Semiconductor device analyzer, for wafer prober (34 pages)
Summary of Contents for Keysight Technologies B2901A
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Keysight Technologies Detailed Demonstration Guide: Making Resistance Measurement Using SMU Keysight B2901A/02A/11A/12A Precision Source/Measure Unit Demonstration Guide...
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Introduction The Keysight Technologies, Inc. Required Instrument and Accessories B2901A/02A/11A/12A Precision Source/Measure Units are compact Keysight 11059A Kelvin Probe Set and Resistors are equipped as a demo kit and cost-effective bench-top Source/ with a demo unit of the Keysight B2900A Series of SMU.
LAB 1: Make a Resistance Measurement Objective Setup This lab shows how a single-point 1. Connect the yellow banana plug to Ch 1 Low Force terminal. measurement can be done with 2. Connect the red banana plug to Ch 1 High Force terminal. an intuitive GUI and shallow menu 3.
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LAB 1: Make a Resistance Measurement (continued) d. Press to repeat single point measurements periodically. Measurement parameters are updated periodically “Auto” indicator is turned on e. Press to stop making measurements periodically. “Auto” indicator is turned off 3. Turn off the channel output a.
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LAB 2: Make an Accurate Low Resistance Measurement Objective Setup This demonstration shows how accu- 1. Connect the yellow banana plug to Ch 1 Low Force terminal. rately a low resistance measurement 2. Connect the orange banana plug to Ch 1 Low Sense terminal. can be done with 4-wire connection 3.
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LAB 2: Make an Accurate Low Resistance Measurement (continued) Status indicator to show 4-wire configuration If the channel is configured to use 4-wire connection, you can see the status indicator on GUI as below, although no indicator can be seen on being configured to use 2-wire connection.
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LAB 2: Make an Accurate Low Resistance Measurement (continued) 2. Perform the measurement via 4-wire connection a. Press , and then press to display Output Connection dialogue. (1) Press Config (2) Press Source (3) Press Connection b. Press and select , and then press to configure to use 4-wire connection.
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LAB 2: Make an Accurate Low Resistance Measurement (continued) e. Press and set Channel 1 Limit value to 1 V. Resistance measurement operation (1) Press Limit (2) Enter 1 V The resistance measurement operation is set to OFF in the default setting.
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LAB 2: Make an Accurate Low Resistance Measurement (continued) c. Press , and then press to configure to use 4-wire connection. (2) Press 2-WIRE (1) Press (3) Press OK d. Press Ch1 to turn on Channel 1 Output relay. e. Press to perform a single point measurement.
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