Keysight Technologies B1500A Connection Manual
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Keysight Technologies B1500A Connection Manual

Semiconductor device analyzer, for wafer prober
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Keysight Technologies B1500A
Semiconductor Device Analyzer
Connection Guide
for Wafer Prober

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Summary of Contents for Keysight Technologies B1500A

  • Page 1 Keysight Technologies B1500A Semiconductor Device Analyzer Connection Guide for Wafer Prober...
  • Page 2 Notices Copyright Notice U.S. Government Rights Warranty © Keysight Technologies 2017 The Software is “commercial computer THE MATERIAL CONTAINED IN THIS software,” as defined by Federal DOCUMENT IS PROVIDED “AS IS,” AND No part of this manual may be Acquisition Regulation (“FAR”) 2.101.

  • Page 3: Table Of Contents

    Contents Connection Guide for Wafer Prober SMU/GNDU connection with prober ....... . 6 GNDU connections .
  • Page 5 Connection Guide for Wafer Prober...

  • Page 6: Smu/Gndu Connection With Prober

    Connection Guide for Wafer Prober SMU/GNDU connection with prober SMU/GNDU connection with prober This section describes how to connect a wafer prober to the Keysight B1500A semiconductor device analyzer. Table 1-1 Semi automated prober with B1500A B1500A with Cascade Prober...

  • Page 7: Gndu Connections

    Figure 1-2. For parts information for this connection, see Table 1-2. Figure 1-2 Example of a GNDU non-Kelvin connection Table 1-2 Item number information for GNDU non-Kelvin connection with B1500A Description Product Number Part number Ground unit cable (1.5 m) - max 4.2 A 16493L-001 Ground unit cable (3.0 m) - max 4.2 A...

  • Page 8: Kelvin Connection

    Kelvin triaxial cable is used. Figure 1-3 Example of a GNDU Kelvin connection Table 1-3 Item number information for GNDU Kelvin connection with B1500A Description Product Number Part number Kelvin triaxial cable (1.5 m) - Max 3.0 A 16493K-001 Kelvin triaxial cable (3.0 m) - Max 2.6 A...

  • Page 9: Smu Connections

    The Kelvin connection is effective for the low resistance measurement and the high current measurement. Figure 1-5 Example of an SMU non-Kelvin connection Keysight B1500A Connection Guide for Wafer Prober, Edition 1...

  • Page 10: Kelvin Connection

    Connection Guide for Wafer Prober SMU/GNDU connection with prober Table 1-4 Item number information for GNDU non-Kelvin connection with B1500A Description Product Number Part number Triaxial cable (1.5 m) 16494A-001 Triaxial cable (3.0 m) 16494A-002 Kelvin connection These instructions apply when all connections are Kelvin. Two probes must contact the wafer in this connection.

  • Page 11: Kelvin To Non-Kelvin Connection

    Kelvin connections, use an Keysight 16495J. Figure 1-7 Example of an SMU Kelvin to non-Kelvin connection Table 1-6 Item number information for SMU Kelvin to non-Kelvin connection with B1500A Description Product Number Part number Kelvin triaxial cable (1.5 m) - max 3.0 A 16493K-001 Kelvin triaxial cable (3.0 m) - max 2.6 A...

  • Page 12: Mcsmu Connections

    SMU current range less than 100 mA. Voltage ranging of terminals is indicated near connector on the Input or Output panel. The N1255A cannot be used for measurement of the IEC Measurement Category II, III, or Keysight B1500A Connection Guide for Wafer Prober, Edition 1...
  • Page 13 To simplify the connections, omit the wiring of the Common. For the non-Kelvin connection, use the High Force and the Low Force only. Omit the wiring of the High Sense and the Low Sense. Keysight B1500A Connection Guide for Wafer Prober, Edition 1...
  • Page 14 If the switch is set to “Non-Kelvin”, do not extend the Sense output corresponding to it. Voltage on the Force line also appears on the Sense line. So, open the Sense connector on the Output panel. Keysight B1500A Connection Guide for Wafer Prober, Edition 1...
  • Page 15 Sense Common Sense Common Open the Sense terminal if the switch is set to Non-Kelvin. Circuit Common Circuit Common High Sense Low Sense Low Force High Force Circuit Common Circuit Common Keysight B1500A Connection Guide for Wafer Prober, Edition 1...

  • Page 16: Connection For Low Current Measurement

    Therefore, the current measured by the instrument is same as current at the DUT terminal because no current is leaked. Keysight B1500A Connection Guide for Wafer Prober, Edition 1...
  • Page 17 The potential of the guard terminal is equal to the output voltage. CAUTION Never connect the Guard terminal to any other output, including circuit common, chassis ground, or any other guard terminal. Doing so will damage the B1500A. Keysight B1500A Connection Guide for Wafer Prober, Edition 1...

