Keysight Technologies B1505A Configuration Manual page 166

Connection Guide for Wafer Prober and Your Own Test Fixture
To Connect HCSMU Adapter
The following connection example uses one HCSMU module and the 16493S-010 adapter
for making the Kelvin connection. In this example, the GNDU path is prepared as a
separate path. This GNDU connection is also effective for the connection using the
16493S-011 non-Kelvin adapter.
To simplify the GNDU connection, change the connection as shown in
connection can save one manipulator.
Figure 5-3 Typical Connection to Use One HCSMU, Kelvin connection
B 1505A
Figure 5-4 To Simplify GNDU Connection, Kelvin connection
Figure 5-5 To Simplify GNDU Connection, non-Kelvin connection
5-18
16493J
16493S
16493L
16493S-010
GNDU adapter (N1261A-002)
Low Sense
Low Force
16493S-010
*2
Force
Sense
GNDU adapter (N1261A-002)
Low Force
16493S-011
*2
Force
Sense
GNDU adapter (N1261A-002)
*1: 1252-1419
*2: N1254A-503 or other cable, 5 ea.
*3: N1254A-516, 1 ea. and 16493U-001, 2 ea.
*1
Interlock circuit
*2
High
Low
*3
*1
*1: N1254A-503 or other cable, 2 ea.
*2: 1250-2405, 2 ea. and 8120-1838 or 1839, 2 ea.
*1
*1: N1254A-503 or other cable, 1 ea.
*2: 1250-2405, 2 ea. and 8120-1838 or 1839, 2 ea.
Keysight B1505A Configuration and Connection Guide
Figure 5-4. This
Shielding box
Force
DUT interface
Sense
Low
High
Sense
*2 Force
*2
To DUT interface
To DUT interface