuration and Connection Guide...
Page 27 N1265A-015 1500 A Current Option • 1500 A upgrade can be made later by ordering a B1505AU-015 1500 A upgrade kit. N1265A-035 Universal R-Box • A desired register can be installed by soldering. Keysight B1505A Configuration and Connection Guide 1-19...
Page 28 An N1260A High Voltage Bias-tee and N1261A Protection Adapters can be placed in this container to avoid messy cabling. Calibration options N1265A-A6J ANSI Z540 compliant calibration N1265A-UK6 Commercial cal. Certificate with test data Connection accessories inside the N1265A 1-20 Keysight B1505A Configuration and Connection Guide...
Page 29 1500 A Ultra High Current Banana to Banana • Max voltage and current are 3 kV and Cable, 2 ea. 1500 A. • The N1265A-010 500 A Ultra High Current 3-pin Inline Package Socket Module is furnished with these cables. Keysight B1505A Configuration and Connection Guide 1-21...
Page 30 The N1260A High Voltage Bias-Tee is not furnished with any cables. N1254A-512 SHV to SHV cable 350mm, 1 ea. • The N1254A-513 SHV Jack to Banana Adapter is required to connect a banana plug. 1-22 Keysight B1505A Configuration and Connection Guide...
Page 31 • This adapter is needed when a B1512A HCSMU is connected to a voltage/current controller SMU port or Gate port or SMU ports of the N1265A. This adapter is used for Sense terminal. Keysight B1505A Configuration and Connection Guide 1-23...
Page 32 Maximum current range is about 800 A or more. • Cable length is 1.8 m. NOTE The N1259A-010 Inline Package Module (3 pin) and N1259A-011 Universal Socket Module cannot be used with the N1265A Ultra High Current Expander/Fixture. 1-24 Keysight B1505A Configuration and Connection Guide...
Page 33: N1266A High Voltage Source Monitor Unit Current Expander
The N1266A does not include a 16493T High Voltage Source Monitor Unit Cable and a 16493L GNDU Cable. Order a 16493T-001/002 and a 16493L-001/002 separately. Calibration options N1266A-A6J ANSI Z540 compliant calibration N1266A-UK6 Commercial cal. Certificate with test data Keysight B1505A Configuration and Connection Guide 1-25...
Page 34 High Voltage Source Monitor Unit Cable (1.5 • The 16493T-001/002 supports up to 3000V. • Cable length 1.5 m or 3.0 m can be 16493T-002 High Voltage Source Monitor Unit Cable (3.0 specified by option 001 or 002. 1-26 Keysight B1505A Configuration and Connection Guide...
Page 35: N1266A Compatibility With Fixture And Module Selector
Sense terminal. N1266A Compatibility with Fixture and Module Selector The N1266A can be used with the N1265A Ultra High Current Test Fixture, N1259A Test Fixture for Power Device and N1258A Module Selector for B1505A. Table 1-10 shows the equipment list which is compatible with the N1266A for package device testing and on-wafer device testing environment.
Page 36 Configuration Guide N1266A High Voltage Source Monitor Unit Current Expander Figure 1-2 N1266A Compatibility with Fixture and Module Selector 1-28 Keysight B1505A Configuration and Connection Guide...
Page 37: Fast Switch
The N1267A supports fast switching between the HVSMU and HCSMU to enable the measurement of the GaN current collapse phenomena. The N1267A switch requires one MCSMU in the B1505A mainframe for control. Please refer to Chapter 4 Connection and Ordering Examples for connection examples for GaN current collapse measurement system using the N1267A.
Page 38 Supported Environment Supported instruments On-wafer measurement Package device measurement • N1259A Test Fixture (N1259A-300 Module Selector option is required for Kelvin connection measurement) NOTE The N1267A does not support the two HCSMU 40A configuration. 1-30 Keysight B1505A Configuration and Connection Guide...
Page 39: N1268A Ultra High Voltage Expander
N1268A Ultra High Voltage Expander N1268A Ultra High Voltage Expander The N1268A expands the B1505A’s voltage capability up to 10 kV. Voltage expansion is made using the Ultra High Voltage Unit (UHVU), which is comprised of N1268A and two MCSMUs which are connected to I/V control ports of the N1268A. The MCSMU used for the V controller can be substituted by the HCSMU.
Page 40 N1268A Ultra High Voltage Expander to a wafer prober. • Protection adapter for the B1514A MCSMU is included in the N1269A adapter. • This adapter supports the B1514A MCSMU only. 1-32 Keysight B1505A Configuration and Connection Guide...
Page 41 Interlock cable (1.5 m) • The N1268A is furnished with a 16493J-001 cable. 16493J-002 Interlock cable (3.0 m) • Cable length 1.5 m or 3.0 m can be specified by option 001 or 002. Keysight B1505A Configuration and Connection Guide 1-33...
Page 42 HCSMU is used as a voltage controller of the N1268A. This adapter is used for Sense. NOTE The HPSMU and MPSMU modules cannot be used with the Ultra High Voltage Unit (UHVU) even when protection adapters are used. 1-34 Keysight B1505A Configuration and Connection Guide...
Page 43: N1271A Thermal Test Enclosure And Related Accessories
N1271A-005 supports the IV measurement up to 10 kV and the CV measurement up to 3 kV. Figure 1-3 Thermal Test Thermostream (inTEST corp.) Thermal Plate Thermal (inTEST corp.) Enclosure (a) Using Thermal Plate (b) Using Thermostream Keysight B1505A Configuration and Connection Guide 1-35...
Page 44 3 kV at temperature range from -50 C to +220 C. • Contains the N1254A-557 connection kit. • Inner dimension is 284 mm W, 150 mm H, 195 mm D. 1-36 Keysight B1505A Configuration and Connection Guide...
Page 45 This kit contains the following items. • 200 mm high current cable, 2 ea. • 200 mm normal cable, 8 ea. • Banana pin adapter, 10 ea. • Mini alligator clip, 8 ea. • Large clip, 2 ea. Keysight B1505A Configuration and Connection Guide 1-37...
Page 46 300 mm high current cable, 2 ea. • 200 mm normal cable, 6 ea. • 300 mm normal cable, 4 ea. • Banana pin adapter, 14 ea. • Mini alligator clip, 10 ea. • Large clip, 4 ea. 1-38 Keysight B1505A Configuration and Connection Guide...
Page 47: Measurement Capability On Thermal Test
Qg test up to 1100 A, 3 kV N1265A Information of inTEST Thermal Plate and Thermostream The B1505A with the N1271A supports the Thermal Plate and the Thermostream of inTEST corporation. Supported models are listed below but contact inTEST for more information, sales@inTESTthermal.com.
Page 48: Pre-Configured Power Device Analyzer/Curve Tracer
Configuration Guide Pre-configured Power Device Analyzer/Curve Tracer (B1505A with Modules/Fixture) Pre-configured Power Device Analyzer/Curve Tracer (B1505A with Modules/Fixture) The Keysight B1505AP Pre-configured packages include all necessary modules, cables and accessories. Table 1-17 B1505AP Pre-configured package Product Number Description B1505AP Pre-configured Power Device Analyzer/Curve Tracer (B1505A w/...
Page 49 Configuration Guide Pre-configured Power Device Analyzer/Curve Tracer (B1505A with Modules/Fixture) Description Note N1259A-001 Test Fixture including Inline Package Socket Module and Cables • Include N1259A-010 Inline package socket module (3 pin), N1254A-508 Banana to banana cable black 4ea and N1254A-509 Banana to banana cable red 6ea.
Page 50 Configuration Guide Pre-configured Power Device Analyzer/Curve Tracer (B1505A with Modules/Fixture) Description Note N1259A-030 1 kohm R-box for gate N1254A Accessories for instruments and fixtures N1254A-104 Triax (f) to BNC (m) adaptor Table 1-20 B1505AP-H50 3 kV / 500 A / Fixture Package...
Page 51 Configuration Guide Pre-configured Power Device Analyzer/Curve Tracer (B1505A with Modules/Fixture) Description Note B1520A-FG Multi Frequency Capacitance Measurement Unit Module • Include N1300A-001 CMU cable (1.5 m) N1260A High Voltage Bias-Tee N1260A-STD High Voltage Bias-Tee N1265A Ultra High Current Expander / Fixture...
Page 52 Configuration Guide Pre-configured Power Device Analyzer/Curve Tracer (B1505A with Modules/Fixture) Description Note N1265A-010 500 A Ultra High Current 3-pin Inline Package Socket Module • Include N1254A-522 1500 A Ultra High Current Banana to Banana Cable (yellow, 2ea), N1254A-508 Banana to Banana Cable, 250 mm (red, 1ea),...
Page 53 Configuration Guide Pre-configured Power Device Analyzer/Curve Tracer (B1505A with Modules/Fixture) Description Note N1254A-508 Banana to Banana Cable 250 mm (red, 1ea) N1254A-509 Banana to Banana Cable 250 mm (black, 1ea) N1254A-510 Dolphin Clip 2 ea. (red and black) N1254A-512 SHV Cable 250 mm...
Page 54 Configuration Guide Pre-configured Power Device Analyzer/Curve Tracer (B1505A with Modules/Fixture) Description Note N1254A-510 Dolphin Clip 2 ea. (red and black) N1254A-520 10 kV Ultra High Voltage Open End Cable, 1m (pair) N1254A-522 1500 A Ultra High Current Banana to Banana Cable, 2 ea...
Page 55 To add additional modules such as a B1511B MPSMU into the B1505AP package, the B1505AU with corresponding module option has to be ordered and users have to send their B1505A mainframe to Keysight Service Center for installing modules. So, building a B1505A configuration from scratch is recommended.
Page 56: Accessories For Wafer Prober And Your Own Test Fixture
** We should manually change cabling for a 10 kV measurement Figure 1-5 Connection between the N1265A Ultra High Current Expander / Fixture and Prober with the N1254A-524 Ultra High Current Prober System 1-48 Keysight B1505A Configuration and Connection Guide...
Page 57 For High Voltage Capacitance Measurement N1260A High Voltage Bias-Tee • The N1260A-STD is a mandatory option. • The N1260A High Voltage Bias-Tee is not furnished with any cables. Keysight B1505A Configuration and Connection Guide 1-49...
Page 58 SHV outputs (Force/Sense). High Voltage R-box N1262A-001 1Mohm R-box • One High Voltage Triaxial input and one SHV output. N1262A-002 100 kohm R-box • One High Voltage Triaxial input and one SHV output. 1-50 Keysight B1505A Configuration and Connection Guide...
Page 59 Universal R-Box, HV Triaxial to SHV • One High Voltage Triaxial input and one SHV output. N1262A-036 50 Ohm Termination Adapter • The N1262A-036 is used to avoid device oscillation by inserting it to the gate cabling. Keysight B1505A Configuration and Connection Guide 1-51...
Page 60 C om m on 40 V 40 V 40 V m ax m ax m ax O utput O utput Lo w F orce Lo w F orce H igh F orce H igh F orce 1-52 Keysight B1505A Configuration and Connection Guide...
