To Connect Hcsmu Adapter - Keysight Technologies B1505A Configuration Manual

To Connect HCSMU Adapter

Keysight 16493S-010/011 HCSMU adapter is used to convert HCSMU connectors to
BNC(f) connectors. The 16493S-010/011 should be installed near your DUT interface as
shown in
16493S-010: Adapter for making the Kelvin connection of HCSMU path
16493S-011: Adapter for making the non-Kelvin connection of HCSMU path, available for
the low current path such as the MOSFET gate terminal
Connection examples for using one HCSMU module are shown in
Kelvin connection and in
example for using two HCSMU modules is shown in
NOTE
Do not connect or put any conductor on the HCSMU Low Force and Low Sense terminals,
outer conductor of the coaxial connectors. Connecting or putting conductor of circuit
common, chassis ground, or any potential on causes the measurement error.
Table 5-10 To Connect 16493S-010/011 Input
A gilent A gilent
Lo w F orce Lo w F orce
B1505A terminals
Force
HCSMU
Sense
Table 5-11 To Connect 16493S-010/011 Output
Output terminals
Low Force Coaxial cable with BNC(m) connector. 16493U-001/002 or
N1254A-503 can be used.
Low Sense
Low terminals must be grounded by using the GNDU. If you want
High Force
to simplify the connection, connect the HCSMU adapter and the
GNDU adapter as shown in
High Sense
from the GNDU adapter to the DUT interface.
Keysight B1505A Configuration and Connection Guide
Table 5-1 on page
Figure 5-6
S ense S ense F orce F orce
F rom H C S M U F rom H C S M U
S ignal S ignal S ignal
16493S 16493S
O p t 01 0 O p t 01 0
H C S M U K e lvin A dapter H C S M U K e lvin A dapter
C ircuit C ircuit C ircuit
C om m on C om m on C om m on
40 V 40 V 40 V m ax m ax m ax
O utput O utput
Lo w S ense Lo w S ense H igh S ense H igh S ense H igh F orce H igh F orce
Required cables
16493S HCSMU cable, 3 m or 1.5 m
Required cables/Description
Connection Guide for Wafer Prober and Your Own Test Fixture
5-5.
for the non-Kelvin connection. Also a connection
Figure
S ense S ense
F rom H C S M U F rom H C S M U
16493S 16493S
A gilent A gilent O p t 01 1 O p t 01 1
H C S M U N on-K elvin A dapter H C S M U N on-K elvin A dapter
40 V 40 V 40 V m ax m ax m ax
O utput O utput
Lo w F orce Lo w F orce
Figure 5-4. It can remove the path
To Connect HCSMU Adapter
Figure 5-3 for the
5-7.
F orce F orce
S ignal S ignal S ignal
C ircuit C ircuit C ircuit
C om m on C om m on C om m on
H igh F orce H igh F orce
Input terminals
From
HCSMU
Connect to
DUT low terminal
(ex: source)
DUT high terminal
(ex: drain)
Force
Sense
5-17