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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
Model
Max. power
High voltage
Filament current
Beam deflection
Magnet system
X-deflection
Y-deflection
. vacuum
evaporation rate
1
Crucible rotation
Emission current
operating pressure
(1 Pa=0.01 mbar)
Cooling Water flow
Tin<40°C
p= 0.4 ... 0.6 MPa
(4...6 bar)
Feedthroughs
Outside diameter
of feedthrough
Weight
Part no.
Dimensions
1
= for aluminium, distance between EB gun and substrate = 250 mm
2.3.3 General specification
2.3.3.1
Ambient temperature range
Minimum temperature:
Maximum temperature:
Version 1.3.19
EVM-4
A
B
C
D
3 kW
4 ... 10 kV
50 A (10 VAC)
270° magnetic
STD (150°C)
±3 A (150 Hz)
±3 A (150 Hz)
1.6 nm/s (Al, 3 kW)
Yes
Max. 300 mA
<0.1 Pa, >10
−6
Pa
6 l/min (3 kW)
2× Ø 8/10 mm PE
32 mm
9 kg
1-62 40 00
A = 175 mm
B = 108 mm
C = 298 mm
D = 106 mm
page 9/64
+5°C
+40°C
Ferrotec GmbH
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