Page 61 Do not connect or put any conductor on the HCSMU Low Force and Low Sense terminals, outer conductor of the coaxial connectors. • Connecting or putting conductor of circuit common, chassis ground, or any potential on causes the measurement error. Keysight B1505A Configuration and Connection Guide 1-53...
Page 62 Ultra High Current Prober System Cable • The N1254A-524 cable is furnished with one transparent shield with a slit. • Maximum current range is about 800 A or more. • Cable length is 1.8 m. 1-54 Keysight B1505A Configuration and Connection Guide...
Page 63 N1254A-521 10 kV Ultra High Voltage Jack to Jack • Feed through adapter set of UHV and Adapter SHV connectors N1262A-023 Universal R-Box for Ultra High Voltage • Two Ultra High Voltage ports. Keysight B1505A Configuration and Connection Guide 1-55...
Page 64 The adapter output can be extended to your prober station by using the N1254A-524 prober system cable. • You can also mount current control device or load resistor for the gate charge measurement on the top of this adapter. 1-56 Keysight B1505A Configuration and Connection Guide...
Page 65: Other Accessories
Configuration Guide Other Accessories Other Accessories The following table lists the options and accessories available for the B1505A. Table 1-27 Options and Accessories Model/Option Description Additional Information Keysight EasyEXPERT software B1540A-001 Standard edition Keysight Desktop EasyEXPERT software B1541A-001 Standard edition...
Page 66 HVSMU Coaxial Cable Assy 1.5 m - HV Plug to Open-End, 1 ea. N1254A-507 HVSMU Coaxial Cable Assy 1.5 m, 1 ea. N1254A-514 BNC(m) to BNC(m) adapter, 1 ea. N1254A-515 BNC(f)-BNC(m)-BNC(f) adapter, 1 ea. 1-58 Keysight B1505A Configuration and Connection Guide...
Page 67 Thermocouple, Type K, 75 cm, 2 ea. N1254A-556 Test Leads and Connection Kit for Capacitance Test, four 20 cm alligator clip - lug cables, four banana plugs, four nuts, and four spare clips Keysight B1505A Configuration and Connection Guide 1-59...
Page 68 Configuration Guide Other Accessories Model/Option Description Additional Information 1250-2405 BNC-T Plug(m)-BNC(f)-BNC(f) adapter, 1ea 1251-2277 Banana to BNC adapter 1252-1419 Interlock receptacle connector 1-60 Keysight B1505A Configuration and Connection Guide...
Page 69: Retrofit Products For B1505A
Retrofit Products for B1505A Retrofit Products for B1505A The Keysight B1505A has 10 slots so that users can install appropriate modules into B1505A mainframe. The retrofit module product is available to add more modules into existing B1505A mainframe. These modules have to be installed in Keysight Technologies service center to meet the specifications.
Page 70 NOTE For customers, module upgrades to existing B1505A systems must be carried out at an Keysight Technologies service center. In order to ensure system specifications the new modules need to be installed and the complete unit calibrated. Contact your nearest Keysight Technologies office to arrange the installation and calibration of new B1505A modules.
Page 71 Configuration Guide Retrofit Products for B1505A NOTE Under the total power consumption limit, there is configuration limitation. Please refer to Table 1-4 on page 1-7. Keysight B1505A Configuration and Connection Guide 1-63...
Page 72: Conversion Kit From B1500A To B1505A
B1517A HRSMU (high resolution SMU), E5288A ASU (Atto Sense and Switch Unit), B1530A WGFMU (Waveform Generator / Fast Measurement Unit), and B1525A SPGU (High Voltage Semiconductor Pulse Generator Unit) are not supported by the B1505A. 1-64 Keysight B1505A Configuration and Connection Guide...
Page 73: Upgrade Kit For N1259Au Test Fixture
The N1259AU-010 cannot be used with the N1265A Ultra High Current Expander. • Max voltage and current are 3 kV and 40A. N1259AU-011 Universal Socket Module • Maximum voltage is 3 kV. N1259AU-012 Blank PTFE Board Keysight B1505A Configuration and Connection Guide 1-65...
Page 74 Curve Tracer Test Adapter Socket N1259AU-020 High Voltage Bias-Tee • The N1259AU-020 High Voltage Bias-Tee is furnished with two SHV-SHV cables (N1254A-512) and two SHV-banana adapters (N1254A-513). • Installation must be done at Keysight Service Center. 1-66 Keysight B1505A Configuration and Connection Guide...
Page 75 Cable lug adapter, black 1 ea. and red 1ea. N1254A-512 SHV Cable 250 mm, 1ea • The N1259AU-020 High Voltage Bias-tee is furnished with two N1254A-512 cables. • The N1254A-513 adapter is required to connect a banana plug. Keysight B1505A Configuration and Connection Guide 1-67...
Page 76 • Cable length 1.5 m or 3.0 m can be specified by option 001 or 002. NOTE Keysight Technologies service center is responsible for N1259AU-020 and N1259AU-300 installation. NOTE For Keysight field team, installation fee (R-51U-501 or R1286A-HU) will be automatically added to the N1259AU when making a quotation with Keysight order configuration tool.
Page 77: Upgrade Kit For N1265Au Test Fixture
Collector/Drain and Emitter/Source sense lines • N1254A-508 Banana to Banana cable, 250mm (Red, 1ea), N1254A-509 Banana to Banana cable, 250mm (Black, 1ea) for Base/Gate force/sense lines • Maximum voltage and current is 3 kV and 500 Keysight B1505A Configuration and Connection Guide 1-69...
Page 78 Emi er / Source Base / Gate Force Sense Force Sense Force Sense Curve Tracer Test Adapter Socket N1265AU-015 1500 A Current Option • 1500 A upgrade must be done at Keysight Service Center. 1-70 Keysight B1505A Configuration and Connection Guide...
Page 79 • Include two Type-K thermocouples. N1265AU-045 Container for Protection Adapter and • N1260A High Voltage Bias tee and N1261A Bias Tee Protection Adapters can be placed in this container to avoid messy cabling. Keysight B1505A Configuration and Connection Guide 1-71...
Page 80 The N1254A-513 adapter is used with the N1254A-512 cable to connect a banana plug. N1254A-520 10 kV Ultra High Voltage Open End • One-side 10kV UHV/SHV and the other-side Cable, 1 m. open end 1-72 Keysight B1505A Configuration and Connection Guide...
Page 81 Cable length 1.5 m or 3.0 m can be specified by option 001 or 002. NOTE Keysight Technologies service center is responsible for N1265AU-015 installation. NOTE For Keysight field team, installation fee (R-51U-501 or R1286A-HU) will be automatically added to the N1265AU when making a quotation with Keysight order configuration tool.
Page 82: Note For 4142B Users
Note for 4142B Users Note for 4142B Users The B1505A expands the maximum measurement range up to 40 A/3000 V from the range 10 A/1000 V covered by Keysight 4142B Modular DC Source/Monitor. Because of the following reasons, the measurement setup and environments for the 4142B cannot be used with the B1505A.
Page 83: N1259A Connection Guide
N1259A Connection Guide...
Page 84 N1259A Connection Guide This chapter describes the required information for connecting Keysight B1505A, N1259A, and a device under test (DUT). • "Input Connection" • "Output Connection" The N1259A is a test fixture used for measurements of packaged devices. The fixture can be connected to GNDU, MFCMU, HP/MPSMU, HVSMU/HVMCU, and HC/MC/DHCSMU.
Page 85: Input Connection
N1259A Connection Guide Input Connection Input Connection Prepare the required cables listed in the following tables and connect them between the B1505A terminals and the relative N1259A terminals. Table 2-1 shows the connections without module selector, fast switch, and HVMCU.
Page 86: To Connect Interlock Circuit
To Connect Interlock Circuit The B1505A provides the Interlock connector to prevent you from receiving an electrical shock from high voltage (more than ± 42 V). If the interlock circuit is open, the B1505A cannot apply high voltage more than ± 42 V.
Page 87 N1259A Connection Guide Input Connection Table 2-1 To Connect between B1505A and N1259A, without HVMCU and Module Selector B1505A terminals Required cables N1259A terminals 16493J Interlock cable, 3 m or 1.5 m, 1 ea. Interlock Interlock 16493L GNDU cable, 3 m or 1.5 m, 1 ea.
Page 88 N1259A Connection Guide Input Connection Table 2-2 To Connect between B1505A and N1259A for using Module Selector (N1259A-300) B1505A terminals Required cables N1259A terminals 16493L GNDU cable, 3 m or 1.5 m, 1 ea. GNDU GNDU2 Force 16493T HVSMU cable, 3 m or 1.5 m, 1 ea.
Page 89 N1259A Connection Guide Input Connection Table 2-4 To Connect between B1505A and N1259A for using HVMCU (N1266A) B1505A terminals Required cables N1266A terminals 16493L-001 GNDU cable, 1.5 m, 1 ea. GNDU GNDU Force 16493T-001 HVSMU cable, 1.5 m, 1 ea.
Page 90: Output Connection
N1254A-512 SHV(plug)-SHV(plug) cable and SHV(jack)-banana adapter, for high voltage capacitance measurement N1254A-513 N1254A-510 Dolphin clip adapter, red and black, for using blank board N1254A-511 Cable lug adapter, red and black, for using blank board Keysight B1505A Configuration and Connection Guide...
Page 91: To Connect Dut
B1505A front panel High Voltage indicator is not lit. WARNING Do not connect or disconnect your DUT while the B1505A is applying voltage or current. Otherwise, the DUT may be damaged. Do not touch the DUT soon after measurement. Have enough time for discharge and radiation.
Page 92 High Guard Guard HCSMU2 HPSMU2 GNDU1 AUX 2 ±40 V ±200 V ±200 V Force Sense Force Sense Force Signal High Guard Sense 1. HCSMU 2. HPSMU 3. HVSMU 4. GNDU 5. AUX 2-10 Keysight B1505A Configuration and Connection Guide...
Page 93 Kelvin connection which can reduce the residual resistance effects of the cables and contacts by connecting the Force and Sense lines together as close as possible to the DUT terminal. The Kelvin connection can be made on the test fixture as shown in Figure 2-3. Keysight B1505A Configuration and Connection Guide 2-11...
Page 94: To Use Options
"N1259A-011 Universal Socket Module" on page 2-20. • "N1259A-012 Blank PTFE Board" on page 2-21. • "N1259A-013 Curve Tracer Test Adapter Socket Module" on page 2-22. • "N1259A-014 Gate Charge Socket Module" on page 2-23. 2-12 Keysight B1505A Configuration and Connection Guide...
Page 95 ±3 kV Guard 1 2 3 ±25 V ±40 V ± 3 kV ±3 kV High MF CMU ±3 kV Universal Socket Module Module Selector Output Inline Package Socket (3 Pin) High Voltage Bias–Tee Keysight B1505A Configuration and Connection Guide 2-13...
Page 96 MF CMU ±3 kV Module Selector Output Inline Package Socket (3 Pin) High Voltage Bias –Tee CAUTION Maximum current must be ± 30 A to prevent the module selector from performance degradation and failure. 2-14 Keysight B1505A Configuration and Connection Guide...
