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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
Interfaces on the Electron Beam Evaporator
3.3
There are the following interfaces on the electron beam evaporator:
1. Deflection
2. Cathode connection
3. Evaporator
4. Feedthrough to the vacuum system
5. Cooling water inlet (not illustrated)
6. Drive unit connection
Safety precautions (by the operator)
3.4
The operator must:
instruct his operating and maintenance personnel in the use of the safeguards of the
•
electron beam evaporator and
ensure the safety precautions are being observed including the use of personal
•
protective equipment.
The owner must ensure that entry to the hazard area of the machine (into which the
•
electron beam evaporator has been built) by unauthorized persons (no operating and
maintenance personnel) is prevented. The minimum clearances stated in DIN EN ISO
13857 are to be complied with when installing the electron beam evaporator.
Version 1.3.19
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2
3
4
5
6
Fig. 3 Interfaces on the Electron Beam Evaporator
page 15/64
Evaporator
Water unit
Drive unit
Ferrotec GmbH
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