  • Page 18: Connection For Low Resistance Measurement

    Contact pad Coaxial cable Connector plate Contact pad Kelvin connection Kelvin connections give good measurement results when you force high-current. The following figure shows the equivalent circuits for Kelvin and non-Kelvin connections. Keysight B1500A Connection Guide for Wafer Prober, Edition 1...
  • Page 19 Force terminals only. Then open the Sense terminals. This is the non-Kelvin connection. The Force terminals can be used to force and measure dc voltage or current via R in Figure 1-16. Figure 1-16 Simplified SMU circuit diagram Buffer Guard Sense Force Shield Keysight B1500A Connection Guide for Wafer Prober, Edition 1...

  • Page 20: Scuu And Asu

    Connection Guide for Wafer Prober SCUU and ASU SCUU and ASU This section describes how to connect a wafer prober to the Keysight B1500A semiconductor device analyzer with SCUU and ASU. SCUU positioner-based probing connection The SCUU should be connected to the DUT by using triaxial cables as shown in Figure 1-17.

  • Page 21: Asu Connection

    16493M-001 Triax and D-sub cable for ASU (3.0 m) 16493M-002 CMU cable for B1500 (1.5 m) N1300A-001 CMU cable for B1500 (3.0 m) N1300A-002 Connector plate with universal cable 16495K holder Keysight B1500A Connection Guide for Wafer Prober, Edition 1...
  • Page 22 The prober vender will have the solutions. Dimensions of the ASU are 132 mm (W)  88.5 mm (H)  50 mm (D) excluding the connectors. Keysight B1500A Connection Guide for Wafer Prober, Edition 1...

  • Page 23: Wgfmu And Rsu

    WGFMU and RSU WGFMU and RSU This section covers the instructions to make connection between WGFMU and RF/DC probes. Before starting the instructions, complete the installation of the B1500A installed with the WGFMU. See Keysight B1500 manual. NOTE About WGFMU module installation Module installation of WGFMU must be performed by Keysight Technologies service personnel.
  • Page 24 Figure 1-20 RSU terminal Figure 1-21 16493R-802 Magnet Stand 45 mm 43 mm 71 mm 28 mm Keysight B1500A Connection Guide for Wafer Prober, Edition 1...

  • Page 25: Connecting Rf Probes

    Figure 1-22 shows RF probes from Cascade Microtech, Inc. Figure 1-23 Contact Pad and Probe Tip RF probe RF probe Source/Well Signal Signal Drain Gate Source/Well Keysight B1500A Connection Guide for Wafer Prober, Edition 1...
  • Page 26 16493R-302 SMA-SMA cable 200 mm length, 2 ea. Procedure: • Connect a SMA-SMA cable between a RSU (ex: RSU1) and the Drain RF probe. And set the Drain RF probe to the appropriate place. Keysight B1500A Connection Guide for Wafer Prober, Edition 1...
  • Page 27 3m cable between WGFMU and RSU (2ea) B1500A-030 B1500AU-W02 SMA - SMA cable (200mm) between RSU B1500A-A3P 16493R-302 and RF probe Magnet stand for RSU [Recommended] 16493R-802 16493R-802 Triaxial cable (3 m) [Optional] 16494A-002 B1500AU-T02 Keysight B1500A Connection Guide for Wafer Prober, Edition 1...

  • Page 28: Connecting Dc Probes

    DC proves. Prepare four DC probes and three connection cables to connect the DC probes together. • 50 mm length SSMC short-open cable (Furnished with B1500A-A3P. Or 16493R-101) • 70 mm length SSMC short-open cable (Furnished with B1500A-A3P. Or 16493R-102) •...
  • Page 29 DC probe. And set the Gate DC probe to the appropriate place. Figure 1-27 SSMC Short-Open Cable Black Yellow 50 mm or 75 mm SSMC(plug) SSMC(plug) Signal line and shield are shorted. no signal pin Keysight B1500A Connection Guide for Wafer Prober, Edition 1...

  • Page 30: Interlock Circuit

    For the dimensions of the switch, see Figure 1-31 below. 3. Mount an LED on your shielding box. For the dimensions of the LED, see Figure 1-29. Keysight B1500A Connection Guide for Wafer Prober, Edition 1...
  • Page 31 6. Attach the interlock connector to the mounting hole. If Keysight B1500A Interlock connector is connected to the interlock circuit, Keysight B1500A SMU cannot force more than ± 42 V when the door is open. When the door is closed, it can force more than ± 42 V.

  • Page 32: To Connect Interlock Circuit

    To connect interlock circuit The B1500A provides the Interlock connector to prevent you from receiving an electrical shock from high voltage (more than ± 42 V). If the interlock circuit is open, the B1500A cannot apply high voltage more than ± 42 V.
  • Page 34 This information is subject to change without notice. © Keysight Technologies 2017 Edition 1, June 2017 *B1500-90091* B1500-90091 www.keysight.com...

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