Page 97 The selector makes the path to the output port from the module used for the test. 2. This condition is when all Input fields HVSMU, HCSMU, and HPSMU are blank. Keysight B1505A Configuration and Connection Guide 2-15...
Page 98 High Sense Sense Sense ±3 kV Guard 1 2 3 ±25 V ±40 V ±3 kV MF CMU High ±3 kV Module Selector Output Inline Package Socket (3 Pin) High Voltage Bias –Tee 2-16 Keysight B1505A Configuration and Connection Guide...
Page 99 Make enough space between the resistor leads and the cover. 4. Write the resistance value in the label. 5. Affix the label to the top cover. Figure 2-8 To Install Resistor in the N1259A-035 Universal R-Box Keysight B1505A Configuration and Connection Guide 2-17...
Page 100 High Sense Sense Sense ±3 kV Guard 1 2 3 ±25 V ±40 V ±3 kV MF CMU High ±3 kV Module Selector Output Inline Package Socket (3 Pin) High Voltage Bias –Tee 2-18 Keysight B1505A Configuration and Connection Guide...
Page 101: N1259A-010 Inline Package Socket Module
(45 mm including terminal) (58 mm including socket) Sense Force 165 mm Sense Force Maximum voltage: 3000 V Sense Maximum current: 40 A pulse, 2 A dc 14 mm 3.48 mm 1.78 mm Keysight B1505A Configuration and Connection Guide 2-19...
Page 102: N1259A-011 Universal Socket Module
6. Reattach the cover. Figure 2-11 Universal Socket Module 165 mm 90 mm (Nut pitch: 80 mm) 165 mm 105 mm (Nut pitch: 95 mm) 129 mm Height: 34 mm (45 mm including terminal) 160 mm 2-20 Keysight B1505A Configuration and Connection Guide...
Page 103: N1259A-012 Blank Ptfe Board
1 mm for maximum 200 V output and 6 mm for 3000 V, to prevent discharge and any accident. 5. Close the fixture cover and perform measurement. Figure 2-12 Blank PTFE Board Keysight B1505A Configuration and Connection Guide 2-21...
Page 104: N1259A-013 Curve Tracer Test Adapter Socket Module
B-Force: 500 A pulse, 39 A dc B-Sense: 40 A pulse, 2 A dc C-Force: 40 A pulse, 2 A dc Curve Tracer Test Adapter Socket C-Sense: 40 A pulse, 2 A dc 2-22 Keysight B1505A Configuration and Connection Guide...
Page 105: N1259A-014 Gate Charge Socket Module
Low: Max. 10 V / 20 mA SMU Current Control High: Max. 30 V / 1A floating 3000 V Low: Max. 10 V / 1A floating 3000 V Curve Tracer Test Adapter Socket Keysight B1505A Configuration and Connection Guide 2-23...
Page 106 Selector Output Force High terminal on the N1259A-014 adapter. Measurement may fail depending on the device characteristics if it is connected to the Selector Output Sense High terminal. 2-24 Keysight B1505A Configuration and Connection Guide...
Page 107: N1265A Connection Guide
N1265A Connection Guide...
Page 108 Interlock Circuit" on page 3-5). WARNING The B1505A, the N1265A ultra high current expander/fixture, and the N1268A ultra high voltage expander are heavy and require a two person lift. CAUTION Do not grab the fixture cover when lifting the N1265A.
Page 109 You need to prepare the hexlobe (torx type) screwdriver T-10 to remove the cover. After installing a resistor or mounting a socket, reattach the cover. Do not use the universal R-box and the universal socket module under the condition that the cover is removed. Keysight B1505A Configuration and Connection Guide...
Page 110: Input Connection
N1265A Connection Guide Input Connection Input Connection Prepare the required cables listed in the following tables and connect them between the B1505A terminals and the relative N1265A terminals. Table 3-2 shows the connections without HVMCU and UHVU. Table 3-3 shows the additional connections for using HVMCU.
Page 111: To Connect Interlock Circuit
To Connect Interlock Circuit The B1505A provides the Interlock connector to prevent you from receiving an electrical shock from high voltage (more than ± 42 V). If the interlock circuit is open, the B1505A cannot apply high voltage more than ± 42 V.
Page 112 N1265A Connection Guide Input Connection Table 3-2 To Connect between B1505A and N1265A, without HVMCU and UHVU B1505A terminals Required cables N1265A terminals 16493J Interlock cable, 3 m or 1.5 m, 1 ea. Interlock Interlock 16493L GNDU cable, 3 m or 1.5 m, 1 ea.
Page 113 N1254A-517 adapter for Sense. WARNING Connect a wire from an electrical ground (safety ground) to the earth terminal. Table 3-3 To Connect between B1505A and N1265A for using HVMCU (N1266A) B1505A terminals Required cables N1266A terminals 16493L-001 GNDU cable, 1.5 m, 1 ea.
Page 114 N1265A Connection Guide Input Connection Table 3-4 To Connect between B1505A and N1265A for using UHVU (N1268A) B1505A terminals Required cables N1268A terminals 16493J-001 Interlock cable, 1.5 m, 1 ea. Interlock Interlock Input MCSMU Force 16494A-001 Triaxial cable, 1.5 m, 1 ea.
Page 115: Output Connection
Cable lug adapter, red and black, for using blank plate N1254A-520 UHV(plug)/SHV(plug) to no connector cables, 1 m, for using UHVU and blank plate N1254A-523 Banana to no connector wire, 1 m, 2 ea., for using UHCU and blank plate Keysight B1505A Configuration and Connection Guide...
Page 116: To Connect Dut
High Voltage Enable output. And confirm that this red switch is not lit. CAUTION Do not connect or disconnect your DUT while the B1505A is applying voltage or current. Otherwise, your DUT may be damaged. CAUTION Do not touch the terminals of the cable and wire. Oil, perspiration, and dirt prevent good electrical contact, deteriorate insulation, and degrade measurement accuracy.
Page 117 Kelvin connection which can reduce the residual resistance effects of the cables and contacts by connecting the Force and Sense lines together as close as possible to the DUT terminal. The Kelvin connection can be made on the test fixture as shown in Figure 3-3. Keysight B1505A Configuration and Connection Guide 3-11...
Page 118 Max 1 A Pulse ±3 k V ±3 k V Force Sense Guard High High High High ±3 V K Thermocouple Base: SMU1 (HPSMU) Collector: SMU3 (HCSMU High) Emitter: SMU3 (HCSMU Low) and Selector Low (GNDU) 3-12 Keysight B1505A Configuration and Connection Guide...
Page 119 Guard (high level) must be opened. You may extend it as close as possible to a DUT terminal for reducing the leakage current of the extension cable. 4. Chassis common terminal Use for grounding or shielding. Keysight B1505A Configuration and Connection Guide 3-13...
Page 120 The selector makes the path to the output port from the measurement resource used for the test. 2. This condition is when the Default field is blank. NOTE Selector may emit a noise sound during operation. However it is not abnormal status. 3-14 Keysight B1505A Configuration and Connection Guide...
Page 121 Open the Bias Tee terminals for the ultra high voltage measurement using UHVU. K Thermocouple Terminals For connecting the thermocouple to monitor temperature around a DUT. The N1265A-041 thermocouple supports maximum of +180 C. The N1254A-554 thermocouple supports maximum of +250 C. Keysight B1505A Configuration and Connection Guide 3-15...
Page 122 UHVU. CAUTION Never connect the UHVU High terminal to any output, including circuit common, chassis ground, or any other measurement resource such as SMU. Connecting other measurement resource may damage the connected one. 3-16 Keysight B1505A Configuration and Connection Guide...
Page 123: Inline Package Socket Module (N1265A-010)
Selector Output High to DUT high (ex. Collector/Drain) • Selector Output Low to DUT low (ex. Emitter/Source) • Gate High to DUT drive (ex. Base/Gate Force) • Gate Low to DUT low (ex. Emitter/Source Force) Keysight B1505A Configuration and Connection Guide 3-17...
Page 124: Universal Socket Module (N1265A-011)
3. Make four screw holes on the board. The holes should be 6 mm inside from the edge. 4. Fix the board to the blank module. 5. Remove the cover bottom of the blank module. 3-18 Keysight B1505A Configuration and Connection Guide...
Page 125: Curve Tracer Test Adapter Socket Module (N1265A-013)
(N1254A-512) and SHV(jack)-banana adapter (N1254A-513) for connection. Selector Output and Gate should be connected as follows. • Selector Output High to DUT high (ex. Collector/Drain) • Selector Output Low to DUT low (ex. Emitter/Source) Keysight B1505A Configuration and Connection Guide 3-19...
Page 126: Gate Charge Socket Module (N1265A-014)
Peak power  Vr  Ir  1 ms 4. Set your DUT on the right socket. 5. Close the fixture cover and perform measurement. CAUTION Do not apply voltage/current over the maximum limit of the socket module. 3-20 Keysight B1505A Configuration and Connection Guide...
Page 127 Low: Max. 10 V / 1A floating 3000 V Curve Tracer Test Adapter Socket Figure 3-11 Connection Example for High Current Gate Charge Measurement Figure 3-12 Connection Example for High Voltage Gate Charge Measurement Keysight B1505A Configuration and Connection Guide 3-21...
Page 128: Blank Silicon Plate (N1265A-002)
3000 V, and 32 mm for 10 kV, to prevent discharge and any accident. Also the creepage distance must be more than 100 mm for 10 kV. 5. Close the fixture cover before starting measurement. 3-22 Keysight B1505A Configuration and Connection Guide...
Page 129: Universal R-Box (N1265A-035)
Collector: Selector Output High Force and Sense Emitter: Selector Output Low Force and Sense and SMU1 Low (MCSMU) To Use Universal R-Box To install your desired resistor, see the following simple instruction. • Required parts: Keysight B1505A Configuration and Connection Guide 3-23...
Page 130 Connect the series resistor between High Force and High. 3. Reattach the cover. Make enough space between the resistor leads and the cover. 4. Write the resistance value in the label. 5. Affix the label to the top cover. 3-24 Keysight B1505A Configuration and Connection Guide...
Page 131: Protection Adapter (N1265A-040)
This is the cable for extending the N1265A’s Selector Output and Gate terminals to a prober station. See "To Connect Ultra High Current Expander" on page 5-36 for more information. CAUTION Do not apply voltage/current over the maximum limit of the cable. See Table 5-28. Keysight B1505A Configuration and Connection Guide 3-25...
Page 132 N1265A Connection Guide Output Connection 3-26 Keysight B1505A Configuration and Connection Guide...
Page 133: N1272A And N1273A Connection Guide
N1272A and N1273A Connection Guide...
Page 134 N1272A and N1273A Connection Guide This chapter describes the required information for connecting Keysight B1505A, N1272A, N1273A, and a device under test (DUT). • "Input Connection" • "Output Connection" The N1273A capacitance test fixture is a test fixture used for capacitance measurements of packaged devices.
