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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
Complete daily cleaning
8.1
Maintenance
8.2
8.2.1 Function test plan
Emergency stop system (emergency stop buttons)
Mains isolator (main switch)
Check all electric terminal and plug connections
Settings on the safety circuit-breakers
Push buttons and switches on the switch cabinet
Version 1.3.19
The times specified in this instruction handbook are based on
one-shift operation (8 hours/day, 22 days/month,
12 months/year).
D
= Daily
W
= Weekly
M
= Monthly
¼ Y = Quarterly
handbook
The shut down procedure must be followed before any
cleaning, maintenance or repair work is carried out (see chap.
4.5). Do not use sharp objects or tools to clean the machine
unless they are explicitly intended for this purpose.
During maintenance work beware of the danger of electric
shock!
During cleaning and maintenance work on the electron beam
evaporator (on the crucible when the vacuum chamber is
open) beware of the danger of crushing when turning the
crucible.
page 42/64
NOTICE
½ Y
= Half-yearly
Y
= Yearly
W.Hr.
= Work hours
MIH
=
Manufacturer's
instruction
DANGER
DANGER
DANGER
Interval for One-Shift System
W
M
½ Y
X
X
X
Y
MIH
X
X
Ferrotec GmbH
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