Keysight Technologies B1505A Configuration Manual page 174

Connection Guide for Wafer Prober and Your Own Test Fixture
To Connect High Voltage Bias Tee
Table 5-19 To Connect N1260A Output
AC Guard AC Guard
N1260A terminals
Output Low Coaxial cable with SHV(plug) connector.
High Coaxial cable with SHV(plug) connector.
AC Guard Coaxial cable with SHV(plug) connector.
This terminal provides the AC guard (circuit common) signal of
MFCMU. For the 3-terminal device measurement, the AC Guard
must be extended to the device terminal which is not connected to
Low or High.
Figure 5-9 To Connect N1260A High Voltage Bias-Tee
5-26
Output Output
Low Low
! !
! ! ! !
Signal Signal
AC Guard/Return AC Guard/Return
Required cables/Description
B 1505A
HVSMU
Force
MFCMU
N1300A
High High
3kV 3kV 3kV M ax M ax M ax
N1260A High Voltage Bias-T
16493T
HVSMU
Hcur
Hpot
Lpot
Lcur
Keysight B1505A Configuration and Connection Guide
Connect to
DUT low terminal
(ex: source)
DUT high terminal
(ex: drain)
DUT terminal
(ex: gate)
AC Guard
High
Low
DUT