Page 135: Input Connection
The B1505A provides the Interlock connector to prevent you from receiving an electrical shock from high voltage (over ± 42 V). If the interlock circuit is open, the B1505A cannot apply high voltage over ± 42 V. When using the N1273A test fixture, connect the 16493J interlock cable between the Interlock connectors of the B1505A and the N1272A selector, and the composite cable between the N1272A and the N1273A.
Page 136 Collector/Drain output connector b. Base/Gate output connector c. Emitter/Source output connector d. AC/DC Guard output connector e. HVSMU output connector f. Interlock output connector g. Frame ground terminal 4. LINE input receptacle and power switch Keysight B1505A Configuration and Connection Guide...
Page 137 2. If the N1258A module selector, N1259A test fixture, or N1265A expander/fixture is used, connect to the Digital I/O Input of the equipment. NOTE The B1505A needs to automatically detect and register the CMU cable type during boot process. Keysight B1505A Configuration and Connection Guide...
Page 138 16493L (Included in the B1505A) Interlock Interlock Interlock N1273A 16493J (Included in the B1505A) Collector/Drain Collector/Drain Base/Gate Base/Gate Emi er/Source Emi er/Source AC/DC Guard AC/DC Guard Chassis GND Chassis GND B1507-61720 For Capacitance (Included in the Measurement N1273A) Keysight B1505A Configuration and Connection Guide...
Page 139 16493L (Included in the B1505A) Interlock Interlock Interlock N1273A 16493J (Included in the B1505A) Collector/Drain Collector/Drain Base/Gate Base/Gate Emi er/Source Emi er/Source AC/DC Guard AC/DC Guard Chassis GND Chassis GND B1507-61720 For Capacitance (Included in the Measurement N1273A) Keysight B1505A Configuration and Connection Guide...
Page 140: Output Connection
B1505A front panel High Voltage indicator is not lit. WARNING Do not connect or disconnect your DUT while the B1505A is applying voltage or current. Otherwise, the DUT may be damaged. Do not touch the DUT soon after measurement. Have enough time for discharge and radiation.
Page 141: 3-Pin Inline Package Socket Module
2. Attach the socket module directly to the Base/Gate, Collector/Drain, and Emitter/Source terminals of the test fixture. 3. Connect the earthing wire of the socket module to the chassis common terminal. 4. Set your DUT on the socket. Keysight B1505A Configuration and Connection Guide...
Page 142 A short plate is furnished with the socket module. It is used for performing the short correction before the capacitance measurement. Set it on the socket before the short correction and remove it after the correction is completed. 4-10 Keysight B1505A Configuration and Connection Guide...
Page 143: N1273A-011 Universal Socket Module
9 mm wrench • Caulking tool for lug terminals, 2.0sq Prepare a socket for your test devices, a blank board, tools for mounting the socket, screws and nut for socket terminals, and so on separately. Keysight B1505A Configuration and Connection Guide 4-11...
Page 144 When fixing the lug terminal, secure a screw by a T15 Torx screwdriver with fixing the bottom nut by a 9 mm wrench. And, pass the cables through the opening of the blank module. 4-12 Keysight B1505A Configuration and Connection Guide...
Page 145 8. Fix the bottom cover to the blank module using a T10 Torx screwdriver. CAUTION Do not apply voltage/current over the maximum limit of the socket module. Terminal rated voltage: 3000 Vd c Terminal rated current: 120 mA Keysight B1505A Configuration and Connection Guide 4-13...
Page 146: N1273A-013 Curve Tracer Test Adapter Socket Module
Internal connections Socket Terminal N1273A Output 1: Collector/Drain Force Collector/Drain 2: Collector/Drain Sense No Connection 3: Emitter/Source Force Emitter/Source 4: Emitter/Source Sense No Connection 5: Base/Gate Force Base/Gate 6: Base/Gate Sense No Connection 4-14 Keysight B1505A Configuration and Connection Guide...
Page 147: Accessories For Connecting A Dut
DUT damage. Do not connect anything to this terminal which may have the same potential as the Collector/Drain terminal. WARNING Make sure that the cover is closed properly before starting measurement. Do not perform the measurement when a wire is protruding from the fixture cover. Keysight B1505A Configuration and Connection Guide 4-15...
Page 148 N1272A and N1273A Connection Guide Output Connection 4-16 Keysight B1505A Configuration and Connection Guide...
Page 149: Connection Guide For Wafer Prober And Your Own Test Fixture
Connection Guide for Wafer Prober and Your Own Test Fixture...
Page 150 Interlock cable (see 5-49). WARNING The B1505A, the N1265A ultra high current expander/fixture, and the N1268A ultra high voltage expander are heavy and require a two person lift. CAUTION Never connect the Guard terminal to any output, including circuit common, chassis ground, or any other guard terminal.
Page 151 You need to prepare the box wrench (M5 hex) to connect or disconnect the system cable. If the system cable is used, the 16493J interlock cable from the B1505A or the N1268A must be connected to the interlock circuit installed in the shielding box of the probe station.
Page 152: Connection Overview
16493S-021 Dual HCSMU combination adapter. See "To Connect Dual HCSMU Adapter" for connection. NOTE The B1505A needs to automatically detect and register the CMU cable type during boot process. NOTE The N1258A module selector has built-in GNDU protection adapter, built-in HPSMU protection adapter, and built-in HCSMU Kelvin adapter.
Page 153 16493S-010 HCSMU Kelvin adapter, 1 ea. or HCSMU BNC(m) cable, 4 ea. for 16493S-011 HCSMU non-Kelvin adapter, 1 ea. 16493S-010 or Sense BNC(m) cable, 2 ea. for 16493S HCSMU cable, 3 m or 1.5 m, 1 ea. 16493S-011 Keysight B1505A Configuration and Connection Guide...
Page 154 BNC(m) cable, 2 ea. for N1261A-002 or 16493L GNDU cable, 3 m or 1.5 m, 1 ea. SHV(plug) cable, 2 ea. for N1261A-004  LINE Power cable, 1 ea., for connecting to power line Keysight B1505A Configuration and Connection Guide...
Page 155 LINE Power cable, 1 ea., for connecting to power line site AC power 1. Non-Kelvin connection is not allowed. GNDU Force and Sense are internally connected to Low Sense. Table 5-22 on page 5-31. Keysight B1505A Configuration and Connection Guide...
Page 156 Coaxial cable with BNC(m) connector. N1254A-503 can be used. DUT low terminal (ex: source) Force Coaxial cable with HV(plug) connector. N1254A-506 can be used. DUT high terminal High Use coaxial cable to minimize affect of inductance. (ex: drain) Keysight B1505A Configuration and Connection Guide...
Page 157 Interlock connector, 1 ea. 1. HCSMU is substitutable. Then use 16493S HCSMU cable, N1254A-103 adapter for Force, and N1254A-517 adapter for Sense. 2. Non-Kelvin connection is not allowed. GNDU Sense is internally connected to Low Sense. Keysight B1505A Configuration and Connection Guide...
Page 158 DUT gate or base N1269A Chuck Coaxial cable with SHV connector or SHV cable of N1254A-520 DUT chuck 1. HCSMU is substitutable. Then use 16493S HCSMU cable, N1254A-103 adapter for Force, and N1254A-517 adapter for Sense. 5-10 Keysight B1505A Configuration and Connection Guide...
Page 159 Ultra high voltage expander For supporting 10 kV N1269A Ultra high voltage connection adapter For connecting UHVU Low N1272A Device capacitance selector For switching the I-V measurement path and capacitance measurement path automatically. Keysight B1505A Configuration and Connection Guide 5-11...
Page 160 SHV(plug) to no connector cable, 1 m interface. N1254A-521 UHV(jack)-UHV(jack) adapter and SHV(jack)-SHV(jack) adapter N1254A-523 Banana to no connector wire, 1 m, 2 ea. For connecting UHCU to probe station. N1254A-524 System cable for prober, 1.8 m 5-12 Keysight B1505A Configuration and Connection Guide...
Page 161 BNC(m)-BNC(m) coaxial cable, 1.5 m 16493U-002 BNC(m)-BNC(m) coaxial cable, 3 m 1250-2405 BNC(m)-(f)-(f) adapter For connecting HCSMU adapter output and GNDU protection adapter output. 8120-1838 or BNC(m)-BNC(m) coaxial cable, 12 inch or 8120-1839 24 inch Keysight B1505A Configuration and Connection Guide 5-13...
Page 162: To Connect High Voltage R-Box
Force 16494A-001 Triaxial cable, 1.5 m, for N1262A-010 or From SMU Force N1261A-001 N1262A-020 Force 16493T-001 HVSMU cable, 1.5 m N1261A-003 High UHV cable of 16493V-001 UHVU cable, 1.5 m From UHV UHVU 5-14 Keysight B1505A Configuration and Connection Guide...
Page 163: To Use Universal R-Box
Connect a wire between a terminal and the center conductor of its near connector. • Connect a wire between the other terminal and the center conductor of the other connector. • Connect the resistor between the terminals. Keysight B1505A Configuration and Connection Guide 5-15...
Page 164 4. Write the resistance value in the label. 5. Affix the label to the top cover. Figure 5-1 To Install Resistor in the N1262A-020 Universal R-Box Figure 5-2 To Install Resistor in the N1262A-023 Universal R-Box 5-16 Keysight B1505A Configuration and Connection Guide...
Page 165: To Connect Hcsmu Adapter
HCSMU adapter and the (ex: drain) GNDU adapter as shown in Figure 5-4. It can remove the path High Sense from the GNDU adapter to the DUT interface. Keysight B1505A Configuration and Connection Guide 5-17...
Page 166 To Simplify GNDU Connection, non-Kelvin connection To DUT interface Low Force 16493S-011 *1: N1254A-503 or other cable, 1 ea. Force *2: 1250-2405, 2 ea. and 8120-1838 or 1839, 2 ea. Sense GNDU adapter (N1261A-002) 5-18 Keysight B1505A Configuration and Connection Guide...
Page 167 *5: Triaxial cable with Triaxial(m) connector 16493J Interlock circuit B 1505A 16493S High N1262A-010 1 kohm R-box DUT interface Force 16493S-011 16493S Gate Sense Source Drain High 16493L 16493S-010 Sense Force GNDU adapter (N1261A-002) Keysight B1505A Configuration and Connection Guide 5-19...
Page 168: To Connect Dual Hcsmu Adapter
HCSMU modules installed in one B1505A. Using two modules can expand the B1505A maximum current up to ± 40 A (pulse), ± 2 A (DC). 16493S-020: Dual HCSMU Kelvin combination adapter, for connecting a DUT interface...
Page 169 1. This is the DHCSMU channel. The connectors are compatible with the N1258A module selector output connectors. 2. Non-Kelvin connection is not allowed. GNDU Force and Sense are internally connected to Low Sense. Keysight B1505A Configuration and Connection Guide 5-21...
Page 170: To Connect 16493S-021
1. This is the DHCSMU channel. The connectors are compatible with HCSMU. CAUTION If DHCSMU is used with the N1258A or N1259A-300 module selector, the maximum current must be ± 30 A to prevent the module selector from performance degradation and failure. 5-22 Keysight B1505A Configuration and Connection Guide...
