Kv, 500 A Measurement For On-Wafer Vertical Device - Keysight Technologies B1505A Configuration Manual

3 kV, 500 A Measurement for On-Wafer Vertical Device

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•
Figure 7-31 Connection example
1649 3G -001 D igital I/O cable (In clu ded in N1 265A)
B15 0 5A
For Drain
H V SM U
F
M C SM U
For N12 65 A
S
F
M C SM U
For N1 265 A
S
F
M C SM U
For Gate
S
G N D U
16493J Interlock cable (Included in B1505A)
NOTE
Prober vendor is responsible for cabling inside the shielding box.
Table 7-28 Ordering example
Model/Option Quantity
B1505A
B1513C-FG
B1514A-FG
N1265A
N1265A-001
N1254A
N1254A-524
N1262A
N1262A-036
Keysight B1505A Configuration and Connection Guide
Configuration Examples for Vertical Device Measurement with Wafer Prober
Device Type: Vertical MOSFET (3 terminals)
Key Specification
• Max voltage/current: 3 kV/500 A
• Module Selector for multi-parameter automated measurement function
164 93T (In clud ed in the H VS M U)
164 94A (In clud ed in the M CSM U)
164 93L (In clud ed in B 1505A)
1 Power Device Analyzer/Curve Tracer mainframe
1 High Voltage Source Monitor Unit, 3000 V/4 mA (Pulsed & DC)
3 Medium Current Source Monitor Unit, 1 A/30 V(Pulsed), 100 mA/30 V(DC)
1 Ultra High Current Expander/Fixture
1 Ultra High Current Expander/Fixture
1 Accessories for instruments and fixtures
1 Ultra High Current Prober System Cable
1 R-box for B1505A
1 50 Ohm Termination Adapter
Connection and Ordering Examples
N 12 65 A
HV SMU
N12 54A -52 4
Selec tor
High
Low
HF
LF
Gate
HS
LS
UHC Input
G
ate
V Control
I Control
Ga te F
Ga te S
GN DU
Description
D
(Chuc k)
G
S
7-59