Keysight Technologies B1505A Configuration Manual page 280

Connection and Ordering Examples
Configuration Examples for Vertical Device Measurement with Wafer Prober
3 kV, 500 A, High Voltage Medium Current Measurement for
On-Wafer Vertical Device
•
•
Figure 7-33 3 kV, 500 A, High Voltage Medium Current Measurement for On-wafer Vertical
Device
1649 3G -001 D igital I/O cable (Inclu ded in N 1266A)
B15 0 5A
16493T (Inclu ded in th e H VSM U)
For Drain
H VSM U
1649 4A (In clud ed in the M C SM U)
F
For N 126 6A M C SM U
S
F
M C SM U
For N 126 6A
S
164 94A (In clud ed in the M C SM U)
F
M C SM U
For N 126 5A
S
F
M C SM U
For N 126 5A
S
F
M C SM U
For Ga te
S
16493 L (Included in B150 5A)
G N D U
16493J Interlock cable (Included in B1505A)
NOTE Prober vendor is responsible for cabling inside the shielding box.
Table 7-30 Required equipment, accessories, and cables
Model/Option Quantity
B1505A
B1513C-FG
B1514A-FG
16493T
16493T-001 or
002
16493L
7-62
Device Type: Vertical MOSFET (3 terminals)
Key Specification
• Max voltage/current: 3 kV/500 A
• High Voltage Medium Current capability: 2200 V/1.1 A, 1500 V/2.5 A
• Module Selector for multi-parameter automated measurement function
16 493G -001 D igital I/O cab le (Inclu ded in N1265A)
Input Output
Output
Input
High
HV SM U
V control F
Vc ontrol S
Icontrol F
Ic ontrol S
N 1266A
Output
GNDU
L ow
1 Power Device Analyzer/Curve Tracer mainframe
1 High Voltage Source Monitor Unit, 3000 V/4 mA (Pulsed & DC)
5 Medium Current Source Monitor Unit, 1 A/30 V(Pulsed), 100 mA/30 V(DC)
1 High Voltage Source Monitor Unit Cable
1 High Voltage Source Monitor Unit Cable (1.5 m or 3.0 m)
1 Ground Unit Cable
N 12 65 A
1 6493T
HV SMU
Selec tor
High
Low
Gate
UHC Input
V Control
I Control
Ga te F
Ga te S
1 6493L
GN DU
Description
Keysight B1505A Configuration and Connection Guide
N12 54A -52 4
HF
D (Chuc k)
LF
HS
G
LS
G
ate
S