Page 171: To Connect Protection Adapter
16494A. GNDU 16493L GNDU cable, 3 m or 1.5 m From GNDU NOTE For connecting HP/MPSMU, use either 16494A or 16493K. But the 16493K cannot be used for connecting the N1265A. Keysight B1505A Configuration and Connection Guide 5-23...
Page 172 Coaxial cable with BNC(m) connector. N1254A-503 can be used. Non-Kelvin Force Coaxial cable with SHV(plug) connector. N1261A-004 connection is not allowed. Sense Coaxial cable with SHV(plug) connector. 1. For connecting HCSMU adapter, see "To Connect HCSMU Adapter" on page 5-17. 5-24 Keysight B1505A Configuration and Connection Guide...
Page 173: To Connect High Voltage Bias Tee
CMU cable. Lpot Lpot Lcur Lcur NOTE Turn the B1505A off before connecting the CMU cable. Connect HVSMU to obtain DC bias input. Because the bias-tee cannot pass the MFCMU internal DC bias. Keysight B1505A Configuration and Connection Guide 5-25...
Page 174 Low or High. Figure 5-9 To Connect N1260A High Voltage Bias-Tee B 1505A N1260A High Voltage Bias-T HVSMU Force 16493T HVSMU MFCMU AC Guard N1300A Hcur High Hpot Lpot Lcur 5-26 Keysight B1505A Configuration and Connection Guide...
Page 175: To Connect Module Selector
Maximum current must be ± 30 A to prevent the module selector from performance degradation and failure. NOTE Using Dual HCSMU (DHCSMU) DHCSMU can be configured by two HCSMU modules installed in one B1505A and connected to the 16493S-021 Dual HCSMU combination adapter. See "To Connect Dual HCSMU Adapter"...
Page 176 Do not connect or put any conductor on the HCSMU Low Force and Low Sense terminals, outer conductor of the coaxial connectors. Connecting or putting conductor of circuit common, chassis ground, or any potential on causes the measurement error. 5-28 Keysight B1505A Configuration and Connection Guide...
Page 177 CAUTION For floating measurement, do not apply voltage more than ± 42 V to the Circuit Common terminal. Failure to heed this caution may result in damage to the N1258A. Keysight B1505A Configuration and Connection Guide 5-29...
Page 178 2. Non-Kelvin connection is not allowed. GNDU Force and Sense are internally connected to Low Sense. Table 5-22 on page 5-31. Figure 5-13 External Relay Control Output Connector 12 V Circut common (0 V) Circut common (0 V) Circut common (0 V) Relay control 5-30 Keysight B1505A Configuration and Connection Guide...
Page 179 Default field. When a measurement is performed, the N1258A performs automatic switching in every test. The N1258A makes the path to the output port from the measurement resource used for the test. 2. This condition is when all Input fields HVSMU, HCSMU, and HPSMU are blank. Keysight B1505A Configuration and Connection Guide 5-31...
Page 180: To Connect Hvsmu/Hcsmu Fast Switch
F: Force S: Sense P.A: Protection adapter When the HCSMU is used, SW control N1267A steps down the High output voltage to the HCSMU high output voltage. S, F GNDU HCSMU MCSMU HVSMU 5-32 Keysight B1505A Configuration and Connection Guide...
Page 181 Do not connect or put any conductor on the HCSMU Low Force and Low Sense terminals, outer conductor of the coaxial connectors. Connecting or putting conductor of circuit common, chassis ground, or any potential on causes the measurement error. Keysight B1505A Configuration and Connection Guide 5-33...
Page 182: To Connect Hvsmu Current Expander
(HVMCU) by using the HVSMU module and the MCSMU modules as shown Figure 5-17. The N1266A should be installed near the B1505A. The N1266A output can be selected from the HVSMU or HVMCU. The switching status is indicated by the Status indicator mounted on the front panel. See...
Page 183 Never connect the HVSMU Force and Guard terminals and the HVMCU High terminal to any output, including circuit common, chassis ground, or any other measurement resource such as SMU. Connecting other measurement resource may damage the connected one. Keysight B1505A Configuration and Connection Guide 5-35...
Page 184: To Connect Ultra High Current Expander
3000 V 20 A pulse Low Sense BNC(f) Selector Output Low Sense 200 V Gate Low Gate BNC(f) Gate High 200 V 1. Pulse of 1 ms pulse width and 0.4 % duty cycle 5-36 Keysight B1505A Configuration and Connection Guide...
Page 185: Connecting System Cable To N1265A
5. The plates close the excess opening and make the opening enough to pass the cable through. 9. Close the fixture cover. 10. Connect the 16493J interlock cable from the B1505A or the N1268A to the interlock circuit installed in the probe station. WARNING For using the prober system cable safely Never connect the interlock cable to the N1265A.
Page 186: To Connect Ultra High Voltage Expander
(UHVU) with the MCSMU modules. And the UHVU can be connected to prober as shown Figure 5-19, by using the N1269A connection adapter. The N1268A should be installed near the B1505A. And the N1269A should be installed near prober as shown in "Connection Overview".
Page 187 CAUTION Never connect the UHVU Low terminal to any other measurement resource except for the N1269A or N1265A-040 adapter. Connecting other measurement resource may damage the connected one. Keysight B1505A Configuration and Connection Guide 5-39...
Page 188: To Connect Device Capacitance Selector
Digital I/O Input If the N1272A selector is used with other fixture or selector, you can also connect the output from it to this input connector.  Power cable, for connecting to power line LINE 5-40 Keysight B1505A Configuration and Connection Guide...
Page 189 MCSMU I-V Measurement Connec on for GNDU Capacitance GNDU GNDU Measurement 16493L (Included in the B1505A) 16493J Interlock Interlock 16493J (Included in the B1505A) N1254A-558 or N1254A-518 Collector/Drain Base/Gate Emi er/Source AC/DC Guard Keysight B1505A Configuration and Connection Guide 5-41...
Page 190 Connec on for GNDU Connect for Capacitance GNDU GNDU I-V Measurement 16493L (Included in the B1505A) Measurement Interlock Interlock 16493J (Included in the B1505A) 16493J N1254A-558 or N1254A-518 Collector/Drain Base/Gate Emi er/Source AC/DC Guard 5-42 Keysight B1505A Configuration and Connection Guide...
Page 191: To Connect Gate Charge Adapter
Connection Guide for Wafer Prober and Your Own Test Fixture To Connect Gate Charge Adapter To Connect Gate Charge Adapter Keysight B1505A supports the following two adapters for on-wafer gate charge measurement. • N1274A On-Wafer Gate Charge Measurement Adapter/Selector for 20 A/3 kV •...
Page 192: To Connect N1274A
F Current MCSMU Control DUT Gate MCSMU Control HP/MPSMU Low F 16494A (Included in the MPSMU) S HPSMU Output F 16493L (Included in the B1505A) N1261A-003 GNDU GNDU 16493J (Included in the B1505A) Interlock 5-44 Keysight B1505A Configuration and Connection Guide...
Page 193: To Connect N1275A
High Force Ultra high current cable with banana(plug). N1254A-523 DUT high terminal can be used. (ex: drain) Low Sense Coaxial cable with BNC(m) connector. N1254A-503 can DUT low terminal be used. (ex: source) Keysight B1505A Configuration and Connection Guide 5-45...
Page 194 16494A (Included in the MPSMU) (Included in the N1275A) To DUT LS From N1254A 16493L (Included in the B1505A) To DUT GN DU GNDU N1275A S HPSMU Output F N1261A-003 16493J (Included in the B1505A) Interlock 5-46 Keysight B1505A Configuration and Connection Guide...
Page 195: To Install An Interlock Circuit
Keysight Part Description Quantity N1254A-402 Interlock micro switch 1252-1419 Interlock connector (6 pin, female) 2.1 V @ I 1450-0641 LED (V = 10 mA)  Wire 24AWG, 600 V, 150 degree C or equivalent Keysight B1505A Configuration and Connection Guide 5-47...
Page 196: Procedure
6. Attach the interlock connector to the mounting hole. If Keysight B1505A Interlock connector is connected to the interlock circuit, Keysight B1505A SMU cannot force more than ± 42 V when the door is open. When the door is closed, it can force more than ± 42 V.
Page 197: To Connect Interlock Circuit
To Connect Interlock Circuit The B1505A provides the Interlock connector to prevent you from receiving an electrical shock from high voltage (more than ± 42 V). If the interlock circuit is open, the B1505A cannot apply high voltage more than ± 42 V.
Page 198: About Cable Connections
N1261A-004 Output Force/Sense N1262A-001/002/011/021 Output N1268A Low N1269A Output Gate/Source/Chuck Ultra high voltage cable with one UHV(plug) N1268A High N1254A-520 Ultra high current cable with one banana N1254A-524 High Force and Low Force N1254A-523 5-50 Keysight B1505A Configuration and Connection Guide...
Page 199: To Make Connection To Reduce Leakage Current
Therefore, the current measured by SMU is same as current at measurement point because no current is leaked. Force Guard Buffer Keysight B1505A Configuration and Connection Guide 5-51...
Page 200: To Make Connection To Measure Low Resistance
Coaxial cable Contact pad Kelvin Connection Kelvin connections give good measurement results when you force high-current. The following figure shows the equivalent circuits for Kelvin and non-Kelvin connections. (a) non-Kelvin connection (b) Kelvin connection 5-52 Keysight B1505A Configuration and Connection Guide...
Page 201: To Connect Uhvu/Hvsmu/Hvmcu Output
100 mm for 10 kV. Figure 5-28 Space around Cable End Signal line Insulator Insulator Shield UHV Cable SHV Cable 100 mm for 10 kV 32 mm for 10 kV To UHVU Low To UHVU High Keysight B1505A Configuration and Connection Guide 5-53...
Page 202 Connection Guide for Wafer Prober and Your Own Test Fixture About Cable Connections 5-54 Keysight B1505A Configuration and Connection Guide...
Page 203: Accessory Dimensions
Accessory Dimensions...
Page 204 "N1269A Ultra High Voltage Connection Adapter, in mm" • "N1272A Device Capacitance Selector, in mm" • "N1274A On-Wafer Gate Charge Measurement Adapter/Selector for 20 A/3 kV, in mm" • "N1275A On-Wafer Gate Charge Measurement Adapter for N1265A, in mm" Keysight B1505A Configuration and Connection Guide...
Page 205 330 (W)  90 (H)  410 (D) N1274A On-wafer gate charge measurement adapter/selector for 20 A/3 kV 116 (W)  78 (H)  125 (D) N1275A On-wafer gate charge measurement adapter for N1265A 1. Body size. Excluding connectors. Keysight B1505A Configuration and Connection Guide...
Page 206 Accessory Dimensions Figure 6-1 16493S-010 HCSMU Kelvin Adapter, in mm M3 4 ea, < 10 mm 24 12 12 24 Keysight B1505A Configuration and Connection Guide...
Page 207 M3 4 ea, < 10 mm 24 12 12 24 Figure 6-3 16493S-020 Dual HCSMU Kelvin Combination Adapter, in mm 12 M3 4 ea, < 10 mm M3 4 ea, < 10 mm 12.5 112.5 Keysight B1505A Configuration and Connection Guide...
