Kv, 500 A Measurement For On-Wafer Lateral Device - Keysight Technologies B1505A Configuration Manual

Connection and Ordering Examples
Configuration Examples for Lateral Device Measurement with Wafer Prober

3 kV, 500 A Measurement for On-Wafer Lateral Device

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•
Figure 7-20 Connection example
16493G-001 Digital I/O cable (Included in N1265A)
B1505A
For Drain
HVSMU
F
MCSMU
For N1265A
S
F
MCSMU
For N1265A
S
F
MCSMU
For Gate
S
F
For Chuck MCSMU
S
GNDU
16494A
(Included in the MCSMU)
NOTE Prober vendor is responsible for cabling inside the shielding box.
Table 7-18 Ordering example
Model/Option Quantity
B1505A
B1513C-FG
B1514A-FG
N1265A
N1265A-001
16493S
16493S-011
16493U
16493U-001
1250-2405
7-38
Device Type: Lateral MOSFET (4 terminals)
Key Specification
• Max voltage/current: 3 kV/500 A
• Module Selector for multi-parameter automated measurement function
16493T (Included in the HVSMU)
16494A (Included in the MCSMU)
16493L (Included in B1505A)
16493J Interlock cable (Included in B1505A)
N1254A-104 TRX(J) to BNC(P) adapter
HCSMU Non-
Kelvin adapter
16493S-011
1 Power Device Analyzer/Curve Tracer mainframe
1 High Voltage Source Monitor Unit, 3000 V/4 mA (Pulsed & DC)
4 Medium Current Source Monitor Unit, 1 A/30 V(Pulsed), 100 mA/30 V(DC)
1 Ultra High Current Expander/Fixture
1 Ultra High Current Expander/Fixture
1 High Current Source Monitor Unit Cable
1 High Current Source Monitor Unit non-Kelvin Adapter
1 High Current BNC Coaxial Cable
3 High Current BNC Coaxial Cable (1.5 m)
1 BNC-T plug (m)-BNC (f)-BNC (f) adapter, 1ea
N1265A
HVSMU
Selector
High
Low
Gate
UHC Input
V Control
I Control
Gate F
Gate S
GNDU
16493U-001
16493U-001
16493U-001
1250-2405
Description
Keysight B1505A Configuration and Connection Guide
N1254A-524
HF
D
LF
HS G
LS
Chuck
G ate
S