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If Measurement Damages the Device under Test
When performing breakdown measurements, DUTs may be damaged.
When voltage is forced from an SMU, the current is limited by the compliance
setting, which prevents the DUT from being damaged by a large current. But when
the current rapidly increases, the current limiter in the SMU cannot follow the rapid
current increase, so a large amount of current may flow through the DUT for a
moment, which may damage the DUT.
To solve this problem:
•
Insert a protecting resistor as close as possible to DUT. You can also use a series
resistor built into the SMU.
Keysight E5260/E5270 User's Guide, Edition 6
If You Have a Problem
When You Make a Measurement
7-9
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