Page 208 N1254A-501 HV jack - HV jack Adapter, mounting hole, in mm 18.2 4 - 3.2 Figure 6-7 N1254A-521 UHV jack Adapter and SHV jack Adapter, mounting hole, in mm 16.0 4 - 3.2 12.7 4 - 3.0 Keysight B1505A Configuration and Connection Guide...
Page 209 Accessory Dimensions Figure 6-8 N1254A-524 Prober System Cable, Prober side, in mm 56.2 Keysight B1505A Configuration and Connection Guide...
Page 210 Accessory Dimensions Figure 6-9 N1258A Module Selector, in mm Keysight B1505A Configuration and Connection Guide...
Page 211 Accessory Dimensions Figure 6-10 N1261A-001 HPSMU Protection Adapter, in mm M3 4 ea, < 10 mm Figure 6-11 N1261A-002 GNDU Protection Adapter, in mm M3 4 ea, < 10 mm Keysight B1505A Configuration and Connection Guide...
Page 212 Accessory Dimensions Figure 6-12 N1261A-003 HPSMU Protection Adapter, HV Output, in mm Figure 6-13 N1261A-004 GNDU Protection Adapter, SHV Output, in mm M3 4 ea, < 10 mm 6-10 Keysight B1505A Configuration and Connection Guide...
Page 213 Accessory Dimensions Figure 6-14 N1260A High Voltage Bias-T, in mm M3 4 ea, < 10 mm 9.95 Figure 6-15 N1262A-001/002/011/021 R-Box, HV-SHV, in mm 19.9 19.9 Keysight B1505A Configuration and Connection Guide 6-11...
Page 214 Accessory Dimensions Figure 6-16 N1262A-010/020 R-Box, Triaxial-Triax, in mm 19.9 19.9 Figure 6-17 N1262A-023 R-Box, UHV-UHV, in mm 29.7 6-12 Keysight B1505A Configuration and Connection Guide...
Page 215 Accessory Dimensions Figure 6-18 N1267A HVSMU/HCSMU Fast Switch, in mm 4 - M3 4 - M3 Figure 6-19 N1269A Ultra High Voltage Connection Adapter, in mm 12.5 Keysight B1505A Configuration and Connection Guide 6-13...
Page 216 Accessory Dimensions Figure 6-20 N1272A Device Capacitance Selector, in mm 301.7 14.8 6-14 Keysight B1505A Configuration and Connection Guide...
Page 217 Accessory Dimensions Figure 6-21 N1274A On-Wafer Gate Charge Measurement Adapter/Selector for 20 A/3 kV, in mm 31.8 31.8 15.3 171.2 171.2 36.5 Keysight B1505A Configuration and Connection Guide 6-15...
Page 218 Accessory Dimensions Figure 6-22 N1275A On-Wafer Gate Charge Measurement Adapter for N1265A, in mm 20.7 33.75 6-16 Keysight B1505A Configuration and Connection Guide...
Page 219: Connection And Ordering Examples
Connection and Ordering Examples...
Page 220 Connection and Ordering Examples This chapter describes prober connection and ordering examples of Keysight B1505A Power Device Analyzer/Curve Tracer, and consists of the following sections. • "Package Device Measurement Configuration Examples" • "Configuration Examples for Lateral Device Measurement with Wafer Prober"...
Page 221: Package Device Measurement Configuration Examples
"10 kV, 500 A, High Voltage Medium Current Configuration" on page 7-23 Discrete 4 3 kV 500 A "Add High Resolution Measurement terminal Capability (10 fA resolution with device MPSMU or HPSMU) to 3 kV, 500A Configuration" on page 7-21 Keysight B1505A Configuration and Connection Guide...
Page 222: 3Kv, 20A Configuration (B1505Ap-H20 Equivalent)
N1254A-104 TRX(J) to BNC(P) adapter 16494A-001 (Included in the MCSMU) HCSMU2 F MCSMU For Gate HCSMU2 S 16493L-001 (Included in B1505A) GNDU GNDU2 16493J-001 Interlock cable (included in B1505A) Table 7-2 Ordering example Model/Option Quantity Description B1505A Power Device Analyzer/Curve Tracer mainframe B1505A-015 1.5 m cable...
Page 223 Model/Option Quantity Description N1262A R-box for B1505A N1262A-036 50 Ohm Termination Adapter 1251-2277 Banana to BNC Adapter NOTE This configuration is equivalent to the B1505AP-H20 3 kV / 20 A / Fixture Pack configuration. Keysight B1505A Configuration and Connection Guide...
Page 224: 3Kv, 20A With Capacitance Measurement Configuration
MCSMU For Gate HCSMU2 S 16494A-001 (included in the MCSMU) N1254A-512 16493L-001 (included in B1505A) (Included in N1259A-020) GNDU GNDU2 16493J-001 Interlock cable (included in B1505A) Table 7-3 Ordering example Model/Option Quantity Description B1505A Power Device Analyzer/Curve Tracer mainframe B1505A-015 1.5 m cable...
Page 225 Module Selector N1262A R-box for B1505A N1262A-036 50 Ohm Termination Adapter 1251-2277 Banana to BNC Adapter NOTE This configuration is equivalent to the B1505AP-H21 3 kV / 20 A / C-V / Fixture Pack configuration. Keysight B1505A Configuration and Connection Guide...
Page 226: Kv, 500 A Or 1500 A Configuration (B1505Ap-H50 Or B1505Ap-H70 Equivalent)
Gate S Gate L N1254A-508 N1254A-509 (Included in N12 65A-010) (Included in N1265 A-010) 16493L-001 (Included in B1505A) GNDU GNDU 16493J-001 Interlock cable (Included in B1505A) Table 7-4 Ordering example Model/Option Quantity Description B1505A Power Device Analyzer/Curve Tracer mainframe B1505A-015 1.5 m cable...
Page 227 50 Ohm Termination Adapter 1251-2277 Banana to BNC Adapter NOTE This configuration is equivalent to the B1505AP-H50 3 kV / 500 A / Fixture Pack or B1505AP-H70 3 kV / 1500 A / Fixture Pack configuration. Keysight B1505A Configuration and Connection Guide...
Page 228: Kv, 500 A Or 1500 A With Capacitance Measurement Configuration (B1505Ap-H51 Or B1505Ap-H71 Equivalent)
For Gate N1254A-513 Gate S 16494A-001 (Included in the MCSMU) N1254A-512 16493L-001 (Included in B1505A) GNDU GNDU 16493J-001 Interlock cable (Included in B1505A) NOTE For IV measurement connection diagram, please refer to Figure 7-4. Table 7-5 Ordering example Model/Option Quantity...
Page 229 Banana to BNC Adapter NOTE This configuration is equivalent to the B1505AP-H51 3 kV / 500 A / C-V / Fixture Pack or B1505AP-H71 3 kV / 1500 A / C-V / Fixture Pack configuration. Keysight B1505A Configuration and Connection Guide 7-11...
Page 230: Kv, 500 A Or 1500 A Configuration
1500 A Current Option (This option needs to be ordered only when 1500 A capability is required) N1265A-040 10 kV Ultra High Voltage Gate Protection Adapter N1268A Ultra High Voltage Expander N1268-STD Ultra High Voltage Expander 7-12 Keysight B1505A Configuration and Connection Guide...
Page 231 50 Ohm Termination Adapter 1251-2277 Banana to BNC Adapter NOTE This configuration is equivalent to the B1505AP-U50 10 kV / 500 A / Fixture Pack or B1505AP-U70 10kV / 1500 A / Fixture Pack configuration. Keysight B1505A Configuration and Connection Guide 7-13...
Page 232: Add High Resolution Measurement (10 Fa Resolution With Mpsmu Or Hpsmu) Capability To 3 Kv, 20 A Configuration
16494A-001 (Included in the MPSMU) 16494A-001 (Included in the MPSMU) HPSMU1 F For Gate MPSMU HPSMU1 S 16493L-001 (Included in B1505A) GNDU GNDU2 16493J-001 Interlock cable (included in B1505A) Table 7-7 Ordering example Model/Option Quantity Description B1505A Power Device Analyzer/Curve Tracer mainframe B1505A-015 1.5 m cable...
Page 233 Banana to Banana Cable 250 mm (red, 1ea) N1254A-509 Banana to Banana Cable 250 mm (black, 1ea) N1254A-510 Dolphin Clip 2ea (red and black) N1262A R-box for B1505A N1262A-036 50 Ohm Termination Adapter 1251-2277 Banana to BNC Adapter Keysight B1505A Configuration and Connection Guide 7-15...
Page 234: Kv, 20A, High Voltage Medium Current Configuration
MCSMU For Gate HCSMU2 S 16493L (Included in B1505A) 16493L Output GNDU GNDU GNDU2 16493J-001 Interlock cable (included in B1505A) Table 7-8 Ordering example Model/Option Quantity Description B1505A Power Device Analyzer/Curve Tracer mainframe B1512A-FG High Current Source Monitor Unit, 20 A/20 V(Pulsed); 1 A/40 V(DC) B1513C-FG High Voltage Source Monitor Unit, 3000 V/4 mA (Pulsed &...
Page 235 100 kohm R-box for gate N1259A-030 1 kohm R-box N1259A-300 Module Selector N1266A High Voltage Source Monitor Unit Current Expander N1262A R-box for B1505A N1262A-036 50 Ohm Termination Adapter 1251-2277 Banana to BNC Adapter Keysight B1505A Configuration and Connection Guide 7-17...
Page 236: Kv, 40 A Configuration
16493S-021 For Drain HCSMU N1254A-104 TRX(J) to BNC(P) adapter 16494A (Included in the MCSMU) HCSMU2 F MCSMU For Gate HCSMU2 S 16493L (Included in B1505A) GNDU GNDU2 16493J Interlock cable (included in B1505A) 7-18 Keysight B1505A Configuration and Connection Guide...
Page 237 16493L (Included in B1505A) GNDU GNDU2 16493J Interlock cable (included in B1505A) NOTE N1259A-300 Module selector is available up to 30 A. If 40 A capability is required, please connect HCSMU 1 or HCSMU 2 ports of the N1259A instead of HCSMU 3 ports (Module Selector ports).
Page 238 Connection and Ordering Examples Package Device Measurement Configuration Examples Model/Option Quantity Description N1262A R-box for B1505A N1262A-036 50 Ohm Termination Adapter 1251-2277 Banana to BNC Adapter 7-20 Keysight B1505A Configuration and Connection Guide...
Page 239: Add High Resolution Measurement Capability (10 Fa Resolution With Mpsmu Or Hpsmu) To 3 Kv, 500A Configuration
SMU 1 H For Substrate MCSMU SMU 1 SMU 1 L 16493L-001 (Included in B1505A) GNDU N1254A-508 GNDU N1254A-509 16493J-001 Interlock cable (Included in B1505A) Table 7-10 Ordering example Model/Option Quantity Description B1505A Power Device Analyzer/Curve Tracer mainframe B1505A-015 1.5 m cable...
Page 240 Quantity Description N1254A-509 Banana to Banana Cable 250 mm (black, 1ea) N1254A-510 Dolphin Clip 2 ea. (red and black) N1262A R-box for B1505A N1262A-036 50 Ohm Termination Adapter 1251-2277 Banana to BNC Adapter 7-22 Keysight B1505A Configuration and Connection Guide...
Page 241: Kv, 500 A, High Voltage Medium Current Configuration
High Voltage Source Monitor Unit, 3000 V/4 mA (Pulsed & DC) B1514A-FG Medium Current Source Monitor Unit, 1 A/30 V(Pulsed), 100 mA/30 V(DC) 16493T High Voltage Source Monitor Unit Cable 16493T-001 High Voltage Source Monitor Unit Cable (1.5 m) 16493L Ground Unit Cable Keysight B1505A Configuration and Connection Guide 7-23...
Page 242 Dolphin clip adapter, black 1 ea. and red 1 ea. N1254A-520 10 kV Ultra High Voltage Open End Cable, 1 m N1262A R-box for B1505A N1262A-036 50 Ohm Termination Adapter 1251-2277 Banana to BNC Adapter 7-24 Keysight B1505A Configuration and Connection Guide...
Page 243: Configuration Examples For Lateral Device Measurement With Wafer Prober
500 A "3 kV, 500 A, High Voltage Medium Current Measurement for On-Wafer Lateral Device" on page 7-42 10 kV 500 A "10 kV, 500 A Measurement for On-Wafer Lateral Device" on page 7-44 Keysight B1505A Configuration and Connection Guide 7-25...
Page 244: Kv, 20 A Measurement For On-Wafer Lateral Device
(Included in the MPSMU) Kelvin adapter 16493S-011 16493U-001 1250-2405 16493T Protec on Adapter N1261A-003 16493J Interlock cable (Included in the B1505A) NOTE Prober vendor is responsible for cabling inside the shielding box. Table 7-13 Required equipment, accessories, and cables Model/Option Quantity Description B1505A...
Page 245 R-box for B1505A N1262A-002 100 kohm R-box N1262A-010 1 kohm R-box for gate (Triaxial output) N1262A-036 50 Ohm Termination Adapter N1254A Accessories for instruments and fixtures N1254A-104 Triax (f) to BNC (m) adapter Keysight B1505A Configuration and Connection Guide 7-27...
Page 246 Kelvin adapter (Included in the MPSMU) 16493S-011 1250-2405 16494T Protec on Adapter N1261A-003 16493J Interlock cable (Included in B1505A) NOTE Prober vendor is responsible for cabling inside the shielding box. Table 7-14 Required equipment, accessories, and cables Model/Option Quantity Description...
Page 247 Protection Adapter for High Power Source Monitor Unit (HV-Triaxial output) N1262A R-box for B1505A N1262A-010 1 kohm R-box for gate (Triaxial output) N1262A-036 50 Ohm Termination Adapter N1254A Accessories for instruments and fixtures N1254A-104 Triax (f) to BNC (m) adapter Keysight B1505A Configuration and Connection Guide 7-29...
Page 248: Kv, 20 A, Capacitance Measurement For On-Wafer Lateral Device
R-Box N1254A-104 TRX(J) to BNC(P) adapter 1kohm N1262 A-010 16494A-003 16494A HCSMU Non- 1250-2405 (Included in the MPSMU) Kelvin adapter 16493S-011 16493U-001 Protec on Adapter N1261A-003 16493T 16493J Interlock cable (Included in B1505A) 7-30 Keysight B1505A Configuration and Connection Guide...
Page 249 (Included in the MPSMU) Kelvin adapter 16493S-011 16493U-001 Protec on Adapter N1261A-003 16493T 16493J Interlock cable (Included in B1505A) NOTE The connection diagram in Figure 7-16 shows Cds measurement. NOTE Prober vendor is responsible for cabling inside the shielding box. Table 7-15...
Page 250 R-box for B1505A N1262A-010 1 kohm R-box for gate (Triaxial output) N1262A-036 50 Ohm Termination Adapter N1254A Accessories for instruments and fixtures N1254A-104 Triax (f) to BNC (m) adapter N1256A-518 SHV Cable 1.5 m 7-32 Keysight B1505A Configuration and Connection Guide...
Page 251: Add High Resolution Measurement (10 Fa Resolution With Mpsmu Or Hpsmu) Capability To 3 Kv, 20 A, Capacitance Measurement For On-Wafer Lateral Device
Kelvin adapter (Included in the MPSMU) 16493S-011 1250-2405 16494T Protec on Adapter N1261A-003 16493J Interlock cable (Included in B1505A) NOTE Prober vendor is responsible for cabling inside the shielding box. Table 7-16 Required equipment, accessories, and cables Model/Option Quantity Description...
Page 252 Protection Adapter for High Power Source Monitor Unit (HV-Triaxial output) N1262A R-box for B1505A N1262A-010 1 kohm R-box for gate (Triaxial output) N1262A-036 50 Ohm Termination Adapter N1254A Accessories for instruments and fixtures N1254A-104 Triax (f) to BNC (m) adapter 7-34 Keysight B1505A Configuration and Connection Guide...
Page 253: Kv, 40 A Measurement For On-Wafer Lateral Device
GNDU R-Box N1254A-104 TRX(J) to BNC(P) adapter 1kohm N1262A-010 16494A-003 HCSMU Non- Kelvin adapter 16494A 16493S-011 16493U-001 (Included in the MPSMU) 1250-2405 16493T Protec on Adapter N1261A-003 16493J Interlock cable (Included in B1505A) Keysight B1505A Configuration and Connection Guide 7-35...
Page 254 16493T Protec on Adapter N1261A-003 16493J Interlock cable (Included in B1505A) NOTE Module selector is available up to 30 A. If 40 A capability is required, please connect 16493S-020 Dual HCSMU Kelvin Connection Adapter without a N1258A Module Selector (See Figure 7-19).
Page 255 R-box for B1505A N1262A-010 1 kohm R-box for gate (Triaxial output) N1262A-002 100 kohm R-box N1262A-036 50 Ohm Termination Adapter N1254A Accessories for instruments and fixtures N1254A-104 Triax (f) to BNC (m) adapter Keysight B1505A Configuration and Connection Guide 7-37...
Page 256: Kv, 500 A Measurement For On-Wafer Lateral Device
Gate F MCSMU For Gate Gate S For Chuck MCSMU 16493L (Included in B1505A) GNDU GNDU 16493J Interlock cable (Included in B1505A) 16494A N1254A-104 TRX(J) to BNC(P) adapter 16493U-001 (Included in the MCSMU) 16493U-001 HCSMU Non- Kelvin adapter 16493U-001 16493S-011...
Page 257 Configuration Examples for Lateral Device Measurement with Wafer Prober Model/Option Quantity Description N1254A Accessories for instruments and fixtures N1254A-524 Ultra High Current Prober System Cable N1254A-104 Triax (f) to BNC (m) adapter N1262A R-box for B1505A N1262A-036 50 Ohm Termination Adapter Keysight B1505A Configuration and Connection Guide 7-39...
Page 258: Kv, 500 A, Capacitance Measurement For On-Wafer Lateral Device
Power Device Analyzer/Curve Tracer mainframe B1513C-FG High Voltage Source Monitor Unit, 3000 V/4 mA (Pulsed & DC) B1514A-FG Medium Current Source Monitor Unit, 1 A/30 V(Pulsed), 100 mA/30 V(DC) B1520A-FG Multi Frequency Capacitance Measurement Unit Module 7-40 Keysight B1505A Configuration and Connection Guide...
Page 259 Accessories for instruments and fixtures N1254A-524 Ultra High Current Prober System Cable N1254A-104 Triax (f) to BNC (m) adapter N1254A-518 SHV Cable 1.5 m N1262A R-box for B1505A N1262A-036 50 Ohm Termination Adapter Keysight B1505A Configuration and Connection Guide 7-41...
Page 260 For Gate Gate S For Chuck MCSMU 16493L (Included in B1505A) 16493L Output GNDU GNDU GNDU 16493J Interlock cable (Included in B1505A) 16494A N1254A-104 TRX(J) to BNC(P) adapter 16493U-001 (Included in the MCSMU) 16493U-001 HCSMU Non- Kelvin adapter 16493U-001 16493S-011 1250-2405 NOTE Prober vendor is responsible for cabling inside the shielding box.
Page 261 BNC-T plug (m)-BNC (f)-BNC (f) adapter, 1ea N1254A Accessories for instruments and fixtures N1254A-524 Ultra High Current Prober System Cable N1254A-104 Triax (f) to BNC (m) adapter N1262A R-box for B1505A N1262A-036 50 Ohm Termination Adapter Keysight B1505A Configuration and Connection Guide 7-43...
Page 262: 10 Kv, 500 A Measurement For On-Wafer Lateral Device
Medium Current Source Monitor Unit, 1 A/30 V(Pulsed), 100 mA/30 V(DC) 16493V 10 kV Ultra High Voltage Cable 16493V-002 10 kV Ultra High Voltage Cable (3.0 m) N1265A Ultra High Current Expander/Fixture N1265A-001 Ultra High Current Expander/Fixture N1268A Ultra High Voltage Expander 7-44 Keysight B1505A Configuration and Connection Guide...
Page 263 Ultra High Voltage Connection Adapter N1254A Accessories for instruments and fixtures N1254A-521 10 kV Ultra High Voltage Jack to Jack Adapter N1254A-524 Ultra High Current Prober System Cable N1262A R-box for B1505A N1262A-036 50 Ohm Termination Adapter Keysight B1505A Configuration and Connection Guide 7-45...
Page 264: Configuration Examples For Vertical Device Measurement With Wafer Prober
500 A "3 kV, 500 A, High Voltage Medium Current Measurement for On-Wafer Vertical Device" on page 7-62 10 kV 500 A "10 kV, 500 A Measurement for On-Wafer Vertical Device" on page 7-64 7-46 Keysight B1505A Configuration and Connection Guide...
Page 265: Kv, 20 A Measurement For On-Wafer Vertical Device
16494A-003 Triaxial Cable (80 cm) 1250-2405 BNC-T Plug (m)-BNC (f)-BNC (f) adapter, 1ea 16493S High Current Source Monitor Unit Cable 16493S-011 High Current Source Monitor Unit non-Kelvin Adapter 16493S-020 Dual HCSMU Combination Adapter Keysight B1505A Configuration and Connection Guide 7-47...
Page 266 R-box for B1505A N1262A-002 100 kohm R-box N1262A-010 1 kohm R-box for gate (Triaxial output) N1262A-036 50 Ohm Termination Adapter N1254A Accessories for instruments and fixtures N1254A-104 Triax (f) to BNC (m) adapter 7-48 Keysight B1505A Configuration and Connection Guide...
Page 267 BNC-T Plug (m)-BNC (f)-BNC (f) adapter, 1ea N1258A Module Selector for B1505A 16493S High Current Source Monitor Unit Cable 16493S-011 High Current Source Monitor Unit non-Kelvin Adapter N1262A R-box for B1505A N1262A-010 1 kohm R-box for gate (Triaxial output) Keysight B1505A Configuration and Connection Guide 7-49...
Page 268 Connection and Ordering Examples Configuration Examples for Vertical Device Measurement with Wafer Prober Model/Option Quantity Description N1262A-036 50 Ohm Termination Adapter N1254A Accessories for instruments and fixtures N1254A-104 Triax (f) to BNC (m) adapter 7-50 Keysight B1505A Configuration and Connection Guide...
Page 269: Kv, 20 A, Capacitance Measurement For On-Wafer Vertical Device
16494A (Included in the MCSMU) GNDU GNDU 16493L (Included in B1505A) R-Box N1254A-104 TRX(J) to BNC(P) adapter 1kohm N1262 A-010 16494A-003 HCSMU Non- 1250-2405 Kelvin adapter 16493S-011 16493U-001 16493J Interlock cable (Included in B1505A) Keysight B1505A Configuration and Connection Guide 7-51...
Page 270 1kohm N1262 A-010 16494A-003 HCSMU Non- 1250-2405 Kelvin adapter 16493S-011 16493U-001 16493J Interlock cable (Included in B1505A) NOTE The connection diagram n Figure 7-27shows Cds measurement. NOTE Prober vendor is responsible for cabling inside the shielding box. NOTE In the connection diagram in...
Page 271 1 kohm R-box for gate (Triaxial output) N1262A-021 Universal R-Box, HV Triaxial to SHV N1262A-036 50 Ohm Termination Adapter N1254A Accessories for instruments and fixtures N1254A-104 Triax (f) to BNC (m) adapter N1254A-518 SHV Cable 1.5 m Keysight B1505A Configuration and Connection Guide 7-53...
Page 272: Add High Resolution Measurement (10 Fa Resolution With Mpsmu Or Hpsmu) Capability To 3 Kv, 20 A, Capacitance Measurement For On-Wafer Vertical Device
16493L (Included in B1505A) GNDU GNDU R-Box N1254A-104 TRX(J) to BNC(P) adapter N1262 A-010 16494A-003 HCSMU Non- 16493U-001 Kelvin adapter 16493S-011 1250-2405 16493J-001 Interlock cable NOTE Prober vendor is responsible for cabling inside the shielding box. 7-54 Keysight B1505A Configuration and Connection Guide...
Page 273 High Current Source Monitor Unit non-Kelvin Adapter N1262A R-box for B1505A N1262A-010 1 kohm R-box for gate (Triaxial output) N1262A-036 50 Ohm Termination Adapter N1254A Accessories for instruments and fixtures N1254A-104 Triax (f) to BNC (m) adapter Keysight B1505A Configuration and Connection Guide 7-55...
Page 274: Kv, 40 A Measurement For On-Wafer Vertical Device
16494A (Included in the MCSMU) 16493L (Included in B1505A) GNDU GNDU R-Box N1254A-104 TRX(J) to BNC(P) adapter 1kohm N1262 A-010 16494A-003 HCSMU Non- Kelvin adapter 16493S-011 16493U-001 1250-2405 16493J Interlock cable (Included in B1505A) 7-56 Keysight B1505A Configuration and Connection Guide...
Page 275 Kelvin adapter 16493S-011 16493U-001 1250-2405 16493J Interlock cable (Included in B1505A) NOTE Module selector is available up to 30 A. If 40 A capability is required, please connect 16493S-020 Dual HCSMU Kelvin Connection Adapter without using a N1258A Module Selector (See Figure 7-30).
Page 276 R-box for B1505A N1262A-010 1 kohm R-box for gate (Triaxial output) N1262A-002 100 kohm R-box N1262A-036 50 Ohm Termination Adapter N1254A Accessories for instruments and fixtures N1254A-104 Triax (f) to BNC (m) adapter 7-58 Keysight B1505A Configuration and Connection Guide...
Page 277: Kv, 500 A Measurement For On-Wafer Vertical Device
For Gate Ga te S 164 93L (In clud ed in B 1505A) GN DU G N D U 16493J Interlock cable (Included in B1505A) NOTE Prober vendor is responsible for cabling inside the shielding box. Table 7-28 Ordering example...
Page 278: Kv, 500 A, Capacitance Measurement For On-Wafer Vertical Device
For Gate Gate S 16494A (Included in the MCSMU) 16493L (Included in B1505A) GNDU GNDU 16494J Interlock cable (Included in B1505A) NOTE Prober vendor is responsible for cabling inside the shielding box. NOTE Please refer to Figure 7-31 for IV measurement connection example.
Page 279 Accessories for instruments and fixtures N1254A-518 SHV Cable 1.5 m N1254A-524 Ultra High Current Prober System Cable N1262A R-box for B1505A N1262A-021 Universal R-Box, HV Triaxial to SHV N1262A-036 50 Ohm Termination Adapter Keysight B1505A Configuration and Connection Guide 7-61...
Page 280 16493 L (Included in B150 5A) 1 6493L Output GNDU GN DU G N D U L ow 16493J Interlock cable (Included in B1505A) NOTE Prober vendor is responsible for cabling inside the shielding box. Table 7-30 Required equipment, accessories, and cables Model/Option Quantity...
Page 281 Ultra High Current Expander/Fixture N1266A High Voltage Source Monitor Unit Current Expander N1254A Accessories for instruments and fixtures N1254A-524 Ultra High Current Prober System Cable N1262A R-box for B1505A N1262A-036 50 Ohm Termination Adapter Keysight B1505A Configuration and Connection Guide 7-63...
Page 282: 10 Kv, 500 A Measurement For On-Wafer Vertical Device
Medium Current Source Monitor Unit, 1 A/30 V(Pulsed), 100 mA/30 V(DC) 16493V 10 kV Ultra High Voltage Cable 16493V-002 10 kV Ultra High Voltage Cable (3.0 m) N1265A Ultra High Current Expander/Fixture N1265A-001 Ultra High Current Expander/Fixture N1268A Ultra High Voltage Expander 7-64 Keysight B1505A Configuration and Connection Guide...
Page 283 Ultra High Voltage Connection Adapter N1254A Accessories for instruments and fixtures N1254A-521 10 kV Ultra High Voltage Jack to Jack Adapter N1254A-524 Ultra High Current Prober System Cable N1262A R-box for B1505A N1262A-036 50 Ohm Termination Adapter Keysight B1505A Configuration and Connection Guide 7-65...
Page 284: Gan Current Collapse / Dynamic On-Resistance Measurement System
High F 16494A HCSMU2 High S (Included in the MCSMU) B1514A Low F MCSMU Low S 16493J Interlock cable (included in B1505A) Table 7-32 Ordering example Model/Option Quantity Description B1505A Power Device Analyzer/Curve Tracer mainframe B1512A-FG High Current Source Monitor Unit, 20 A/20 V(Pulsed); 1 A/40 V(DC) B1513C-FG High Voltage Source Monitor Unit, 3000 V/4 mA (Pulsed &...
Page 285 Triax (m) to BNC (f) adapter 16493U High Current BNC Coaxial Cable 16493U-001 High Current BNC Coaxial Cable (1.5 m) N1262A R-box for B1505A N1262A-036 50 Ohm Termination Adapter 1251-2277 Adapter-BNA BNC Jack Black Keysight B1505A Configuration and Connection Guide 7-67...
Page 286: Kelvin Connection With The N1259A Test Fixture For Package Device
F HCSMU2 Low F MCSMU Low S 16494A (Included in the MCSMU) 16493J Interlock cable (included in B1505A) NOTE The N1259A-300 Module Selector option for the N1259A Test Fixture is required for making Kelvin connection. Table 7-33 Ordering example Model/Option...
Page 287 Triax (m) to BNC (f) adapter 16493U High Current BNC Coaxial Cable 16493U-001 High Current BNC Coaxial Cable (1.5 m) N1262A R-box for B1505A N1262A-036 50 Ohm Termination Adapter 1251-2277 Adapter-BNA BNC Jack Black Keysight B1505A Configuration and Connection Guide 7-69...
Page 288: Non-Kelvin Connection With Prober For On-Wafer Lateral Device
High Current Source Monitor Unit Cable 16493S-011 High Current Source Monitor Unit non-Kelvin Adapter 8120-1838 BNC Cable, 30 cm 1250-2405 BNC-T Plug (m)-BNC (f)-BNC (f) adapter, 1ea N1254A Accessories for instruments and fixtures 7-70 Keysight B1505A Configuration and Connection Guide...
Page 289 Connection and Ordering Examples GaN Current Collapse / Dynamic On-Resistance Measurement System using the N1267A Model/Option Quantity Description N1254A-104 Triax (f) to BNC (m) adapter N1262A R-box for B1505A N1262A-036 50 Ohm Termination Adapter Keysight B1505A Configuration and Connection Guide 7-71...
Page 290: Kelvin Connection With Prober For On-Wafer Lateral Device
High Current Source Monitor Unit non-Kelvin Adapter 8120-1838 BNC Cable, 30 cm 1250-2405 BNC-T Plug (m)-BNC (f)-BNC (f) adapter, 1ea N1254A Accessories for instruments and fixtures N1254A-104 Triax (f) to BNC (m) adapter 7-72 Keysight B1505A Configuration and Connection Guide...
Page 291 GaN Current Collapse / Dynamic On-Resistance Measurement System using the N1267A Model/Option Quantity Description N1262A R-box for B1505A N1262A-036 50 Ohm Termination Adapter N1261A Protection Adapter N1261A-002 Protection Adapter Ground Unit (BNC output) Keysight B1505A Configuration and Connection Guide 7-73...
Page 292: Upgrading From Existing B1505A
Upgrading from existing B1505A Upgrading from existing B1505A B1505A owners can upgrade their own B1505A to expand voltage and current range or add capacitance measurement capability. Please refer to the following step by step instructions on how to upgrade your existing B1505A.
Page 293 The N1265A Ultra High Current Expander/Fixture does not have a Bias-Tee option like the N1259A. The N1260A High Voltage Bias-Tee is necessary when making capacitance measurement up to 3 kV using a N1265A. Keysight B1505A Configuration and Connection Guide 7-75...
Page 294: Example Of How To Upgrade Existing B1505A
• Existing B1505A system configuration • B1505A with one unit of B1512A HCSMU, one unit of B1513A HVSMU, two units of B1510A HPSMU and one unit of B1520A MFCMU • N1259A Test Fixture with N1259A-010 3-line inline socket module option, N1259A-020 High Voltage Bias-Tee option and N1259A-300 Module Selector option.
Page 295 Accessories for instruments and fixtures N1254A-512 SHV Cable 250 mm N1254A-513 SHV Jack to Banana Adapter N1254A-518 SHV Cable 1.5 m N1262A R-box for B1505A N1262A-036 50 Ohm Termination Adapter 1251-2277 Adapter-BNA BNC Jack Black Keysight B1505A Configuration and Connection Guide 7-77...
Page 296 Connection and Ordering Examples Upgrading from existing B1505A 7-78 Keysight B1505A Configuration and Connection Guide...
Page 298 This information is subject to change without notice. © Keysight Technologies 2009-2015 Edition 10, December 2015 *B1505-90090* B1505-90090 www.keysight.com...

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